JPS6488237A - Surface inspecting apparatus - Google Patents

Surface inspecting apparatus

Info

Publication number
JPS6488237A
JPS6488237A JP24411787A JP24411787A JPS6488237A JP S6488237 A JPS6488237 A JP S6488237A JP 24411787 A JP24411787 A JP 24411787A JP 24411787 A JP24411787 A JP 24411787A JP S6488237 A JPS6488237 A JP S6488237A
Authority
JP
Japan
Prior art keywords
light
detection means
lens
inspected
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24411787A
Other languages
Japanese (ja)
Inventor
Masayoshi Shimada
Seikichi Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP24411787A priority Critical patent/JPS6488237A/en
Publication of JPS6488237A publication Critical patent/JPS6488237A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To discriminate surface defect with good accuracy, by arranging a plurality of detection means at the positions optimum to detection and receiving the detection lights corresponding to the kind or shape of the flaw present on a surface to be inspected over a wide range. CONSTITUTION:A means for projecting the light emitted from a light source 3 on the surface of a body 1 to be inspected, the first detection means for detecting diffracted light due to regular reflection and the second detection means for detecting high order diffracted light are mounted. The included angle gamma1 of the optical axis P of the first detection means and the optical axis Q of the second detection means is set to gamma1>=alpha+beta and regular reflected light is detected by a light receiving lens 7 and high order diffracted light is detected by a light receiving lens 17. The light transmitting through the spatial filter 8 and high band-pass filter 9 at the focal position of the lens 7 is converted to an electric signal by a photoelectric converter 10 and the light transmitting through a lens 17 is converted to an electric signal by a photoelectric converter 20 and the surface flaw of the body 1 to be inspected is discriminated through a discrimination circuit.
JP24411787A 1987-09-30 1987-09-30 Surface inspecting apparatus Pending JPS6488237A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24411787A JPS6488237A (en) 1987-09-30 1987-09-30 Surface inspecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24411787A JPS6488237A (en) 1987-09-30 1987-09-30 Surface inspecting apparatus

Publications (1)

Publication Number Publication Date
JPS6488237A true JPS6488237A (en) 1989-04-03

Family

ID=17114013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24411787A Pending JPS6488237A (en) 1987-09-30 1987-09-30 Surface inspecting apparatus

Country Status (1)

Country Link
JP (1) JPS6488237A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05322794A (en) * 1992-02-28 1993-12-07 Sumitomo Metal Ind Ltd Defect inspecting device
EP0757245A2 (en) * 1995-08-03 1997-02-05 TZN Forschungs- und Entwicklungszentrum Unterlüss GmbH Apparatus for detecting streaky surface defects
US5903342A (en) * 1995-04-10 1999-05-11 Hitachi Electronics Engineering, Co., Ltd. Inspection method and device of wafer surface
US6411377B1 (en) * 1991-04-02 2002-06-25 Hitachi, Ltd. Optical apparatus for defect and particle size inspection
WO2005090908A1 (en) * 2004-03-23 2005-09-29 Oy Optoinspection Ltd. High-speed optical profiler
US11029255B2 (en) 2016-08-18 2021-06-08 Fujifilm Corporation Defect inspection device, defect inspection method, and program

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7639350B2 (en) 1991-04-02 2009-12-29 Hitachi, Ltd Apparatus and method for testing defects
US6411377B1 (en) * 1991-04-02 2002-06-25 Hitachi, Ltd. Optical apparatus for defect and particle size inspection
US7037735B2 (en) 1991-04-02 2006-05-02 Hitachi, Ltd. Apparatus and method for testing defects
US7098055B2 (en) 1991-04-02 2006-08-29 Hitachi, Ltd. Apparatus and method for testing defects
US7443496B2 (en) 1991-04-02 2008-10-28 Hitachi, Ltd. Apparatus and method for testing defects
US7692779B2 (en) 1991-04-02 2010-04-06 Hitachi, Ltd. Apparatus and method for testing defects
US7940383B2 (en) 1991-04-02 2011-05-10 Hitachi, Ltd. Method of detecting defects on an object
JPH05322794A (en) * 1992-02-28 1993-12-07 Sumitomo Metal Ind Ltd Defect inspecting device
US5903342A (en) * 1995-04-10 1999-05-11 Hitachi Electronics Engineering, Co., Ltd. Inspection method and device of wafer surface
EP0757245A2 (en) * 1995-08-03 1997-02-05 TZN Forschungs- und Entwicklungszentrum Unterlüss GmbH Apparatus for detecting streaky surface defects
EP0757245A3 (en) * 1995-08-03 1997-06-25 Tzn Forschung & Entwicklung Apparatus for detecting streaky surface defects
WO2005090908A1 (en) * 2004-03-23 2005-09-29 Oy Optoinspection Ltd. High-speed optical profiler
US11029255B2 (en) 2016-08-18 2021-06-08 Fujifilm Corporation Defect inspection device, defect inspection method, and program

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