JPS5544926A - Article surface fault detector - Google Patents

Article surface fault detector

Info

Publication number
JPS5544926A
JPS5544926A JP11796778A JP11796778A JPS5544926A JP S5544926 A JPS5544926 A JP S5544926A JP 11796778 A JP11796778 A JP 11796778A JP 11796778 A JP11796778 A JP 11796778A JP S5544926 A JPS5544926 A JP S5544926A
Authority
JP
Japan
Prior art keywords
light
mirror
reflected
article
parabolic mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11796778A
Other languages
Japanese (ja)
Other versions
JPS5932723B2 (en
Inventor
Katsuya Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP11796778A priority Critical patent/JPS5932723B2/en
Publication of JPS5544926A publication Critical patent/JPS5544926A/en
Publication of JPS5932723B2 publication Critical patent/JPS5932723B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To provide a precise cylindrical article surface detector which can precisely detect the fine surface fault of the article by using a rotary scanning mirror and a parabolic mirror with laser light.
CONSTITUTION: The light l1 from a laser light source 1 is reflected on first plane mirror 2, and refracted via a plane mirror 4 on a rotary scanning mirror 6, and reflected on a parabolic mirror 5 to thereby become light l4. The light thus becomes a ring-like beam, and passes through a half mirror 3. The light is then reflected on a parabolic mirror 9, and focused at a focal point f2. Since the outer peripheral surface of the article 11 to be measured is scanned by this focused light, the article is moved along an optical axis 10 as designated by an arrow 16. The scanned reflected light is again incident into the parabolic mirror, and reflected on the half mirror 3 through a focusing lens 12 into a light receiver 13. The output signal from the receiver 13 is observed in the surface state on an oscilloscope 14 or the like or used as a signal for controlling other instruments.
COPYRIGHT: (C)1980,JPO&Japio
JP11796778A 1978-09-27 1978-09-27 Object surface defect detection device Expired JPS5932723B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11796778A JPS5932723B2 (en) 1978-09-27 1978-09-27 Object surface defect detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11796778A JPS5932723B2 (en) 1978-09-27 1978-09-27 Object surface defect detection device

Publications (2)

Publication Number Publication Date
JPS5544926A true JPS5544926A (en) 1980-03-29
JPS5932723B2 JPS5932723B2 (en) 1984-08-10

Family

ID=14724694

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11796778A Expired JPS5932723B2 (en) 1978-09-27 1978-09-27 Object surface defect detection device

Country Status (1)

Country Link
JP (1) JPS5932723B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011089927A (en) * 2009-10-23 2011-05-06 Fujitsu Ltd Optical scanning apparatus and optical scanning method
DE102014212633A1 (en) * 2014-06-30 2015-12-31 Inoex Gmbh Measuring device and method for measuring test objects

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011089927A (en) * 2009-10-23 2011-05-06 Fujitsu Ltd Optical scanning apparatus and optical scanning method
DE102014212633A1 (en) * 2014-06-30 2015-12-31 Inoex Gmbh Measuring device and method for measuring test objects
DE102014212633B4 (en) * 2014-06-30 2017-03-09 Inoex Gmbh Measuring device and method for measuring test objects

Also Published As

Publication number Publication date
JPS5932723B2 (en) 1984-08-10

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