JPS61207951A - Defect inspecting device for transparent object - Google Patents
Defect inspecting device for transparent objectInfo
- Publication number
- JPS61207951A JPS61207951A JP4736585A JP4736585A JPS61207951A JP S61207951 A JPS61207951 A JP S61207951A JP 4736585 A JP4736585 A JP 4736585A JP 4736585 A JP4736585 A JP 4736585A JP S61207951 A JPS61207951 A JP S61207951A
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- light
- scattered
- defect
- transparent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 陥を検出する透明物体欠陥検査装置に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a transparent object defect inspection device that detects defects.
ガラス等の透明物体は、製造時に傷あるいは気泡、異物
の混入等の欠陥を生じる。この欠陥は強度を弱め、また
美観を損ねるので、製造時（＝透明物体に生じこ全欠陥
数を検査してこれを取除かなければならない。ところで
、一般にこの種の検査は目視によって行なわれているが
。Transparent objects such as glass have defects such as scratches, bubbles, and foreign matter during manufacturing. Since these defects weaken the strength and impair the aesthetic appearance, it is necessary to inspect the total number of defects that occur on transparent objects and remove them during manufacturing.By the way, this type of inspection is generally done visually. Although it is.
検査の効率化、均一化、精度向上環の要求から。Due to the demand for improved efficiency, uniformity, and precision in inspections.
検査の自動化が必要とされていた。There was a need for automated testing.
そこで、従来、透明な被検査物体にレーザ光を照射し、
その透過光あるいは反射光の光量を測定する透明物体検
査装置により、正常部では受光器に対し一定の光量の入
力があるが、欠陥部では散乱が生じ受光器に達する光量
が減少することから、欠陥の有無を検査している。Therefore, conventionally, a transparent object to be inspected is irradiated with laser light.
Using a transparent object inspection device that measures the amount of transmitted light or reflected light, a constant amount of light is input to the receiver in normal areas, but scattering occurs in defective areas, reducing the amount of light that reaches the receiver. Inspecting for defects.
しかしながら、このような従来の透明物体検査装置では
、受光器で常に強度の強い一定光量の光を受光し、欠陥
で散乱が生じることによる受光量の微小な減少を検出し
ているので、信号対雑音化が非常に悪く、精度上問題が
あった。However, in such conventional transparent object inspection equipment, the light receiver always receives a constant amount of strong light and detects minute decreases in the amount of received light due to scattering caused by defects, so the signal The noise conversion was very poor, and there were problems with accuracy.
本発明による透明物体欠陥検査装置は、透明な被検査物
体を所定の位置に保持する手段と。A transparent object defect inspection apparatus according to the present invention includes means for holding a transparent object to be inspected in a predetermined position.
該被検査物体にビーム状の光線を照査する手段と、該被
検査物体中に存在する欠陥により散乱する光を検出する
ように配置したセンサ部とからなり、該センサ部を、前
記被検査物体中に存在する欠陥により散乱した光のうち
、全反射のくり返しにより前記被検査物体の内部を伝播
し該被検査物体の側面から該被検査物体の外部へ出
出る散乱光を検゛巖゛するように配置したことを特徴と
する。It consists of means for illuminating the object to be inspected with a beam-shaped light beam, and a sensor section arranged to detect light scattered by defects existing in the object to be inspected, and the sensor section is connected to the object to be inspected. Of the light scattered by defects existing inside, the scattered light propagates inside the object to be inspected by repeated total reflections and exits from the side of the object to the outside of the object to be inspected. It is characterized by being arranged as follows.
透明物体１ニビーム光の光線を照射した時、該透明物体
中に存在する欠陥により散乱した光のうち、該透明物体
内から該透明物体表面に臨界角以下で入射した光は、該
透明物体内で全反射をくり返しながら伝播し、該透明物
体の側面から外部へ放出される。本発明では、この透明
物体の側面から外部へ放出される散乱光を検出すること
により、該透明物体中に存在する欠陥を検出する。When a transparent object 1 is irradiated with a beam of double-beam light, among the light scattered by defects existing in the transparent object, the light that is incident on the surface of the transparent object from within the transparent object at an angle below the critical angle is reflected within the transparent object. The light propagates through repeated total reflections and is emitted to the outside from the side of the transparent object. In the present invention, defects present in the transparent object are detected by detecting scattered light emitted to the outside from the side surface of the transparent object.
