GB1352940A - Optical examination of surface roughness - Google Patents

Optical examination of surface roughness

Info

Publication number
GB1352940A
GB1352940A GB2982471A GB2982471A GB1352940A GB 1352940 A GB1352940 A GB 1352940A GB 2982471 A GB2982471 A GB 2982471A GB 2982471 A GB2982471 A GB 2982471A GB 1352940 A GB1352940 A GB 1352940A
Authority
GB
United Kingdom
Prior art keywords
photo
light
diaphragm
focal plane
prism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2982471A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1352940A publication Critical patent/GB1352940A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Abstract

1352940 Photo-electric surface testing INTERNATIONAL BUSINESS MACHINES CORP 25 June 1971 [30 June 1970] 29824/71 Heading G1A A surface is investigated in respect of its elemental profile or the predominance of one slope by an arrangement in which reflected light is imaged and the image is scanned. In Fig. 1 light from source 3 diffusely reflected by surface 1 is imaged in a plane 5, a screen 7 for suppressing specular deflection being provided in focal plane 6 of lens 4. In Fig.2 apertured diaphragms 9 and 11 are provided in planes 5 and 6 the aperture 9a being positioned so that a photo-cell 10 mounted on the diaphragm can investigate light emanating from an area of surface 1 corresponding to the position of the aperture 9a, and diaphragm 11 being moved to scan the focal plane to obtain a maximum reading at which the diaphragm position is recorded. In Fig.3 a prism 12 of light attenuating material is mounted with its apex in the focal plane 6, and nas two differently polarizing elements 13, 14 for light reflected by the two different slopes. The polarized image is transmitted to a pair of photo-detectors 10a, 10b by a beam splitting Wollaston prism 16, and the difference in output from the photo-detectors indicates the predominant slope. A modification of Fig. 3 described with reference to Fig. 6 (not shown) uses a single photo-detector and has a shutter which is movable alternately to admit the respective beams split by the prism to the photo-detector.
GB2982471A 1970-06-30 1971-06-25 Optical examination of surface roughness Expired GB1352940A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702032314 DE2032314A1 (en) 1970-06-30 1970-06-30 Method for non-contact optical testing and measuring of surfaces and devices for carrying out this method

Publications (1)

Publication Number Publication Date
GB1352940A true GB1352940A (en) 1974-05-15

Family

ID=5775374

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2982471A Expired GB1352940A (en) 1970-06-30 1971-06-25 Optical examination of surface roughness

Country Status (3)

Country Link
DE (1) DE2032314A1 (en)
FR (1) FR2095594A5 (en)
GB (1) GB1352940A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1709687A2 (en) * 2003-12-19 2006-10-11 General Atomics Method and apparatus for dual polarization imaging

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3304780A1 (en) * 1983-02-11 1984-08-30 Rodenstock Optik G DEVICE FOR DETERMINING A SURFACE STRUCTURE, ESPECIALLY THE ROUGHNESS
DE3319320A1 (en) * 1983-05-27 1984-11-29 Siemens AG, 1000 Berlin und 8000 München Device for detecting a spatial coordinate of a light point
DE3503858A1 (en) * 1985-02-05 1986-08-21 Daimler-Benz Ag, 7000 Stuttgart DEVICE FOR DETERMINING LOW-ORDER DESIGN ERRORS

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1709687A2 (en) * 2003-12-19 2006-10-11 General Atomics Method and apparatus for dual polarization imaging
EP1709687A4 (en) * 2003-12-19 2010-10-20 Gen Atomics Method and apparatus for dual polarization imaging

Also Published As

Publication number Publication date
DE2032314A1 (en) 1972-01-05
FR2095594A5 (en) 1972-02-11

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee