JPS59155540U

JPS59155540U - Defect inspection equipment

Info

Publication number: JPS59155540U
Application number: JP5034583U
Authority: JP
Inventors: 啓西川; 藤野　正太郎
Original assignee: 三菱電機株式会社
Priority date: 1983-04-05
Filing date: 1983-04-05
Publication date: 1984-10-18

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of the drawing]

第１図は円周方向走査方式による従来の欠陥検査装置の
一実施例を示す図、第２図及び第３図は第２図の実施例
で生じる“陰゛′の説明図、第４図は従来の゛陰°゛用
光学系を備えた欠陥検査装置の一実施例を示す図、第５
図は“陰゛部補正の説明図、第６図は第４図の実施例に
よる信号例の説明図、第７図はこの考案による欠陥検査
装置の一実施例を示す図、第８図は第７図で示した実施
例に′　よる信号の説明図である。図中１はレーザ、２はテレスコープ、３はスキャナ、４
はミラーＭ□、５はレンズ、６は光ファイバ、７は光検
知器、８は被検査体、９はレーザ光線、１０〜１２はミ
ラー、１３はフィルタ、４′はハーフミラ−１９′は゛
陰″用レーザ光線である。なお図中同一あるいは相当部
分には同一符号を付して示しである。FIG. 1 is a diagram showing an embodiment of a conventional defect inspection apparatus using a circumferential scanning method, FIGS. 5 is a diagram showing an embodiment of a defect inspection device equipped with a conventional "shadow" optical system;
6 is an explanatory diagram of a signal example according to the embodiment of FIG. 4, FIG. 7 is a diagram illustrating an embodiment of the defect inspection device according to this invention, and FIG. 7 is an explanatory diagram of signals according to the embodiment shown in FIG. 7. In the figure, 1 is a laser, 2 is a telescope, 3 is a scanner, and 4
is a mirror M□, 5 is a lens, 6 is an optical fiber, 7 is a photodetector, 8 is an object to be inspected, 9 is a laser beam, 10 to 12 are mirrors, 13 is a filter, 4' is a half mirror, and 19' is a shade The same reference numerals are given to the same or corresponding parts in the figures.

Claims

[Scope of utility model registration request]

In order to irradiate the surface of the object to be inspected with laser light, the apparatus includes a scanning means for scanning the laser beam in a circumferential direction of the object to be inspected;
In the defect inspection apparatus for optically inspecting surface defects of the object to be inspected by detecting changes in reflected light intensity due to defects on the surface of the object to be inspected using a photodetector, the scanning means applies circular scanning light to the object to be inspected. A plurality of mirrors that divide a part of the irradiation light to cover the non-irradiated area due to the shadow of the inspected object itself that occurs during irradiation, and irradiate the uninspected area with the light of the divided area; It is characterized by comprising a filter located in the optical path of the principal ray of the scanning light or the divided rays divided by the plurality of mirrors, and provided so that the light intensities of the principal ray and the divided rays are approximately equal. Defect inspection equipment.