JPS6488237A - Surface inspecting apparatus - Google Patents
Surface inspecting apparatusInfo
- Publication number
- JPS6488237A JPS6488237A JP24411787A JP24411787A JPS6488237A JP S6488237 A JPS6488237 A JP S6488237A JP 24411787 A JP24411787 A JP 24411787A JP 24411787 A JP24411787 A JP 24411787A JP S6488237 A JPS6488237 A JP S6488237A
- Authority
- JP
- Japan
- Prior art keywords
- light
- detection means
- lens
- inspected
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
PURPOSE:To discriminate surface defect with good accuracy, by arranging a plurality of detection means at the positions optimum to detection and receiving the detection lights corresponding to the kind or shape of the flaw present on a surface to be inspected over a wide range. CONSTITUTION:A means for projecting the light emitted from a light source 3 on the surface of a body 1 to be inspected, the first detection means for detecting diffracted light due to regular reflection and the second detection means for detecting high order diffracted light are mounted. The included angle gamma1 of the optical axis P of the first detection means and the optical axis Q of the second detection means is set to gamma1>=alpha+beta and regular reflected light is detected by a light receiving lens 7 and high order diffracted light is detected by a light receiving lens 17. The light transmitting through the spatial filter 8 and high band-pass filter 9 at the focal position of the lens 7 is converted to an electric signal by a photoelectric converter 10 and the light transmitting through a lens 17 is converted to an electric signal by a photoelectric converter 20 and the surface flaw of the body 1 to be inspected is discriminated through a discrimination circuit.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24411787A JPS6488237A (en) | 1987-09-30 | 1987-09-30 | Surface inspecting apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24411787A JPS6488237A (en) | 1987-09-30 | 1987-09-30 | Surface inspecting apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6488237A true JPS6488237A (en) | 1989-04-03 |
Family
ID=17114013
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24411787A Pending JPS6488237A (en) | 1987-09-30 | 1987-09-30 | Surface inspecting apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6488237A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05322794A (en) * | 1992-02-28 | 1993-12-07 | Sumitomo Metal Ind Ltd | Defect inspecting device |
EP0757245A2 (en) * | 1995-08-03 | 1997-02-05 | TZN Forschungs- und Entwicklungszentrum Unterlüss GmbH | Apparatus for detecting streaky surface defects |
US5903342A (en) * | 1995-04-10 | 1999-05-11 | Hitachi Electronics Engineering, Co., Ltd. | Inspection method and device of wafer surface |
US6411377B1 (en) * | 1991-04-02 | 2002-06-25 | Hitachi, Ltd. | Optical apparatus for defect and particle size inspection |
WO2005090908A1 (en) * | 2004-03-23 | 2005-09-29 | Oy Optoinspection Ltd. | High-speed optical profiler |
US11029255B2 (en) | 2016-08-18 | 2021-06-08 | Fujifilm Corporation | Defect inspection device, defect inspection method, and program |
-
1987
- 1987-09-30 JP JP24411787A patent/JPS6488237A/en active Pending
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7639350B2 (en) | 1991-04-02 | 2009-12-29 | Hitachi, Ltd | Apparatus and method for testing defects |
US6411377B1 (en) * | 1991-04-02 | 2002-06-25 | Hitachi, Ltd. | Optical apparatus for defect and particle size inspection |
US7037735B2 (en) | 1991-04-02 | 2006-05-02 | Hitachi, Ltd. | Apparatus and method for testing defects |
US7098055B2 (en) | 1991-04-02 | 2006-08-29 | Hitachi, Ltd. | Apparatus and method for testing defects |
US7443496B2 (en) | 1991-04-02 | 2008-10-28 | Hitachi, Ltd. | Apparatus and method for testing defects |
US7692779B2 (en) | 1991-04-02 | 2010-04-06 | Hitachi, Ltd. | Apparatus and method for testing defects |
US7940383B2 (en) | 1991-04-02 | 2011-05-10 | Hitachi, Ltd. | Method of detecting defects on an object |
JPH05322794A (en) * | 1992-02-28 | 1993-12-07 | Sumitomo Metal Ind Ltd | Defect inspecting device |
US5903342A (en) * | 1995-04-10 | 1999-05-11 | Hitachi Electronics Engineering, Co., Ltd. | Inspection method and device of wafer surface |
EP0757245A2 (en) * | 1995-08-03 | 1997-02-05 | TZN Forschungs- und Entwicklungszentrum Unterlüss GmbH | Apparatus for detecting streaky surface defects |
EP0757245A3 (en) * | 1995-08-03 | 1997-06-25 | Tzn Forschung & Entwicklung | Apparatus for detecting streaky surface defects |
WO2005090908A1 (en) * | 2004-03-23 | 2005-09-29 | Oy Optoinspection Ltd. | High-speed optical profiler |
US11029255B2 (en) | 2016-08-18 | 2021-06-08 | Fujifilm Corporation | Defect inspection device, defect inspection method, and program |
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