JPS5686340A - Automatic detector for foreign matter - Google Patents

Automatic detector for foreign matter

Info

Publication number
JPS5686340A
JPS5686340A JP16275879A JP16275879A JPS5686340A JP S5686340 A JPS5686340 A JP S5686340A JP 16275879 A JP16275879 A JP 16275879A JP 16275879 A JP16275879 A JP 16275879A JP S5686340 A JPS5686340 A JP S5686340A
Authority
JP
Japan
Prior art keywords
foreign matter
inspected
reflectors
detected
branching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16275879A
Other languages
Japanese (ja)
Other versions
JPS6240656B2 (en
Inventor
Nobuyuki Akiyama
Yoshimasa Oshima
Mitsuyoshi Koizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP16275879A priority Critical patent/JPS5686340A/en
Publication of JPS5686340A publication Critical patent/JPS5686340A/en
Publication of JPS6240656B2 publication Critical patent/JPS6240656B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To ensure an economical detection of foreign matter in a high accuracy through the same detector, by using the same irradiation of laser beam plus scanning system and selecting the detection system for the blank surface to be inspected and the patterned surface to be inspected in accordance with the state of the surface to be inspected. CONSTITUTION:The foreign matter on the blank surface to be inspected is detected by branching the irregularly reflected light given from the irradiation point 36 caused by existence of the foreign matter into four directions by the branching mirror 38 via the paraboloidal mirror 37 and using the photoelectric transducers 43-46 via the condenser lenses 39-42. The foreign matter on the patterned surface to be inspected is detected by the photoelectric transducers 43-46 via the polarizing plates 52-55 having the specified cut-off property, reflectors 56-57 plus the condenser lenses 39-42 after once reflecting the reflected light 47 given from the point 36 by the reflectors 48-51. In other words, reflectors 56 and 57, branching mirror 38 and paraboloidal mirror 37 are provided to be freely inserted and pulled out. In such way, the foreign matter can be detected in a high accuracy on both the blank and patterned surfaces to be inspected.
JP16275879A 1979-12-17 1979-12-17 Automatic detector for foreign matter Granted JPS5686340A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16275879A JPS5686340A (en) 1979-12-17 1979-12-17 Automatic detector for foreign matter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16275879A JPS5686340A (en) 1979-12-17 1979-12-17 Automatic detector for foreign matter

Publications (2)

Publication Number Publication Date
JPS5686340A true JPS5686340A (en) 1981-07-14
JPS6240656B2 JPS6240656B2 (en) 1987-08-29

Family

ID=15760674

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16275879A Granted JPS5686340A (en) 1979-12-17 1979-12-17 Automatic detector for foreign matter

Country Status (1)

Country Link
JP (1) JPS5686340A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5982727A (en) * 1982-11-04 1984-05-12 Hitachi Ltd Method and apparatus for detecting foreign matter
JPS61104244A (en) * 1984-10-29 1986-05-22 Hitachi Ltd Apparatus for detecting foreign matter of semiconductive wafer
JPS61104242A (en) * 1984-10-29 1986-05-22 Hitachi Ltd Apparatus for inspecting foreign matter
JPS64452A (en) * 1988-06-03 1989-01-05 Hitachi Ltd Detection of foreign matter
US5331396A (en) * 1991-10-08 1994-07-19 Matsushita Electric Industrial Co., Ltd. Foreign matter detection device
JP2009192541A (en) * 2009-05-25 2009-08-27 Hitachi Ltd Defect inspection device
US8729514B2 (en) 2000-03-08 2014-05-20 Hitachi High-Technologies Corporaation Surface inspection apparatus and method thereof

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009113478A1 (en) * 2008-03-12 2009-09-17 株式会社アルバック Surface inspection apparatus and surface inspection method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54101390A (en) * 1978-01-27 1979-08-09 Hitachi Ltd Foreign matter inspector
JPS54128682A (en) * 1978-03-30 1979-10-05 Hitachi Ltd Automatic detector for foreign matters

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54101390A (en) * 1978-01-27 1979-08-09 Hitachi Ltd Foreign matter inspector
JPS54128682A (en) * 1978-03-30 1979-10-05 Hitachi Ltd Automatic detector for foreign matters

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5982727A (en) * 1982-11-04 1984-05-12 Hitachi Ltd Method and apparatus for detecting foreign matter
JPS6365904B2 (en) * 1982-11-04 1988-12-19 Hitachi Ltd
JPS61104244A (en) * 1984-10-29 1986-05-22 Hitachi Ltd Apparatus for detecting foreign matter of semiconductive wafer
JPS61104242A (en) * 1984-10-29 1986-05-22 Hitachi Ltd Apparatus for inspecting foreign matter
JPS64452A (en) * 1988-06-03 1989-01-05 Hitachi Ltd Detection of foreign matter
JPH05662B2 (en) * 1988-06-03 1993-01-06 Hitachi Ltd
US5331396A (en) * 1991-10-08 1994-07-19 Matsushita Electric Industrial Co., Ltd. Foreign matter detection device
US8729514B2 (en) 2000-03-08 2014-05-20 Hitachi High-Technologies Corporaation Surface inspection apparatus and method thereof
US9551670B2 (en) 2000-03-08 2017-01-24 Hitachi, Ltd. Surface inspection apparatus and method thereof
JP2009192541A (en) * 2009-05-25 2009-08-27 Hitachi Ltd Defect inspection device

Also Published As

Publication number Publication date
JPS6240656B2 (en) 1987-08-29

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