JPS55106340A - Grain size measuring device - Google Patents

Grain size measuring device

Info

Publication number
JPS55106340A
JPS55106340A JP1331079A JP1331079A JPS55106340A JP S55106340 A JPS55106340 A JP S55106340A JP 1331079 A JP1331079 A JP 1331079A JP 1331079 A JP1331079 A JP 1331079A JP S55106340 A JPS55106340 A JP S55106340A
Authority
JP
Japan
Prior art keywords
grain size
laser beam
interference fringes
resolution
beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1331079A
Other languages
Japanese (ja)
Inventor
Katsuji Iwamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP1331079A priority Critical patent/JPS55106340A/en
Publication of JPS55106340A publication Critical patent/JPS55106340A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To obtain a high-accuracy measuring device with omission of calibration by measuring the grain size by means of the interference fringes of the laser beam. CONSTITUTION:Laser beam 2 sent from laser beam source 1 is divided into the equivalent intensity via half-mirror 3. And one of the divided beams is led directly to beam splitters 5 and 6; while the other is led to splitters 5 and 6 via mirror 4 respectively. Then each laser beam is splitted into two beams. These splitted beams are then focused through lenses 7 and 8, thus obtaining the interference fringes at the measuring region. And when the particle passes through this measuring region, the output waveform is delivered via photoelectric multiplier tubes 9 and 10. And the grain size is decided through signal processor 11. If the resolution is defined as ''resolution=AC amplitude voltage/pedestal (P) voltage'', resolution 0.5 indicates that the grain size is identical to the interference fringes distance. Such measuring region is provided at two areas with the different interference fringes distances secured to each other. Thus the range of a certain grain size can be measured.
JP1331079A 1979-02-09 1979-02-09 Grain size measuring device Pending JPS55106340A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1331079A JPS55106340A (en) 1979-02-09 1979-02-09 Grain size measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1331079A JPS55106340A (en) 1979-02-09 1979-02-09 Grain size measuring device

Publications (1)

Publication Number Publication Date
JPS55106340A true JPS55106340A (en) 1980-08-15

Family

ID=11829593

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1331079A Pending JPS55106340A (en) 1979-02-09 1979-02-09 Grain size measuring device

Country Status (1)

Country Link
JP (1) JPS55106340A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57177317A (en) * 1981-04-08 1982-11-01 Facet Enterprises Method and device for inspecting filter element
JPS61260144A (en) * 1985-05-10 1986-11-18 ベクトン・デイツキンソン・アンド・カンパニ− Fluidized cell measuring device
JPS61270639A (en) * 1985-05-25 1986-11-29 Japan Spectroscopic Co Flow sight meter
JPS61283848A (en) * 1985-06-10 1986-12-13 Japan Spectroscopic Co Flow site meter
JPS6363944A (en) * 1986-09-05 1988-03-22 Nippon Telegr & Teleph Corp <Ntt> Method and apparatus for measuring dust in semiconductor production process

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
APPLIED OPTICS=1977 *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57177317A (en) * 1981-04-08 1982-11-01 Facet Enterprises Method and device for inspecting filter element
JPS61260144A (en) * 1985-05-10 1986-11-18 ベクトン・デイツキンソン・アンド・カンパニ− Fluidized cell measuring device
JPH0544621B2 (en) * 1985-05-10 1993-07-06 Becton Dickinson Co
JPS61270639A (en) * 1985-05-25 1986-11-29 Japan Spectroscopic Co Flow sight meter
JPS61283848A (en) * 1985-06-10 1986-12-13 Japan Spectroscopic Co Flow site meter
JPS6363944A (en) * 1986-09-05 1988-03-22 Nippon Telegr & Teleph Corp <Ntt> Method and apparatus for measuring dust in semiconductor production process

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