JPS6126158U - optical inspection machine - Google Patents
optical inspection machineInfo
- Publication number
- JPS6126158U JPS6126158U JP10959284U JP10959284U JPS6126158U JP S6126158 U JPS6126158 U JP S6126158U JP 10959284 U JP10959284 U JP 10959284U JP 10959284 U JP10959284 U JP 10959284U JP S6126158 U JPS6126158 U JP S6126158U
- Authority
- JP
- Japan
- Prior art keywords
- light
- inspection machine
- receiver
- optical inspection
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図ａは本考案一実施例の概略構成図、第１図ｂは此
の実施例め動作説明図である。
１・・・測定対象、２・・・光源、３・・・ハーフミラ
ー色、４・・・ガルバノミラー、５．５’・・・レンズ
系、６・・・ハーフミラーｂ，・・・受光器ａ，８・・
・受光器ｂ， ９・・・差動演算器。FIG. 1a is a schematic diagram of an embodiment of the present invention, and FIG. 1b is an explanatory diagram of the operation of this embodiment. 1...Measurement object, 2...Light source, 3...Half mirror color, 4...Galvanometer mirror, 5.5'...Lens system, 6...Half mirror b,...Light reception Vessel a, 8...
・Photoreceiver b, 9...Differential arithmetic unit.
Claims (1)
反射光または透過光を受光器に入射させ光電変換して得
た電気信号から、検香対象物の特異状態または特異点を
検出する光学式検査機において、前記反射光または透過
光の光学系光路の途中にハーフミラーを設置して光を２
分し、一方の光を通す光学系ではレンズ系の丁度最良像
平面の位置に受光器を配設し、他方の光を通す光学系で
はレンズ系の最良像平面から外れた位置に受光器を配設
し、これら受光器の出力を差動演算器に入力して両者の
差を求めることにより、外乱光の影響が除去された出力
を得るようにしたことを特徴とする光学式検査機。The object to be inspected is sequentially irradiated and scanned with a light beam, and the reflected or transmitted light from the irradiation point is incident on a light receiver and photoelectrically converted to obtain an electrical signal, which detects the singular state or point of the object. In an optical inspection machine, a half mirror is installed in the middle of the optical path of the reflected light or transmitted light to divide the light into two parts.
In an optical system that passes one light, the receiver is located exactly at the best image plane of the lens system, and in an optical system that passes the other light, the receiver is located away from the best image plane of the lens system. An optical inspection machine characterized in that the outputs of these light receivers are input to a differential calculator and the difference between the two is determined, thereby obtaining an output from which the influence of ambient light has been removed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10959284U JPS6126158U (en) | 1984-07-21 | 1984-07-21 | optical inspection machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10959284U JPS6126158U (en) | 1984-07-21 | 1984-07-21 | optical inspection machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6126158U true JPS6126158U (en) | 1986-02-17 |
Family
ID=30668733
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10959284U Pending JPS6126158U (en) | 1984-07-21 | 1984-07-21 | optical inspection machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6126158U (en) |
-
1984
- 1984-07-21 JP JP10959284U patent/JPS6126158U/en active Pending
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