JPS56152249A - Image pickup device for inspection - Google Patents
Image pickup device for inspectionInfo
- Publication number
- JPS56152249A JPS56152249A JP5646980A JP5646980A JPS56152249A JP S56152249 A JPS56152249 A JP S56152249A JP 5646980 A JP5646980 A JP 5646980A JP 5646980 A JP5646980 A JP 5646980A JP S56152249 A JPS56152249 A JP S56152249A
- Authority
- JP
- Japan
- Prior art keywords
- optical lens
- image pickup
- convex
- composite optical
- semiconductor element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Abstract
PURPOSE:To inspect the surface of a semiconductor element by condensing a light with a composite optical lens in which an optical lens and a prism and united, irradiating obliquely the surface of the semiconductor element and condensing the reflected light through the same composite optical lens to an image pickup tube. CONSTITUTION:The first convex part 62 is so formed as to form the first convex lens on a plane of the right angle of a right angle prism 61, and the second convex part 63 is so formed as to form the second convex lens on the center of the oblique surface of the prism 61. It is noted that the first and the second parts 62, 63 are so formed that the optical axes of the convex lenses formed thereby coincide with one another. When parallel beams are emitted, as shown, to the composite optical lens, a ring-shaped condensed light beam can be obtained by the actions of the oblique surface of the prism 61 and the first convex lens 62. The ring-shaped light beam is incident to the semiconductor element 1, and the light reflected on the surface of the semiconductor element 1 is condensed through the convex part of the composite optical lens to the image pickup surface 51 of the image pickup tube 5. The high quality image can be available with one composite optical lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5646980A JPS56152249A (en) | 1980-04-28 | 1980-04-28 | Image pickup device for inspection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5646980A JPS56152249A (en) | 1980-04-28 | 1980-04-28 | Image pickup device for inspection |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56152249A true JPS56152249A (en) | 1981-11-25 |
Family
ID=13027957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5646980A Pending JPS56152249A (en) | 1980-04-28 | 1980-04-28 | Image pickup device for inspection |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56152249A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0913716A2 (en) * | 1997-10-28 | 1999-05-06 | Oki Electric Industry Co., Ltd. | Reflector type prism and reflector type prism forming die |
| US7428016B2 (en) | 2003-04-17 | 2008-09-23 | Nec Corporation | Phone camera with flash and indication light sharing common output |
-
1980
- 1980-04-28 JP JP5646980A patent/JPS56152249A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0913716A2 (en) * | 1997-10-28 | 1999-05-06 | Oki Electric Industry Co., Ltd. | Reflector type prism and reflector type prism forming die |
| EP0913716A3 (en) * | 1997-10-28 | 2000-09-20 | Oki Electric Industry Co., Ltd. | Reflector type prism and reflector type prism forming die |
| US6226135B1 (en) | 1997-10-28 | 2001-05-01 | Oki Electric Industry Co., Ltd. | Reflector type prism and reflector type prism forming die |
| US7428016B2 (en) | 2003-04-17 | 2008-09-23 | Nec Corporation | Phone camera with flash and indication light sharing common output |
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