JPS56107150A - Defect detection device - Google Patents

Defect detection device

Info

Publication number
JPS56107150A
JPS56107150A JP1068380A JP1068380A JPS56107150A JP S56107150 A JPS56107150 A JP S56107150A JP 1068380 A JP1068380 A JP 1068380A JP 1068380 A JP1068380 A JP 1068380A JP S56107150 A JPS56107150 A JP S56107150A
Authority
JP
Japan
Prior art keywords
light receiving
lens
receiving part
output
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1068380A
Other languages
Japanese (ja)
Other versions
JPS6310778B2 (en
Inventor
Toshiyuki Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP1068380A priority Critical patent/JPS56107150A/en
Publication of JPS56107150A publication Critical patent/JPS56107150A/en
Publication of JPS6310778B2 publication Critical patent/JPS6310778B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/952—Inspecting the exterior surface of cylindrical bodies or wires

Abstract

PURPOSE:To detect a defect with high sensitivity by irradiating a scan laser beam to a cylindrical light-permeable substance such as glass tube, etc. and detecting a concurrent increase in the output of at least two pieces of a scattering diffracted light receiving part and a decrease in the output of a transmitting light receiving part. CONSTITUTION:A laser beam from a laser source 2 is reflected on a rotary oscillation mirror 3 and is collimated by means of a lens 4, scanning and being irradiated to a body to be detected 1 such as glass tube, etc. A condensing lens 5 is arranged at the opposite side to the lens 4 and a permeating light receiving part 6 is installed at a focusing position on the opposite side to the body to be detected 1 for the lens 5. In addition, a pair of light receiving parts 7, 8 for reception of scattering diffracted light through the lens 5 are arranged at a symmetrical position against a line connecting the center of the body to be detected 1 and the light receiving part 6. In the same manner, a pair of light receiving parts 11, 12 for scattering diffracted light reception through condensing lens 9, 10 are provided. Each light receiving part 6 to 8, 11, 12 converts a change in the receiving light value to a change in voltage. The output of at least two pieces of the light receiving parts 7, 8, 11, 12 is synchronized and increased in a detection circuit 13. In addition, the said circuit 13 outputs a defect signal to a display part 14, detecting a reduced output from the light receiving part 6.
JP1068380A 1980-01-31 1980-01-31 Defect detection device Granted JPS56107150A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1068380A JPS56107150A (en) 1980-01-31 1980-01-31 Defect detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1068380A JPS56107150A (en) 1980-01-31 1980-01-31 Defect detection device

Publications (2)

Publication Number Publication Date
JPS56107150A true JPS56107150A (en) 1981-08-25
JPS6310778B2 JPS6310778B2 (en) 1988-03-09

Family

ID=11757053

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1068380A Granted JPS56107150A (en) 1980-01-31 1980-01-31 Defect detection device

Country Status (1)

Country Link
JP (1) JPS56107150A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0119565A2 (en) * 1983-03-17 1984-09-26 Siemens Aktiengesellschaft Optical testing device for the detection of surface defects on cables or lines
KR20030046616A (en) * 2001-12-06 2003-06-18 삼성전자주식회사 Micro-bubble analyzing apparatus for high-purity glass tube using laser light scattering

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5316836B2 (en) * 2008-02-05 2013-10-16 日本電気硝子株式会社 Defect inspection method and defect inspection apparatus for glass article

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5149232A (en) * 1974-07-27 1976-04-28 Beecham Group Ltd

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5149232A (en) * 1974-07-27 1976-04-28 Beecham Group Ltd

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0119565A2 (en) * 1983-03-17 1984-09-26 Siemens Aktiengesellschaft Optical testing device for the detection of surface defects on cables or lines
KR20030046616A (en) * 2001-12-06 2003-06-18 삼성전자주식회사 Micro-bubble analyzing apparatus for high-purity glass tube using laser light scattering

Also Published As

Publication number Publication date
JPS6310778B2 (en) 1988-03-09

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