JPS57157105A - Device for measuring thickness of thin film - Google Patents

Device for measuring thickness of thin film

Info

Publication number
JPS57157105A
JPS57157105A JP4179781A JP4179781A JPS57157105A JP S57157105 A JPS57157105 A JP S57157105A JP 4179781 A JP4179781 A JP 4179781A JP 4179781 A JP4179781 A JP 4179781A JP S57157105 A JPS57157105 A JP S57157105A
Authority
JP
Japan
Prior art keywords
light
detecting
wavelength component
thin film
parallel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4179781A
Other languages
Japanese (ja)
Inventor
Junichi Shimizu
Eiji Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Kokusai Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Corp filed Critical Kokusai Electric Corp
Priority to JP4179781A priority Critical patent/JPS57157105A/en
Publication of JPS57157105A publication Critical patent/JPS57157105A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To enhance detecting speed and accuracy by performing spectrophotometry of light reflected from the thin film by a fixed spectroscope, scanning said spectral signals by a group of detecting elements arranged in parallel, and detecting the intensity of each wavelength component, in the measurement of the thickness of the thin film. CONSTITUTION:The light from a light source 1 is vertically projected to a semiconductor wafer 3 on a sample table 4 through a half mirror 2. When the reflected light is guided to the fixed spectroscope 5' through the half mirror, each wavelength component is dispersed at a certain angle. Multiple light detecting elements are arranged in parallel on a parallel light detector 11. The amount of the light of respective wavelength component projected on each element is independently transduced into an electric signal. The film thickness is obtained by an amplifier 8 and a processor 9 from the relationship between the intensity of each wavelength component and the wave length. When the group of the detecting elements of the detector 11 is scanned at a high speed by using an analog shift register, the detecting speed and accuracy of the dispersed light are improved.
JP4179781A 1981-03-24 1981-03-24 Device for measuring thickness of thin film Pending JPS57157105A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4179781A JPS57157105A (en) 1981-03-24 1981-03-24 Device for measuring thickness of thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4179781A JPS57157105A (en) 1981-03-24 1981-03-24 Device for measuring thickness of thin film

Publications (1)

Publication Number Publication Date
JPS57157105A true JPS57157105A (en) 1982-09-28

Family

ID=12618320

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4179781A Pending JPS57157105A (en) 1981-03-24 1981-03-24 Device for measuring thickness of thin film

Country Status (1)

Country Link
JP (1) JPS57157105A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5966115A (en) * 1982-10-08 1984-04-14 Hitachi Ltd Inspecting device for defect of thin film
JPS6224102A (en) * 1985-07-24 1987-02-02 Nec Corp Semiconductor manufacturing apparatus
JP2001044254A (en) * 1999-07-27 2001-02-16 Sharp Corp Electronic component manufacturing apparatus and method
US7304744B1 (en) 1998-12-24 2007-12-04 Sharp Kabushiki Kaisha Apparatus and method for measuring the thickness of a thin film via the intensity of reflected light

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5535214A (en) * 1978-09-04 1980-03-12 Asahi Chem Ind Co Ltd Method and device for film-thickness measurement making use of infrared-ray interference

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5535214A (en) * 1978-09-04 1980-03-12 Asahi Chem Ind Co Ltd Method and device for film-thickness measurement making use of infrared-ray interference

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5966115A (en) * 1982-10-08 1984-04-14 Hitachi Ltd Inspecting device for defect of thin film
JPS6224102A (en) * 1985-07-24 1987-02-02 Nec Corp Semiconductor manufacturing apparatus
US7304744B1 (en) 1998-12-24 2007-12-04 Sharp Kabushiki Kaisha Apparatus and method for measuring the thickness of a thin film via the intensity of reflected light
JP2001044254A (en) * 1999-07-27 2001-02-16 Sharp Corp Electronic component manufacturing apparatus and method

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