JPS57189046A - Inspecting device for surface defect - Google Patents

Inspecting device for surface defect

Info

Publication number
JPS57189046A
JPS57189046A JP7330281A JP7330281A JPS57189046A JP S57189046 A JPS57189046 A JP S57189046A JP 7330281 A JP7330281 A JP 7330281A JP 7330281 A JP7330281 A JP 7330281A JP S57189046 A JPS57189046 A JP S57189046A
Authority
JP
Japan
Prior art keywords
patterns
light
reflected
photodetector
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7330281A
Other languages
Japanese (ja)
Other versions
JPS6367849B2 (en
Inventor
Toshiro Nakajima
Mitsuhito Kamei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7330281A priority Critical patent/JPS57189046A/en
Publication of JPS57189046A publication Critical patent/JPS57189046A/en
Publication of JPS6367849B2 publication Critical patent/JPS6367849B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/952—Inspecting the exterior surface of cylindrical bodies or wires

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To detect the reflected light from the entire circumference of the surface of a material to be inspected only with one unit of photodetector by synchronizing the scanning of the light of divided irradiation systems respectively. CONSTITUTION:Two light scanning patterns are generated by synchronized laser beams 2a, 2b, and the two light scanning patterns are synthesized by using a reflecting mirror 11A and a half mirror 11B. This synthesized pattern is stopped-down onto the surface of a material 3 to be inspected, by which the inspecting region is divided like incident light irradiation patterns 4a, 4b. The reflected rays from the patterns 4a, 4b form reflected light projection patterns 5a, 5b on a photodetector 6, by which the superposed parts of the reflected rays are produced on the detection surface. There are binary-coded by the slice level setting circuit of a signal processing circuit 15.
JP7330281A 1981-05-15 1981-05-15 Inspecting device for surface defect Granted JPS57189046A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7330281A JPS57189046A (en) 1981-05-15 1981-05-15 Inspecting device for surface defect

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7330281A JPS57189046A (en) 1981-05-15 1981-05-15 Inspecting device for surface defect

Publications (2)

Publication Number Publication Date
JPS57189046A true JPS57189046A (en) 1982-11-20
JPS6367849B2 JPS6367849B2 (en) 1988-12-27

Family

ID=13514224

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7330281A Granted JPS57189046A (en) 1981-05-15 1981-05-15 Inspecting device for surface defect

Country Status (1)

Country Link
JP (1) JPS57189046A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59155540U (en) * 1983-04-05 1984-10-18 三菱電機株式会社 Defect inspection equipment
JPS59155541U (en) * 1983-04-05 1984-10-18 三菱電機株式会社 Defect inspection equipment
JP2008506939A (en) * 2004-07-16 2008-03-06 ファルドー・ジャン−フランソワ Surface analysis of elongated objects

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5327087A (en) * 1976-08-26 1978-03-13 Toshiba Corp Flaw detector
JPS559170A (en) * 1978-07-07 1980-01-23 Fujikura Ltd Surface flaw detector

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5327087A (en) * 1976-08-26 1978-03-13 Toshiba Corp Flaw detector
JPS559170A (en) * 1978-07-07 1980-01-23 Fujikura Ltd Surface flaw detector

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59155540U (en) * 1983-04-05 1984-10-18 三菱電機株式会社 Defect inspection equipment
JPS59155541U (en) * 1983-04-05 1984-10-18 三菱電機株式会社 Defect inspection equipment
JP2008506939A (en) * 2004-07-16 2008-03-06 ファルドー・ジャン−フランソワ Surface analysis of elongated objects

Also Published As

Publication number Publication date
JPS6367849B2 (en) 1988-12-27

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