以下９本発明の実施例について図面を参照して説明する
。Hereinafter, nine embodiments of the present invention will be described with reference to the drawings.
第１図は本発明の詳細な説明するための配置図である。FIG. 1 is a layout diagram for explaining the present invention in detail.
第１図において、透明な被検査物体１を側面散乱光を効
果的に受光できる位置に保持機構２で固定し、照射機構
４から発せられたビーム状の光線３が該被検査物体１を
照射した時生ずる散乱光のうち、該被検査物体１の側面
から外部に出る側面散乱光６を検出するようにセンサ部
７を配置する。このとき該被検査物体１中に欠陥５が存
在しない場合には該光線３は散乱することなく透過し、
該センサ部７は該側面散乱光６を受光しない。一方、被
検査物体１中に欠陥５が存在する場合は、該欠陥５で散
乱した散乱光のうち、該被検査物体１の表面で全反射す
る光は該被検査物体１の内部を伝播し。In FIG. 1, a transparent object to be inspected 1 is fixed by a holding mechanism 2 at a position where side scattered light can be effectively received, and a beam-shaped light beam 3 emitted from an irradiation mechanism 4 illuminates the object to be inspected 1. The sensor section 7 is arranged so as to detect the side scattered light 6 which exits from the side surface of the object 1 to be inspected, among the scattered light generated when the object 1 is inspected. At this time, if there is no defect 5 in the object 1 to be inspected, the light ray 3 is transmitted without being scattered,
The sensor section 7 does not receive the side scattered light 6. On the other hand, if a defect 5 exists in the object to be inspected 1, out of the scattered light scattered by the defect 5, the light that is totally reflected on the surface of the object to be inspected 1 propagates inside the object to be inspected 1. .
該被検査物体１の側面から外部に出るので、この側面散
乱光６をセンサ部７で受光し、欠陥の有無を検出するこ
とができる。Since the light exits from the side surface of the object to be inspected 1, this side surface scattered light 6 can be received by the sensor section 7 to detect the presence or absence of a defect.
欠陥５の位置が、被検査物体１の側面から遠くなると、
散乱光の伝播時に損失が大きくなり光量が減少するが、
センサ部を７および７′の如（被検査物体１の両側面に
配することにより。When the position of the defect 5 becomes far from the side surface of the object to be inspected 1,
When scattered light propagates, the loss increases and the amount of light decreases, but
By arranging the sensor sections 7 and 7' on both sides of the object to be inspected 1.
少な（ともどちらか一方のセンサ部では十分な光量を受
光できる。ただし、被検査物体の形状に応じて、センサ
部を１つだけとした構成とすることもできる。However, depending on the shape of the object to be inspected, it is also possible to use a configuration with only one sensor section.
第２図は照射機構の構成を説明するためのブロック図で
ある。第２図において、８はレーザ光源、９は被検査物
体１の表面および内部において所定のビーム径および焦
点深度を得るための集光レンズ、１０は該被検査物体１
の所定範囲を走査するための走査手段である。この走査
手段１０には振動鏡９回転多面鏡等を用いることができ
る。あるいは被検査物体１を動がしてもよい。被検査物
体の形状、大きさによってはこの集光レンズ９と走査手
段１ｏのない構成とすることもできる。FIG. 2 is a block diagram for explaining the configuration of the irradiation mechanism. In FIG. 2, 8 is a laser light source, 9 is a condenser lens for obtaining a predetermined beam diameter and depth of focus on the surface and inside of the object to be inspected 1, and 10 is the object to be inspected 1
This is a scanning means for scanning a predetermined range of. As the scanning means 10, a vibrating mirror, a nine-turn polygon mirror, or the like can be used. Alternatively, the object to be inspected 1 may be moved. Depending on the shape and size of the object to be inspected, it is also possible to have a configuration without the condenser lens 9 and the scanning means 1o.
