JPS55112502A - Plate automatic examination unit - Google Patents

Plate automatic examination unit

Info

Publication number
JPS55112502A
JPS55112502A JP1977479A JP1977479A JPS55112502A JP S55112502 A JPS55112502 A JP S55112502A JP 1977479 A JP1977479 A JP 1977479A JP 1977479 A JP1977479 A JP 1977479A JP S55112502 A JPS55112502 A JP S55112502A
Authority
JP
Japan
Prior art keywords
plate
axis direction
stand
surface
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1977479A
Other versions
JPH0159521B2 (en
Inventor
Yasuo Hachikake
Motoo Hourai
Aiichi Ishikawa
Michio Suzuki
Nobuyuki Yoshida
Original Assignee
Hitachi Electronics Eng Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Eng Co Ltd, Hitachi Ltd filed Critical Hitachi Electronics Eng Co Ltd
Priority to JP1977479A priority Critical patent/JPH0159521B2/ja
Publication of JPS55112502A publication Critical patent/JPS55112502A/en
Publication of JPH0159521B2 publication Critical patent/JPH0159521B2/ja
Application status is Expired legal-status Critical

Links

Abstract

PURPOSE: To make it possible to generate the defect distribution graph of a large- size plate, by scanning the surface of the plate with a light spot and by subjecting the scattered light from the plate to photoelectric conversion to obtain defect examination data.
CONSTITUTION: Plate 1 to be examined is put on stand 2. Stand 2 moves in the y axis direction on stand 4, and meanwhile, stand 4 moves in the x axis direction. By their movement, plate 1 is positioned in the x axis direction and the y axis direction. Light beam 10 from light source 9 is vibrated at a fixed period in the x axis direction by vibrating mirror 11, and the scattered light from a defective place of the surface of the plate is detected by photoelectric converter 14. On a basis of obtained defect examination data, a defect distribution graph corresponding to positions on the plate surface is generated.
COPYRIGHT: (C)1980,JPO&Japio
JP1977479A 1979-02-23 1979-02-23 Expired JPH0159521B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977479A JPH0159521B2 (en) 1979-02-23 1979-02-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977479A JPH0159521B2 (en) 1979-02-23 1979-02-23

Publications (2)

Publication Number Publication Date
JPS55112502A true JPS55112502A (en) 1980-08-30
JPH0159521B2 JPH0159521B2 (en) 1989-12-18

Family

ID=12008674

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977479A Expired JPH0159521B2 (en) 1979-02-23 1979-02-23

Country Status (1)

Country Link
JP (1) JPH0159521B2 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6013248A (en) * 1983-07-04 1985-01-23 Koyo Jidoki Kk Method for judging defective part and dust on surface of material to be checked by using laser light
JPS6199845A (en) * 1984-10-22 1986-05-17 Ibm Optical defect detector
JPS61278739A (en) * 1985-06-03 1986-12-09 Hitachi Electronics Eng Co Ltd Device or inspecting foreign matter
JPS6211148A (en) * 1985-06-28 1987-01-20 Hitachi Electronics Eng Co Ltd Apparatus for inspecting foreign matter
JPS6275336A (en) * 1985-09-30 1987-04-07 Hitachi Electronics Eng Co Ltd Foreign matter inspector
US7075637B2 (en) 1996-06-04 2006-07-11 Kla-Tencor Corporation Optical scanning system for surface inspection
US7084967B2 (en) 1994-12-08 2006-08-01 KLA —Tencor Corporation Scanning system for inspecting anomalies on surfaces

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6013248A (en) * 1983-07-04 1985-01-23 Koyo Jidoki Kk Method for judging defective part and dust on surface of material to be checked by using laser light
JPS6199845A (en) * 1984-10-22 1986-05-17 Ibm Optical defect detector
JPS61278739A (en) * 1985-06-03 1986-12-09 Hitachi Electronics Eng Co Ltd Device or inspecting foreign matter
JPS6211148A (en) * 1985-06-28 1987-01-20 Hitachi Electronics Eng Co Ltd Apparatus for inspecting foreign matter
JPH0378927B2 (en) * 1985-06-28 1991-12-17 Hitachi Electr Eng
JPS6275336A (en) * 1985-09-30 1987-04-07 Hitachi Electronics Eng Co Ltd Foreign matter inspector
JPH0378929B2 (en) * 1985-09-30 1991-12-17 Hitachi Electr Eng
US7084967B2 (en) 1994-12-08 2006-08-01 KLA —Tencor Corporation Scanning system for inspecting anomalies on surfaces
US7075637B2 (en) 1996-06-04 2006-07-11 Kla-Tencor Corporation Optical scanning system for surface inspection
US7477372B2 (en) 1996-06-04 2009-01-13 Kla-Tencor Technologies Corporation Optical scanning system for surface inspection

Also Published As

Publication number Publication date
JPH0159521B2 (en) 1989-12-18

Similar Documents

Publication Publication Date Title
CA2156461A1 (en) Optical inspection of container finish dimensional parameters
CA2175691A1 (en) High resolution ultrasonic imaging apparatus and method
CA2066202A1 (en) Power-modulated laser devices
JPH01245215A (en) Method for scanning confocal microscopic test for each depth of extension visual field and device therefor
GB1492575A (en) Devices for the non-destructive examination of heterogeneous surfaces
TW360775B (en) Optical gap-sensor
GB1507702A (en) Measuring the surface roughness of a moving sheet materia
JPH02119858A (en) Three-dimensional measuring optical probe for tooth in oral cavity
JPS569763A (en) Beam recording device
JPS5353393A (en) Ultrasonic probe
JPH01314955A (en) Method for inspection of light previous container
JPH04262300A (en) Roentgen microscope and method for forming roentgen image
JPS576307A (en) Method and apparatus of surface failure inspection of circular member
JPS54109488A (en) Analyzing method and device of optically scattered image information
JPH03175327A (en) Method for directly measuring phase of electromagnetic line, especially light beam and apparatus therefor
JPS5551360A (en) Velocity measuring method for mobile object using speckle
JPS5553425A (en) Pattern inspection
JPS61202128A (en) Semiconductor laser heterodyne interferometer
JPS63269022A (en) Apparatus for measuring illuminance irregularity
JPH02186547A (en) Reflected electron beam holography apparatus
JPS5833106A (en) Device for measuring varying quantity of thickness of paint layer
JPH02287236A (en) Method and apparatus for measuring contact angle less than 45° of droplet placed on undercoat
JPS6324115A (en) Method and device for measuring flotating quantity of magnetic head
JPH01311551A (en) Pattern shape measuring device
JPH0317505A (en) Method and apparatus for measuring thickness of thin membrane