JPS5770401A - Read-only memory tester - Google Patents

Read-only memory tester

Info

Publication number
JPS5770401A
JPS5770401A JP14794080A JP14794080A JPS5770401A JP S5770401 A JPS5770401 A JP S5770401A JP 14794080 A JP14794080 A JP 14794080A JP 14794080 A JP14794080 A JP 14794080A JP S5770401 A JPS5770401 A JP S5770401A
Authority
JP
Japan
Prior art keywords
measured
laser beam
reflected
perturbated
reflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14794080A
Other languages
Japanese (ja)
Other versions
JPS6218001B2 (en
Inventor
Yasutomo Fujimori
Masayasu Matsuda
Takashi Nanto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Nippon Steel Corp
Original Assignee
Toshiba Corp
Nippon Steel Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Nippon Steel Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14794080A priority Critical patent/JPS5770401A/en
Publication of JPS5770401A publication Critical patent/JPS5770401A/en
Publication of JPS6218001B2 publication Critical patent/JPS6218001B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Blast Furnaces (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)

Abstract

PURPOSE:To make the detection of the reflected light by an optical system sure and to make the execution of high accuracy measurment for the profile of the surface to be measured by irradiating the surface to be measured with perturbated laser beam. CONSTITUTION:The laser beam outputted from a laser oscillator is perturbated to irradiate the surface to be measured and the reflected beam thereof is detected with a photodetecting optical system, whereby the profile of the surface to be measured is measured. For example, the laser beam emitted from a light source 7 is irradiated into a blast furnace 1 through a light transmission window 3 by way of a perturbating reflection mirror 9 connected to a perturbation system 8 a rotary reflection mirror 12 provided with an angle encoder 11 connected to a rotating and driving system 10, so that it is reflected on a furnace top surface 2. The reflected beam L1 is condensed by a lens 5 and is detected with a photodetector 6. The position of the reflection point A is measured form the exit angle of that time and the incident angle determined by the above-mentioned encoder, and since the laser beam is perturbated, the reflection is carried out surely despite the presence of ruggedness and the like in the furnace top part, and the highly accurate measurement of profiles is possible.
JP14794080A 1980-10-22 1980-10-22 Read-only memory tester Granted JPS5770401A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14794080A JPS5770401A (en) 1980-10-22 1980-10-22 Read-only memory tester

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14794080A JPS5770401A (en) 1980-10-22 1980-10-22 Read-only memory tester

Publications (2)

Publication Number Publication Date
JPS5770401A true JPS5770401A (en) 1982-04-30
JPS6218001B2 JPS6218001B2 (en) 1987-04-21

Family

ID=15441494

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14794080A Granted JPS5770401A (en) 1980-10-22 1980-10-22 Read-only memory tester

Country Status (1)

Country Link
JP (1) JPS5770401A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61210901A (en) * 1985-03-15 1986-09-19 Toshiba Corp Position measuring instrument

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0294702U (en) * 1989-01-11 1990-07-27

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61210901A (en) * 1985-03-15 1986-09-19 Toshiba Corp Position measuring instrument

Also Published As

Publication number Publication date
JPS6218001B2 (en) 1987-04-21

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