JPH03152447A - Inspecting apparatus for flaw - Google Patents
Inspecting apparatus for flawInfo
- Publication number
- JPH03152447A JPH03152447A JP29276389A JP29276389A JPH03152447A JP H03152447 A JPH03152447 A JP H03152447A JP 29276389 A JP29276389 A JP 29276389A JP 29276389 A JP29276389 A JP 29276389A JP H03152447 A JPH03152447 A JP H03152447A
- Authority
- JP
- Japan
- Prior art keywords
- light
- liquid crystal
- board
- axis
- areas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004973 liquid crystal related substance Substances 0.000 abstract 3
- 238000007689 inspection Methods 0.000 abstract 2
- 230000002159 abnormal effect Effects 0.000 abstract 1
- 238000001514 detection method Methods 0.000 abstract 1
- 239000003365 glass fiber Substances 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
Abstract
PURPOSE: To enable inspection of the whole surface of a substance in a short time by providing a light shutter formed of areas which are arranged in a plurality of lines and driven so that they operate to open and close sequentially.
CONSTITUTION: When a parallel laser light 21 is scanned along one axis on the surface of a board 10 to be inspected, a regularly reflected light 22 from a normal surface of the board 10 is made to fall as a beam spot 23 on a liquid crystal plate 5. The liquid crystal plate 5 is formed of areas arranged on one axis and divided into a plurality, and each area is lighted sequentially in synchronization with a scanning speed and extinguished again just after scanning by a driving circuit 9 so that the spot (e.g. for five areas) 23 scanned on one axis is always intercepted from light. A scattered light reflected from an abnormal surface of the board 10 presses through the extinguished area of the liquid crystal plate 5 or the outside thereof. This scattered light passes through a glass fiber bundle 6 and enters a photoelectric sensor 7. The sensor 7 outputs to a determining device 8 a detection signal being proportional to the quantity of the incident light. In the device 8, it is compared in amplitude with a reference value set beforehand and determination is made for inspection of a flaw.
COPYRIGHT: (C)1991,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29276389A JPH03152447A (en) | 1989-11-09 | 1989-11-09 | Inspecting apparatus for flaw |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29276389A JPH03152447A (en) | 1989-11-09 | 1989-11-09 | Inspecting apparatus for flaw |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03152447A true JPH03152447A (en) | 1991-06-28 |
Family
ID=17786024
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29276389A Pending JPH03152447A (en) | 1989-11-09 | 1989-11-09 | Inspecting apparatus for flaw |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03152447A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030096780A (en) * | 2002-06-17 | 2003-12-31 | 한국전기초자 주식회사 | Apparatus for inspecting defect of glass and control method thereof |
| KR100485191B1 (en) * | 2003-01-07 | 2005-04-22 | 학교법인단국대학 | Measurement Method and the System for Spatial Light Distribution of Scattered Laser Beam in the Medical Application |
| JP2011209142A (en) * | 2010-03-30 | 2011-10-20 | Fujifilm Corp | Apparatus and method for inspecting surface |
-
1989
- 1989-11-09 JP JP29276389A patent/JPH03152447A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030096780A (en) * | 2002-06-17 | 2003-12-31 | 한국전기초자 주식회사 | Apparatus for inspecting defect of glass and control method thereof |
| KR100485191B1 (en) * | 2003-01-07 | 2005-04-22 | 학교법인단국대학 | Measurement Method and the System for Spatial Light Distribution of Scattered Laser Beam in the Medical Application |
| JP2011209142A (en) * | 2010-03-30 | 2011-10-20 | Fujifilm Corp | Apparatus and method for inspecting surface |
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