JPS57186106A - Inspection device for surface - Google Patents

Inspection device for surface

Info

Publication number
JPS57186106A
JPS57186106A JP7171981A JP7171981A JPS57186106A JP S57186106 A JPS57186106 A JP S57186106A JP 7171981 A JP7171981 A JP 7171981A JP 7171981 A JP7171981 A JP 7171981A JP S57186106 A JPS57186106 A JP S57186106A
Authority
JP
Japan
Prior art keywords
image
inspected
photodetection
light
positions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7171981A
Other languages
Japanese (ja)
Other versions
JPS6319001B2 (en
Inventor
Koichi Kugimiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7171981A priority Critical patent/JPS57186106A/en
Priority to US06/348,086 priority patent/US4547073A/en
Publication of JPS57186106A publication Critical patent/JPS57186106A/en
Publication of JPS6319001B2 publication Critical patent/JPS6319001B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • G01N2021/889—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques providing a bare video image, i.e. without visual measurement aids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8803—Visual inspection

Abstract

PURPOSE:To detect the fine unevenness of the entire surface of a body to be inspected easily for the inspection of the surface, by inspecting the illuminance distribution of a spatial image of reflected light from the body to be inspected by shifting the focal point of a convex lens which focuses and image-forms said reflected light. CONSTITUTION:Light from a light source 11 is collimated by a lens 23 and reflected by a body 13 to be inspected. This reflected light is condensed through a photodetection lens 24 and then projected on a photodetection surface 14, so that the same image as an image at a focus position A appears on the photodetection surface. When the body to be inspected has a completely specular surface, a completely plane specular surface image appears at the position A and there is no variation on the photodetction surface. When, however, the body to be inspected has a recessed part 25, this serves as a concave surface mirror to scatter the parallel beam, so different illuminance distribution (b) is obtained at positions A, A' and A''. Since the light is condensed gradually from the recessed part in the order of the positions A', A and A'', so waveforms shown in the figure are obtained. For this purpose, the focus positions A'-A'' are scanned successively and the image on the photodetection surface is only observed.
JP7171981A 1981-02-17 1981-05-13 Inspection device for surface Granted JPS57186106A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP7171981A JPS57186106A (en) 1981-05-13 1981-05-13 Inspection device for surface
US06/348,086 US4547073A (en) 1981-02-17 1982-02-11 Surface examining apparatus and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7171981A JPS57186106A (en) 1981-05-13 1981-05-13 Inspection device for surface

Publications (2)

Publication Number Publication Date
JPS57186106A true JPS57186106A (en) 1982-11-16
JPS6319001B2 JPS6319001B2 (en) 1988-04-21

Family

ID=13468605

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7171981A Granted JPS57186106A (en) 1981-02-17 1981-05-13 Inspection device for surface

Country Status (1)

Country Link
JP (1) JPS57186106A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5080940A (en) * 1988-12-05 1992-01-14 Matsushita Electric Industrial Co., Ltd. Latent image projecting mirror surface body
JP2011027443A (en) * 2009-07-21 2011-02-10 Ryuze Inc Simple telecentric lens device, and method and apparatus for inspecting minute uneven flaw of flat platelike transparent object using the same

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006226804A (en) * 2005-02-17 2006-08-31 Matsushita Electric Ind Co Ltd Inspection method of flat display panel
JP4534827B2 (en) * 2005-03-24 2010-09-01 住友電気工業株式会社 Film defect detection method and defect detection apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5080940A (en) * 1988-12-05 1992-01-14 Matsushita Electric Industrial Co., Ltd. Latent image projecting mirror surface body
JP2011027443A (en) * 2009-07-21 2011-02-10 Ryuze Inc Simple telecentric lens device, and method and apparatus for inspecting minute uneven flaw of flat platelike transparent object using the same

Also Published As

Publication number Publication date
JPS6319001B2 (en) 1988-04-21

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