JPS56168107A - Surface inspecting device - Google Patents

Surface inspecting device

Info

Publication number
JPS56168107A
JPS56168107A JP7199980A JP7199980A JPS56168107A JP S56168107 A JPS56168107 A JP S56168107A JP 7199980 A JP7199980 A JP 7199980A JP 7199980 A JP7199980 A JP 7199980A JP S56168107 A JPS56168107 A JP S56168107A
Authority
JP
Japan
Prior art keywords
inspected
given
decision
inspection
flaws
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7199980A
Other languages
Japanese (ja)
Inventor
Kenji Shiroshita
Yasuji Nakamura
Hiroshi Nishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7199980A priority Critical patent/JPS56168107A/en
Publication of JPS56168107A publication Critical patent/JPS56168107A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To give an accurate decision of quality to an object to be inspected, by irradiating a laser beam linearly on the surface of the object to be inspected in a way like a scan and detecting a change of the reflected light or transmitted light to carry out an inspection for the surface flaws of the object to be inspected. CONSTITUTION:In case an inspection is given to the side surface of a cylinder, an object 4 to be inspected is turned in a certain speed on rollers 5a and 5b. Then a laser beam 2 given from a laser device 1 is projected by a vibrating mirror 3, and the reflected light given from the side surface of the object 4 is condensed on the light receiving surface of a photodetector 8. The output of the detector 8 is led to a signal processor 9 to carry out a decision of flaws, measurement of the flaw area, a decision of quality and others. The processor 9 consists of a normal surface diciding circuit 10, an AND gate 11 and a counting device 12 plus a storage/arithmetic device 13 which stores the signals equivalent to the flawless area of the object 4 and calculates both the length and the flaw area of the object 4 by means of the above-mentioned signals, and others.
JP7199980A 1980-05-29 1980-05-29 Surface inspecting device Pending JPS56168107A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7199980A JPS56168107A (en) 1980-05-29 1980-05-29 Surface inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7199980A JPS56168107A (en) 1980-05-29 1980-05-29 Surface inspecting device

Publications (1)

Publication Number Publication Date
JPS56168107A true JPS56168107A (en) 1981-12-24

Family

ID=13476675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7199980A Pending JPS56168107A (en) 1980-05-29 1980-05-29 Surface inspecting device

Country Status (1)

Country Link
JP (1) JPS56168107A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5968207U (en) * 1982-10-29 1984-05-09 株式会社日本製鋼所 Surface roughness measuring device
JPS61105407A (en) * 1984-10-29 1986-05-23 Koyo Seiko Co Ltd Length detecting device
JPS61105406A (en) * 1984-10-29 1986-05-23 Koyo Seiko Co Ltd Length detecting device
JPS6344108A (en) * 1986-08-12 1988-02-25 Koyo Seiko Co Ltd Automatic external shape detector
US5186887A (en) * 1990-10-02 1993-02-16 Mitsubishi Nuclear Fuel Co. Apparatus for inspecting peripheral surfaces of nuclear fuel pellets
JPH0651814U (en) * 1993-10-20 1994-07-15 株式会社安永鉄工所 Optical scratch displacement measuring device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5379593A (en) * 1976-12-24 1978-07-14 Hitachi Ltd Surface inspecting method of objects and apparatus for the same
JPS53131848A (en) * 1977-04-22 1978-11-17 Hitachi Ltd Surface defect detector of photoreceptor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5379593A (en) * 1976-12-24 1978-07-14 Hitachi Ltd Surface inspecting method of objects and apparatus for the same
JPS53131848A (en) * 1977-04-22 1978-11-17 Hitachi Ltd Surface defect detector of photoreceptor

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5968207U (en) * 1982-10-29 1984-05-09 株式会社日本製鋼所 Surface roughness measuring device
JPS61105407A (en) * 1984-10-29 1986-05-23 Koyo Seiko Co Ltd Length detecting device
JPS61105406A (en) * 1984-10-29 1986-05-23 Koyo Seiko Co Ltd Length detecting device
JPS6344108A (en) * 1986-08-12 1988-02-25 Koyo Seiko Co Ltd Automatic external shape detector
US5186887A (en) * 1990-10-02 1993-02-16 Mitsubishi Nuclear Fuel Co. Apparatus for inspecting peripheral surfaces of nuclear fuel pellets
JPH0651814U (en) * 1993-10-20 1994-07-15 株式会社安永鉄工所 Optical scratch displacement measuring device

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