JPS54106253A - Automatic focusing device - Google Patents
Automatic focusing deviceInfo
- Publication number
- JPS54106253A JPS54106253A JP1236778A JP1236778A JPS54106253A JP S54106253 A JPS54106253 A JP S54106253A JP 1236778 A JP1236778 A JP 1236778A JP 1236778 A JP1236778 A JP 1236778A JP S54106253 A JPS54106253 A JP S54106253A
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- focal point
- received
- light
- lens system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Automatic Focus Adjustment (AREA)
Abstract
PURPOSE: To form the focal point of a lens system upon a sample surface with the use of a simple mechanism thereby to improve the working efficiency by dividing a laser beam reflected from the sample surface into two halves with the use of a prism mirror so that the divided two laser beam halves are received by a pair of light receivers thereby to drive a servomotor system.
CONSTITUTION: An automatic focusing device is used to effect the focus adjustment of the lens system of a microscope 1 for observing a test piece 17 such as a photo- mask or -wafer placed on a stage 4. A laser beam coming from its source 13 is guided at a preset angle onto the piece 17 so that the reflected light may be received upon a light receiving unit 15. This unit 15 is equipped with a prism mirror 41 and a pair of light receiving elements 42a and 42b so that the same output signals are generated from the respective elements 42a and 42b upon registration of the focal point. The quantity out of focus is detected from the difference in the quantities of the light received by the elements 42a and 42b to shift the stage 4 in the direction of the optical axis with the use of a servomotor system 6 so that the focal point of the lens system is aligned upon the surface of the test piece 17.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1236778A JPS54106253A (en) | 1978-02-08 | 1978-02-08 | Automatic focusing device |
US05/924,722 US4230940A (en) | 1977-07-22 | 1978-07-14 | Automatic focusing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1236778A JPS54106253A (en) | 1978-02-08 | 1978-02-08 | Automatic focusing device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54106253A true JPS54106253A (en) | 1979-08-21 |
JPS5753923B2 JPS5753923B2 (en) | 1982-11-16 |
Family
ID=11803291
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1236778A Granted JPS54106253A (en) | 1977-07-22 | 1978-02-08 | Automatic focusing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54106253A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56101112A (en) * | 1980-01-16 | 1981-08-13 | Fujitsu Ltd | Exposure method |
JPH0236813U (en) * | 1988-09-01 | 1990-03-09 |
-
1978
- 1978-02-08 JP JP1236778A patent/JPS54106253A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56101112A (en) * | 1980-01-16 | 1981-08-13 | Fujitsu Ltd | Exposure method |
JPH0236813U (en) * | 1988-09-01 | 1990-03-09 |
Also Published As
Publication number | Publication date |
---|---|
JPS5753923B2 (en) | 1982-11-16 |
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