JPS55106340A - Grain size measuring device - Google Patents

Grain size measuring device

Info

Publication number
JPS55106340A
JPS55106340A JP1331079A JP1331079A JPS55106340A JP S55106340 A JPS55106340 A JP S55106340A JP 1331079 A JP1331079 A JP 1331079A JP 1331079 A JP1331079 A JP 1331079A JP S55106340 A JPS55106340 A JP S55106340A
Authority
JP
Japan
Prior art keywords
grain size
laser beam
interference fringes
resolution
beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1331079A
Other languages
Japanese (ja)
Inventor
Katsuji Iwamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP1331079A priority Critical patent/JPS55106340A/en
Publication of JPS55106340A publication Critical patent/JPS55106340A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02Investigating particle size or size distribution
    • G01N15/0205Investigating particle size or size distribution by optical means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To obtain a high-accuracy measuring device with omission of calibration by measuring the grain size by means of the interference fringes of the laser beam. CONSTITUTION:Laser beam 2 sent from laser beam source 1 is divided into the equivalent intensity via half-mirror 3. And one of the divided beams is led directly to beam splitters 5 and 6; while the other is led to splitters 5 and 6 via mirror 4 respectively. Then each laser beam is splitted into two beams. These splitted beams are then focused through lenses 7 and 8, thus obtaining the interference fringes at the measuring region. And when the particle passes through this measuring region, the output waveform is delivered via photoelectric multiplier tubes 9 and 10. And the grain size is decided through signal processor 11. If the resolution is defined as ''resolution=AC amplitude voltage/pedestal (P) voltage'', resolution 0.5 indicates that the grain size is identical to the interference fringes distance. Such measuring region is provided at two areas with the different interference fringes distances secured to each other. Thus the range of a certain grain size can be measured.
JP1331079A 1979-02-09 1979-02-09 Grain size measuring device Pending JPS55106340A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1331079A JPS55106340A (en) 1979-02-09 1979-02-09 Grain size measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1331079A JPS55106340A (en) 1979-02-09 1979-02-09 Grain size measuring device

Publications (1)

Publication Number Publication Date
JPS55106340A true JPS55106340A (en) 1980-08-15

Family

ID=11829593

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1331079A Pending JPS55106340A (en) 1979-02-09 1979-02-09 Grain size measuring device

Country Status (1)

Country Link
JP (1) JPS55106340A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57177317A (en) * 1981-04-08 1982-11-01 Facet Enterprises Method and device for inspecting filter element
JPS61260144A (en) * 1985-05-10 1986-11-18 ベクトン・デイツキンソン・アンド・カンパニ− Fluidized cell measuring device
JPS61270639A (en) * 1985-05-25 1986-11-29 Japan Spectroscopic Co Flow sight meter
JPS61283848A (en) * 1985-06-10 1986-12-13 Japan Spectroscopic Co Flow site meter
JPS6363944A (en) * 1986-09-05 1988-03-22 Nippon Telegr & Teleph Corp <Ntt> Method and apparatus for measuring dust in semiconductor production process

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
APPLIED OPTICS=1977 *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57177317A (en) * 1981-04-08 1982-11-01 Facet Enterprises Method and device for inspecting filter element
JPS61260144A (en) * 1985-05-10 1986-11-18 ベクトン・デイツキンソン・アンド・カンパニ− Fluidized cell measuring device
JPH0544621B2 (en) * 1985-05-10 1993-07-06 Becton Dickinson Co
JPS61270639A (en) * 1985-05-25 1986-11-29 Japan Spectroscopic Co Flow sight meter
JPS61283848A (en) * 1985-06-10 1986-12-13 Japan Spectroscopic Co Flow site meter
JPS6363944A (en) * 1986-09-05 1988-03-22 Nippon Telegr & Teleph Corp <Ntt> Method and apparatus for measuring dust in semiconductor production process

Similar Documents

Publication Publication Date Title
US4548504A (en) Device for determining the real or the virtual distance of a source of light from a measuring plane
JPS5590843A (en) Method of measuring contaminated gas
JPS6413403A (en) Interference length measuring apparatus
JPS55106340A (en) Grain size measuring device
UST102104I4 (en) Scanning optical system adapted for linewidth measurement in semiconductor devices
CA2122782A1 (en) Apparatus for Measuring an Ambient Physical Parameter Applied to a Highly Birefringent Sensing Fiber and Method
JPS57207805A (en) Displacement measuring device
GB1405953A (en) Dimension comparison
ATE105402T1 (en) POSITION MEASUREMENT DEVICE.
JPS5629112A (en) Distance measurement unit
JPS5610201A (en) Object dimension measuring device
JPS5459166A (en) Visual sensibility measuring apparatus of interferometer
JPS6488327A (en) Shape measuring method for interference wave front
JPS5497082A (en) Intensity detector of laser beam
JPS5539022A (en) Optical thickness meter
JPS62156563A (en) Measuring device for speed and distance
JPS5720603A (en) Detector for plate width using laser
GB1408459A (en) Apparatus for producing a beam of light moving parallel to itself
SU861970A1 (en) Device for determination spatial time characteristics of coherent optical radiation
JPS6484104A (en) Laser interference length measuring machine
GB908030A (en) Improvements in or relating to range-finders
JPS6154422A (en) Method and instrument for measuring mode field diameter of optical fiber
SU692467A1 (en) Device for determining the spatial-temporal characteristics of coherent optical radiation
SU393789A1 (en) METHOD OF MEASUREMENT OF CONSUMPTION OF A RAY OF OPTICAL QUANTUM GENERATOR
JPS5666713A (en) Measuring device of beam diameter of laser light