JPS57118105A - Detector - Google Patents

Detector

Info

Publication number
JPS57118105A
JPS57118105A JP56182283A JP18228381A JPS57118105A JP S57118105 A JPS57118105 A JP S57118105A JP 56182283 A JP56182283 A JP 56182283A JP 18228381 A JP18228381 A JP 18228381A JP S57118105 A JPS57118105 A JP S57118105A
Authority
JP
Japan
Prior art keywords
light
transducers
image pickup
state image
pickup elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56182283A
Other languages
Japanese (ja)
Other versions
JPS608724B2 (en
Inventor
Mitsuyoshi Koizumi
Yasuhiko Hara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56182283A priority Critical patent/JPS608724B2/en
Publication of JPS57118105A publication Critical patent/JPS57118105A/en
Publication of JPS608724B2 publication Critical patent/JPS608724B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To make the simple measurement of linear patterns with high accuracy and high reliability possible by condensing the light form the direction intersecting orthogonally with the arranging direction of photoelectric transducers on one-dimensional solid-state image pickup elements arranged with said transducers. CONSTITUTION:An optical system which condenses light from the direction at a right angle to the arranging direction of photoelectric transducers onto one- dimensional solid-state image pickup elements arranged with said transducers is added to said elements whereby a linear pattern detector is provided. For example, the light from a light source 17 is cast via a semitransparent mirror 15 and a lens 14 to position matching patterns 3a, 3b, 5a, 5b, and part of the magnified image light thereof is scaled down in the width direction by cylindrical lenses 20, 21 after reflection with a semitransparent mirror 18, and is received in solid state image pickup elements 22a, 22b. The remaining light is passed through the mirror 18, after which it is received in the elements 23a, 23b via the cylindrical lenses in the same way, whereby the signals 26a, (b) and 27a, (b) corresponding to the mutually orthogonally intersecting linear patterns are obtained with high accuracy and high reliability.
JP56182283A 1981-11-16 1981-11-16 detection device Expired JPS608724B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56182283A JPS608724B2 (en) 1981-11-16 1981-11-16 detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56182283A JPS608724B2 (en) 1981-11-16 1981-11-16 detection device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP14864074A Division JPS5176979A (en) 1974-12-27 1974-12-27 ICHISEIGOSOCHI

Publications (2)

Publication Number Publication Date
JPS57118105A true JPS57118105A (en) 1982-07-22
JPS608724B2 JPS608724B2 (en) 1985-03-05

Family

ID=16115559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56182283A Expired JPS608724B2 (en) 1981-11-16 1981-11-16 detection device

Country Status (1)

Country Link
JP (1) JPS608724B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59109806A (en) * 1982-12-16 1984-06-25 Matsushita Electric Ind Co Ltd Position recognizing device of segment
JPS60103634A (en) * 1983-11-11 1985-06-07 Hitachi Electronics Eng Co Ltd Automatic wafer prober device
JPS61212037A (en) * 1985-03-18 1986-09-20 Hitachi Electronics Eng Co Ltd Coordinate value reading process
KR101102064B1 (en) * 2011-06-27 2012-01-04 이선우 Cartridge Type Micro Boring Bar

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06272243A (en) * 1993-03-19 1994-09-27 Kajima Corp End ground processing method for concrete pile and jig therefor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59109806A (en) * 1982-12-16 1984-06-25 Matsushita Electric Ind Co Ltd Position recognizing device of segment
JPS60103634A (en) * 1983-11-11 1985-06-07 Hitachi Electronics Eng Co Ltd Automatic wafer prober device
JPS61212037A (en) * 1985-03-18 1986-09-20 Hitachi Electronics Eng Co Ltd Coordinate value reading process
KR101102064B1 (en) * 2011-06-27 2012-01-04 이선우 Cartridge Type Micro Boring Bar

Also Published As

Publication number Publication date
JPS608724B2 (en) 1985-03-05

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