JPS5539022A - Optical thickness meter - Google Patents

Optical thickness meter

Info

Publication number
JPS5539022A
JPS5539022A JP11219778A JP11219778A JPS5539022A JP S5539022 A JPS5539022 A JP S5539022A JP 11219778 A JP11219778 A JP 11219778A JP 11219778 A JP11219778 A JP 11219778A JP S5539022 A JPS5539022 A JP S5539022A
Authority
JP
Japan
Prior art keywords
lens
meter
light receiving
deflector
slit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11219778A
Other languages
Japanese (ja)
Inventor
Hisao Hara
Yoshiyuki Kakinuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP11219778A priority Critical patent/JPS5539022A/en
Publication of JPS5539022A publication Critical patent/JPS5539022A/en
Pending legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To provide a meter, which can accomplish the high speed measurements with reduced erros, by having the meter equipped with a light source having excellent directivity a deflector, a lens, a light receiving element and a signal processing circuit for generating an output corresponding to the thickness of a test piece.
CONSTITUTION: A bundle 2 of beams 2 from a light source 1 is angularly scanned with a deflector 3. The beam bundle 2 is converted by a lens 4 into a parallel beam and is introduced into the measuring point of a test piece 5. A slit 7 is placed at a position, where the reflected beams 9 and 13 from the both sides of the test plece 5 are focused by the lens 4, so that the light passing through the slit 7 is received by a light receiving element 8. Since only one light receiving elemtn of non-scanning type is used as the optical thickness measuring element, the meter of the invention can be free from any problem in irregularity in sensitiveness and can accomplish measurements of more than 10 thousands for one scond.
COPYRIGHT: (C)1980,JPO&Japio
JP11219778A 1978-09-14 1978-09-14 Optical thickness meter Pending JPS5539022A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11219778A JPS5539022A (en) 1978-09-14 1978-09-14 Optical thickness meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11219778A JPS5539022A (en) 1978-09-14 1978-09-14 Optical thickness meter

Publications (1)

Publication Number Publication Date
JPS5539022A true JPS5539022A (en) 1980-03-18

Family

ID=14580682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11219778A Pending JPS5539022A (en) 1978-09-14 1978-09-14 Optical thickness meter

Country Status (1)

Country Link
JP (1) JPS5539022A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57147004A (en) * 1981-03-08 1982-09-10 Nippon Telegr & Teleph Corp <Ntt> Method for optical measurement of semiconductor plate dimension
US4822171A (en) * 1985-01-30 1989-04-18 Dipl.-Ing.Bruno Richter Gmbh & Co. Method and apparatus for measuring the wall thickness of transparent objects
JPH03231103A (en) * 1990-02-07 1991-10-15 Mizojiri Kogaku Kogyosho:Kk Optical measuring method for coated thin film of transparent plate

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57147004A (en) * 1981-03-08 1982-09-10 Nippon Telegr & Teleph Corp <Ntt> Method for optical measurement of semiconductor plate dimension
JPH045925B2 (en) * 1981-03-08 1992-02-04 Nippon Telegraph & Telephone
US4822171A (en) * 1985-01-30 1989-04-18 Dipl.-Ing.Bruno Richter Gmbh & Co. Method and apparatus for measuring the wall thickness of transparent objects
JPH03231103A (en) * 1990-02-07 1991-10-15 Mizojiri Kogaku Kogyosho:Kk Optical measuring method for coated thin film of transparent plate

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