JPS56130606A - Optical measuring device for thickness of transparent material - Google Patents

Optical measuring device for thickness of transparent material

Info

Publication number
JPS56130606A
JPS56130606A JP3455580A JP3455580A JPS56130606A JP S56130606 A JPS56130606 A JP S56130606A JP 3455580 A JP3455580 A JP 3455580A JP 3455580 A JP3455580 A JP 3455580A JP S56130606 A JPS56130606 A JP S56130606A
Authority
JP
Japan
Prior art keywords
transparent material
thickness
lens
measuring device
optical measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3455580A
Other languages
Japanese (ja)
Inventor
Hideo Yamauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to JP3455580A priority Critical patent/JPS56130606A/en
Publication of JPS56130606A publication Critical patent/JPS56130606A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material

Abstract

PURPOSE:To measure the thickness of the transparent material without contacting, by measuring light path distances of reflection lights from the surface and the reverse face when the light beam is irradiated to the transparent material. CONSTITUTION:The laser beam from light source 2 consisting of an He-Ne laser oscillator is condensed to the measure position of transparent material 1 by lens 3. Lights reflected by surface S0 and reverse face S1 of transparent material 1 are condensed onto screen 6 by lens 4 and become bright point. Bright points become sharp by arranging lens 4 and screen 6 properly, and the distance between these bright points is measured to obtain the thickness of transparent material 1.
JP3455580A 1980-03-18 1980-03-18 Optical measuring device for thickness of transparent material Pending JPS56130606A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3455580A JPS56130606A (en) 1980-03-18 1980-03-18 Optical measuring device for thickness of transparent material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3455580A JPS56130606A (en) 1980-03-18 1980-03-18 Optical measuring device for thickness of transparent material

Publications (1)

Publication Number Publication Date
JPS56130606A true JPS56130606A (en) 1981-10-13

Family

ID=12417551

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3455580A Pending JPS56130606A (en) 1980-03-18 1980-03-18 Optical measuring device for thickness of transparent material

Country Status (1)

Country Link
JP (1) JPS56130606A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58216904A (en) * 1982-06-11 1983-12-16 Toshiba Corp Thickness measuring device
JP2002176240A (en) * 2000-12-07 2002-06-21 Shibuya Kogyo Co Ltd Method and system for boring via hole
JP2012083183A (en) * 2010-10-12 2012-04-26 Pulstec Industrial Co Ltd Thickness measuring device for light-transmissive tubular object

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58216904A (en) * 1982-06-11 1983-12-16 Toshiba Corp Thickness measuring device
JP2002176240A (en) * 2000-12-07 2002-06-21 Shibuya Kogyo Co Ltd Method and system for boring via hole
JP2012083183A (en) * 2010-10-12 2012-04-26 Pulstec Industrial Co Ltd Thickness measuring device for light-transmissive tubular object

Similar Documents

Publication Publication Date Title
JPS56130606A (en) Optical measuring device for thickness of transparent material
JPS57104803A (en) Displacement measuring apparatus
JPS6435306A (en) Incidence angle determining method for refractive index and film thickness measurement
JPS6488327A (en) Shape measuring method for interference wave front
JPS5767815A (en) Measuring method for position of reflector using light
JPS5593003A (en) Measuring method for plate thickness of plate-shape transparent body
JPS5752807A (en) Device for measuring film thickness
JPS57199909A (en) Distance measuring device
JPS5612729A (en) ?alignmening device for ic projection exposure equipment
JPS55140102A (en) Measuring device for flatness of inspected plane glass
JPS533283A (en) Referactive index distribution form measurement device
JPS56111405A (en) Method and device for measuring thickness of transparent film
JPS56153207A (en) Measuring device for film thickness
FR2247699A1 (en) Surface roughness measuring process - compares two different wavelength laser lighted images at third wavelength
JPS5226848A (en) Reflection factor measuring method of curved surface mirror
JPS5497469A (en) Laser speed measuring apparatus
JPS5733306A (en) Surface roughness measuring device
JPS56126742A (en) Measuring device for distribution of refractive index of focusing light-transmitting element
JPS52119339A (en) Laser radiation positioning method
JPS6413420A (en) Liquid level measuring instrument
JPS55411A (en) Surface roughness measurement with laser beam
JPS5770401A (en) Read-only memory tester
JPS5483485A (en) Laser speed measuring apparatus
JPS5289949A (en) Optical fiber apparatus
JPS57153206A (en) Light interference measuring device