JPS55140102A - Measuring device for flatness of inspected plane glass - Google Patents
Measuring device for flatness of inspected plane glassInfo
- Publication number
- JPS55140102A JPS55140102A JP4799579A JP4799579A JPS55140102A JP S55140102 A JPS55140102 A JP S55140102A JP 4799579 A JP4799579 A JP 4799579A JP 4799579 A JP4799579 A JP 4799579A JP S55140102 A JPS55140102 A JP S55140102A
- Authority
- JP
- Japan
- Prior art keywords
- light
- amount
- flatness
- penetrated
- splitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE: To permit the measurement of flatness under a brighter condition than conventional measuring devices only by decreasing the amount of light by half of a source of light when measuring the flatness of glass plate etc. by applying to a Fizeau's interferometer.
CONSTITUTION: The polarized laser light 1 is emitted and composed a parallel beam by a collimator lens 3 and projected on a polarized beam splitter 4. Half of the amount of the incident light is penetrated to P wave component side at the splitter 4. The remaining half of the amount of light is bent to S wave component side at a right angle and penetrated a quarter wave length plate 5 and an optical flat 6 to generate an interference light. The interference light is reflected and penetrated the optical flat 6 side and repenetrated the quarter wave length plate 5 to penetrate the polarized beam splitter 4. The beam is focused into an image at a focal surface of a collimator lens 8 and the interference light is observed by an ocular 9. The amount of light at the time of measurement is only reduced to half of a source of light because the quarter wave length plate is provided at the S wave side of the splitter.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4799579A JPS55140102A (en) | 1979-04-20 | 1979-04-20 | Measuring device for flatness of inspected plane glass |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4799579A JPS55140102A (en) | 1979-04-20 | 1979-04-20 | Measuring device for flatness of inspected plane glass |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS55140102A true JPS55140102A (en) | 1980-11-01 |
Family
ID=12790891
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4799579A Pending JPS55140102A (en) | 1979-04-20 | 1979-04-20 | Measuring device for flatness of inspected plane glass |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55140102A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5999304A (en) * | 1982-11-30 | 1984-06-08 | Asahi Optical Co Ltd | Method and apparatus for comparing and measuring length by using laser light of microscope system |
| WO2010147252A1 (en) * | 2009-06-17 | 2010-12-23 | 주식회사 쎄미시스코 | Device for measuring non-uniformity of glass substrate |
| US9086384B2 (en) | 2010-06-15 | 2015-07-21 | Asahi Glass Company, Limited | Shape measuring device, shape measuring method, and glass plate manufacturing method |
| US9152844B2 (en) | 2010-06-07 | 2015-10-06 | Asahi Glass Company, Limted | Shape measuring device, shape measuring method, and method for manufacturing glass plate |
-
1979
- 1979-04-20 JP JP4799579A patent/JPS55140102A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5999304A (en) * | 1982-11-30 | 1984-06-08 | Asahi Optical Co Ltd | Method and apparatus for comparing and measuring length by using laser light of microscope system |
| JPH0117523B2 (en) * | 1982-11-30 | 1989-03-30 | Asahi Optical Co Ltd | |
| WO2010147252A1 (en) * | 2009-06-17 | 2010-12-23 | 주식회사 쎄미시스코 | Device for measuring non-uniformity of glass substrate |
| US9152844B2 (en) | 2010-06-07 | 2015-10-06 | Asahi Glass Company, Limted | Shape measuring device, shape measuring method, and method for manufacturing glass plate |
| US9086384B2 (en) | 2010-06-15 | 2015-07-21 | Asahi Glass Company, Limited | Shape measuring device, shape measuring method, and glass plate manufacturing method |
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