JPS64452A - Detection of foreign matter - Google Patents
Detection of foreign matterInfo
- Publication number
- JPS64452A JPS64452A JP63135483A JP13548388A JPS64452A JP S64452 A JPS64452 A JP S64452A JP 63135483 A JP63135483 A JP 63135483A JP 13548388 A JP13548388 A JP 13548388A JP S64452 A JPS64452 A JP S64452A
- Authority
- JP
- Japan
- Prior art keywords
- light
- substrate
- foreign matter
- polarized light
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE:To make detection more exactly by mounting a means for preventing deposition of foreign matter which is formed with a pellicle on a frame to a substrate, scanning the polarized light which is condensed and projected relatively on the substrate, condensing the light reflected from the foreign matter by a condensing optical system and converting the light to a signal. CONSTITUTION:The laser light 30 from a laser oscillator 27 is linearly polarized by a polarizing element 29 and the polarized light is reflected by a galvanomirror 28 connected to a motor 34 so as to arrive at a mirror 32 via an f.theta lens 31. The light 30 is entered at an angle alpha of inclination to the substrate 21 via mirrors 35a, 36a or mirrors 35b, 36b. Detecting devices 37a and 37b consisting of a detector 41a which detects the linearly polarized light, a condenser lens 40a, a slit-shaped light shielding device 39a, and a photoelectric converting element 38a are then disposed perpendicularly to the laser light 30a, 30b and at an angle beta of inclination with the substrate 21 to detect the foreign matter on the substrate 21. The polarized light 30 is, therefore, used and detector 41a, the device 39a, etc., are provided, by which the exact detection is executed with high sensitivity.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63135483A JPS64452A (en) | 1988-06-03 | 1988-06-03 | Detection of foreign matter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63135483A JPS64452A (en) | 1988-06-03 | 1988-06-03 | Detection of foreign matter |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57192462A Division JPS5982727A (en) | 1982-11-04 | 1982-11-04 | Method and apparatus for detecting foreign matter |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3096770A Division JPH0816651B2 (en) | 1991-04-26 | 1991-04-26 | Double-sided foreign matter detection method and device |
Publications (3)
Publication Number | Publication Date |
---|---|
JPH01452A JPH01452A (en) | 1989-01-05 |
JPS64452A true JPS64452A (en) | 1989-01-05 |
JPH05662B2 JPH05662B2 (en) | 1993-01-06 |
Family
ID=15152775
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63135483A Granted JPS64452A (en) | 1988-06-03 | 1988-06-03 | Detection of foreign matter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS64452A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009192541A (en) * | 2009-05-25 | 2009-08-27 | Hitachi Ltd | Defect inspection device |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52129582A (en) * | 1976-04-23 | 1977-10-31 | Hitachi Ltd | Flaw detector |
JPS5686340A (en) * | 1979-12-17 | 1981-07-14 | Hitachi Ltd | Automatic detector for foreign matter |
JPS57128834A (en) * | 1981-02-04 | 1982-08-10 | Nippon Kogaku Kk <Nikon> | Inspecting apparatus of foreign substance |
JPS5982727A (en) * | 1982-11-04 | 1984-05-12 | Hitachi Ltd | Method and apparatus for detecting foreign matter |
-
1988
- 1988-06-03 JP JP63135483A patent/JPS64452A/en active Granted
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52129582A (en) * | 1976-04-23 | 1977-10-31 | Hitachi Ltd | Flaw detector |
JPS5686340A (en) * | 1979-12-17 | 1981-07-14 | Hitachi Ltd | Automatic detector for foreign matter |
JPS57128834A (en) * | 1981-02-04 | 1982-08-10 | Nippon Kogaku Kk <Nikon> | Inspecting apparatus of foreign substance |
JPS5982727A (en) * | 1982-11-04 | 1984-05-12 | Hitachi Ltd | Method and apparatus for detecting foreign matter |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009192541A (en) * | 2009-05-25 | 2009-08-27 | Hitachi Ltd | Defect inspection device |
Also Published As
Publication number | Publication date |
---|---|
JPH05662B2 (en) | 1993-01-06 |
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