第６図はセンサ部の構成を説明するためのブロック図で
ある。第３図において、１１は被検査物体１の側面から
出る側面散乱光６を集光し。FIG. 6 is a block diagram for explaining the configuration of the sensor section. In FIG. 3, reference numeral 11 collects side-scattered light 6 emitted from the side surface of the object 1 to be inspected.
光センサ１２に導く集光手段である。このような集光手
段１１として、レンズ、光ファイバ等を用いることがで
きる。この集光手段１１のない構成とすることもできる
。光センサ１２は。It is a condensing means that guides the light to the optical sensor 12. As such a condensing means 11, a lens, an optical fiber, etc. can be used. It is also possible to have a configuration without this condensing means 11. The optical sensor 12 is.
側面散乱光６を受光し、出力信号１３を生ずる。The side scattered light 6 is received and an output signal 13 is generated.
光センサ１２は必要に応じてスポット状の光センサある
いはリニア形状の光センサ、あるいはマトリクス状の光
センサを用いることができる。As the optical sensor 12, a spot-shaped optical sensor, a linear-shaped optical sensor, or a matrix-shaped optical sensor can be used as required.
このような光センサとして、フォトダイオード。Photodiodes such as light sensors.
光電子増倍管、フォトダイオードアレイ、 ＣＩＣＤ等
を用いることができる。また、光センサ１２の前に、外
乱光除去用のフィルタを取付けてもよい。A photomultiplier tube, a photodiode array, a CICD, etc. can be used. Further, a filter for removing disturbance light may be attached in front of the optical sensor 12.
第４図は本発明による一実施例を説明するための配置図
である。第４図において、レーザ光源８から発せられた
ビーム状光線６を集光レンズ９により被検査物体１面上
に集光し、走査手段１０により、該被検食物体１の面上
を２次元に走査する。該被検査物体１中に欠陥５が存在
する場合、光線３が該欠陥５により散乱し、該被検査物
体１内面を伝播して側面から出る側面ンサ部７の集光手
段１１に光フアイババンドル。FIG. 4 is a layout diagram for explaining one embodiment of the present invention. In FIG. 4, a beam-like light beam 6 emitted from a laser light source 8 is focused onto the surface of an object to be inspected by a condenser lens 9, and a scanning means 10 scans the surface of the object to be inspected 1 in two dimensions. Scan to. When a defect 5 exists in the object to be inspected 1, the light beam 3 is scattered by the defect 5, propagates through the inner surface of the object to be inspected, and exits from the side surface of the object to be inspected. .
光センサ１２に光電子増倍管を使用した例であこの実施
例では、光源８としてＨθ−゛獅ガスレーザを用い、集
光レンズ９によりビーム直径０．５２Ｍに集光し、振動
鏡１０で走査を行ない。This is an example in which a photomultiplier tube is used as the optical sensor 12. In this embodiment, an Hθ-1 gas laser is used as the light source 8, the beam is focused to a beam diameter of 0.52M by a condenser lens 9, and is scanned by a vibrating mirror 10. Do this.
被検査物体１なる透明ガラスパネルの副０．０１ｍｍの
クラックと、直径０．５朋程度の気泡および異物の混入
を検出した。A crack of 0.01 mm in diameter and an air bubble of about 0.5 mm in diameter and a foreign substance were detected in the transparent glass panel of object 1 to be inspected.
以上説明したように２本発明によれば、被検査物体中に
欠陥が存在しない時には側面散乱光が生じないため光セ
ンサの受光量はゼロであり。As explained above, according to the second aspect of the present invention, when there is no defect in the object to be inspected, no side scattered light is generated, so the amount of light received by the optical sensor is zero.
被検査物体中に欠陥が存在するときの側面散乱光を受光
しているので、信号対雑音比の飛躍的に改善された透明
物体の高感度欠陥検査装置を提供できる。Since side-scattered light is received when a defect exists in the object to be inspected, it is possible to provide a highly sensitive defect inspection device for transparent objects with a dramatically improved signal-to-noise ratio.
