JPS5544926A - Article surface fault detector - Google Patents
Article surface fault detectorInfo
- Publication number
- JPS5544926A JPS5544926A JP11796778A JP11796778A JPS5544926A JP S5544926 A JPS5544926 A JP S5544926A JP 11796778 A JP11796778 A JP 11796778A JP 11796778 A JP11796778 A JP 11796778A JP S5544926 A JPS5544926 A JP S5544926A
- Authority
- JP
- Japan
- Prior art keywords
- light
- mirror
- reflected
- article
- parabolic mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE: To provide a precise cylindrical article surface detector which can precisely detect the fine surface fault of the article by using a rotary scanning mirror and a parabolic mirror with laser light.
CONSTITUTION: The light l1 from a laser light source 1 is reflected on first plane mirror 2, and refracted via a plane mirror 4 on a rotary scanning mirror 6, and reflected on a parabolic mirror 5 to thereby become light l4. The light thus becomes a ring-like beam, and passes through a half mirror 3. The light is then reflected on a parabolic mirror 9, and focused at a focal point f2. Since the outer peripheral surface of the article 11 to be measured is scanned by this focused light, the article is moved along an optical axis 10 as designated by an arrow 16. The scanned reflected light is again incident into the parabolic mirror, and reflected on the half mirror 3 through a focusing lens 12 into a light receiver 13. The output signal from the receiver 13 is observed in the surface state on an oscilloscope 14 or the like or used as a signal for controlling other instruments.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11796778A JPS5932723B2 (en) | 1978-09-27 | 1978-09-27 | Object surface defect detection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11796778A JPS5932723B2 (en) | 1978-09-27 | 1978-09-27 | Object surface defect detection device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5544926A true JPS5544926A (en) | 1980-03-29 |
JPS5932723B2 JPS5932723B2 (en) | 1984-08-10 |
Family
ID=14724694
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11796778A Expired JPS5932723B2 (en) | 1978-09-27 | 1978-09-27 | Object surface defect detection device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5932723B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011089927A (en) * | 2009-10-23 | 2011-05-06 | Fujitsu Ltd | Optical scanning apparatus and optical scanning method |
DE102014212633A1 (en) * | 2014-06-30 | 2015-12-31 | Inoex Gmbh | Measuring device and method for measuring test objects |
-
1978
- 1978-09-27 JP JP11796778A patent/JPS5932723B2/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011089927A (en) * | 2009-10-23 | 2011-05-06 | Fujitsu Ltd | Optical scanning apparatus and optical scanning method |
DE102014212633A1 (en) * | 2014-06-30 | 2015-12-31 | Inoex Gmbh | Measuring device and method for measuring test objects |
DE102014212633B4 (en) * | 2014-06-30 | 2017-03-09 | Inoex Gmbh | Measuring device and method for measuring test objects |
Also Published As
Publication number | Publication date |
---|---|
JPS5932723B2 (en) | 1984-08-10 |
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