JPS54106253A - Automatic focusing device - Google Patents

Automatic focusing device

Info

Publication number
JPS54106253A
JPS54106253A JP1236778A JP1236778A JPS54106253A JP S54106253 A JPS54106253 A JP S54106253A JP 1236778 A JP1236778 A JP 1236778A JP 1236778 A JP1236778 A JP 1236778A JP S54106253 A JPS54106253 A JP S54106253A
Authority
JP
Japan
Prior art keywords
laser beam
focal point
received
light
lens system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1236778A
Other languages
Japanese (ja)
Other versions
JPS5753923B2 (en
Inventor
Masakata Minami
Tomohide Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP1236778A priority Critical patent/JPS54106253A/en
Priority to US05/924,722 priority patent/US4230940A/en
Publication of JPS54106253A publication Critical patent/JPS54106253A/en
Publication of JPS5753923B2 publication Critical patent/JPS5753923B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Automatic Focus Adjustment (AREA)

Abstract

PURPOSE: To form the focal point of a lens system upon a sample surface with the use of a simple mechanism thereby to improve the working efficiency by dividing a laser beam reflected from the sample surface into two halves with the use of a prism mirror so that the divided two laser beam halves are received by a pair of light receivers thereby to drive a servomotor system.
CONSTITUTION: An automatic focusing device is used to effect the focus adjustment of the lens system of a microscope 1 for observing a test piece 17 such as a photo- mask or -wafer placed on a stage 4. A laser beam coming from its source 13 is guided at a preset angle onto the piece 17 so that the reflected light may be received upon a light receiving unit 15. This unit 15 is equipped with a prism mirror 41 and a pair of light receiving elements 42a and 42b so that the same output signals are generated from the respective elements 42a and 42b upon registration of the focal point. The quantity out of focus is detected from the difference in the quantities of the light received by the elements 42a and 42b to shift the stage 4 in the direction of the optical axis with the use of a servomotor system 6 so that the focal point of the lens system is aligned upon the surface of the test piece 17.
COPYRIGHT: (C)1979,JPO&Japio
JP1236778A 1977-07-22 1978-02-08 Automatic focusing device Granted JPS54106253A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1236778A JPS54106253A (en) 1978-02-08 1978-02-08 Automatic focusing device
US05/924,722 US4230940A (en) 1977-07-22 1978-07-14 Automatic focusing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1236778A JPS54106253A (en) 1978-02-08 1978-02-08 Automatic focusing device

Publications (2)

Publication Number Publication Date
JPS54106253A true JPS54106253A (en) 1979-08-21
JPS5753923B2 JPS5753923B2 (en) 1982-11-16

Family

ID=11803291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1236778A Granted JPS54106253A (en) 1977-07-22 1978-02-08 Automatic focusing device

Country Status (1)

Country Link
JP (1) JPS54106253A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56101112A (en) * 1980-01-16 1981-08-13 Fujitsu Ltd Exposure method
JPH0236813U (en) * 1988-09-01 1990-03-09

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56101112A (en) * 1980-01-16 1981-08-13 Fujitsu Ltd Exposure method
JPH0236813U (en) * 1988-09-01 1990-03-09

Also Published As

Publication number Publication date
JPS5753923B2 (en) 1982-11-16

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