第１図は本発明の詳細な説明するための配置図、第２図
は照射機構の構成を説明するためのブロック図、第５図
はセンサ部の構成を説明するためのブロック図、第４図
は本発明の一実施例を説明するための配置図である。
図において、１・・・透明被検査物体、２・・・保持機
構、３・・・ビーム状光線、４・・・照射機構、５・・
・欠陥、６・・・側面散乱光、７・・・センサ部、８・
・・レーザ光源、９・・・集光レンズ、１０・・・走査
手段。
１１・・・集光手段、１２・・・光センサ、１３・・・
出力信号である。
第１図
第２図FIG. 1 is a layout diagram for explaining the present invention in detail, FIG. 2 is a block diagram for explaining the configuration of the irradiation mechanism, FIG. 5 is a block diagram for explaining the configuration of the sensor section, and FIG. The figure is a layout diagram for explaining one embodiment of the present invention. In the figure, 1... Transparent object to be inspected, 2... Holding mechanism, 3... Beam-shaped light beam, 4... Irradiation mechanism, 5...
・Defect, 6...Side scattered light, 7...Sensor part, 8.
. . . Laser light source, 9 . . . Condensing lens, 10 . . . Scanning means. 11... Light collecting means, 12... Optical sensor, 13...
is the output signal. Figure 1 Figure 2
Claims (1)
該被検査物体にビーム状の光線を照査する手段と、該被
検査物体中に存在する欠陥により散乱する光を検出する
ように配置したセンサ部とからなる透明物体欠陥検査装
置において、前記センサ部を、前記被検査物体中に存在
する欠陥により散乱した光のうち、全反射のくり返しに
より前記被検査物体の内部を伝播し該被検査物体の側面
から該被検査物体の外部へ出る散乱光を検出するように
配置したことを特徴とする透明物体欠陥検査装置。1. means for holding a transparent object to be inspected in a predetermined position;
A transparent object defect inspection apparatus comprising means for illuminating the object to be inspected with a beam-shaped light beam, and a sensor section arranged to detect light scattered by defects existing in the object to be inspected, the sensor section Among the light scattered by defects existing in the object to be inspected, the scattered light propagates inside the object to be inspected by repeated total reflections and exits from the side of the object to the outside of the object to be inspected. A transparent object defect inspection device characterized in that it is arranged to detect defects.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4736585A JPS61207951A (en) | 1985-03-12 | 1985-03-12 | Defect inspecting device for transparent object |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4736585A JPS61207951A (en) | 1985-03-12 | 1985-03-12 | Defect inspecting device for transparent object |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61207951A true JPS61207951A (en) | 1986-09-16 |
Family
ID=12773080
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4736585A Pending JPS61207951A (en) | 1985-03-12 | 1985-03-12 | Defect inspecting device for transparent object |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61207951A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0480512A1 (en) * | 1990-10-11 | 1992-04-15 | Koninklijke Philips Electronics N.V. | Position-sensitive radiation detection system and optical scanning device provided with such a system |
| CN102288622A (en) * | 2011-04-29 | 2011-12-21 | 浙江师范大学 | Method and device for detecting internal defect of optical element |
| JP2014517322A (en) * | 2011-06-13 | 2014-07-17 | プレジデント アンド フェローズ オブ ハーバード カレッジ | Efficient fluorescence detection in solid state spin systems |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5860242A (en) * | 1981-07-29 | 1983-04-09 | フエルトミユ−レ・アクチエンゲゼルシヤフト | Method and device for inspecting transparent material web |
-
1985
- 1985-03-12 JP JP4736585A patent/JPS61207951A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5860242A (en) * | 1981-07-29 | 1983-04-09 | フエルトミユ−レ・アクチエンゲゼルシヤフト | Method and device for inspecting transparent material web |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0480512A1 (en) * | 1990-10-11 | 1992-04-15 | Koninklijke Philips Electronics N.V. | Position-sensitive radiation detection system and optical scanning device provided with such a system |
| CN102288622A (en) * | 2011-04-29 | 2011-12-21 | 浙江师范大学 | Method and device for detecting internal defect of optical element |
| JP2014517322A (en) * | 2011-06-13 | 2014-07-17 | プレジデント アンド フェローズ オブ ハーバード カレッジ | Efficient fluorescence detection in solid state spin systems |
| US9157859B2 (en) | 2011-06-13 | 2015-10-13 | President And Fellows Of Harvard College | Efficient fluorescence detection in solid state spin systems |
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