JPS5693009A - Digital displacement transducer - Google Patents
Digital displacement transducerInfo
- Publication number
- JPS5693009A JPS5693009A JP17156279A JP17156279A JPS5693009A JP S5693009 A JPS5693009 A JP S5693009A JP 17156279 A JP17156279 A JP 17156279A JP 17156279 A JP17156279 A JP 17156279A JP S5693009 A JPS5693009 A JP S5693009A
- Authority
- JP
- Japan
- Prior art keywords
- light
- elements
- simple structure
- output signal
- image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To enable the high precise measurement of a displacement amount and a displacement direction under a simple structure, by a method wherein, through irradiation of an optical scale, consisting of minute patterns, with a plurality of light spots, modulation of a strength of a reflection light from an optical scale is detected using light-receiving elements equivalent to the number of the spots.
CONSTITUTION: Staright-line, polarized laser beams are formed into an image on a scale pattern R after passing through a photon G for beam division, a lens L, a polarized beam splitter P, a mirror M, a 1/4 wavelength board W, and an objective V having a large aperture number. A reflecting light having a modulated strength flows reversely, and is reflected by a beam splitter P for image-formation on elements d0Wd4 of a photodetector d. The output signal is processed in a processing circuit OP, and a displacement amount and a displacement direction of an object, whereto a pattern P is adhered, are measured from a change in the phase of the output signal and a phase difference in output between the elements. This permits performing of a high precise measurement under a simple structure.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17156279A JPS5693009A (en) | 1979-12-27 | 1979-12-27 | Digital displacement transducer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17156279A JPS5693009A (en) | 1979-12-27 | 1979-12-27 | Digital displacement transducer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5693009A true JPS5693009A (en) | 1981-07-28 |
Family
ID=15925430
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17156279A Pending JPS5693009A (en) | 1979-12-27 | 1979-12-27 | Digital displacement transducer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5693009A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02145919A (en) * | 1988-11-28 | 1990-06-05 | Victor Co Of Japan Ltd | Reflection type optical type encoder apparatus |
JP2007187571A (en) * | 2006-01-13 | 2007-07-26 | Sendai Nikon:Kk | Encoder |
-
1979
- 1979-12-27 JP JP17156279A patent/JPS5693009A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02145919A (en) * | 1988-11-28 | 1990-06-05 | Victor Co Of Japan Ltd | Reflection type optical type encoder apparatus |
JP2007187571A (en) * | 2006-01-13 | 2007-07-26 | Sendai Nikon:Kk | Encoder |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS6414918A (en) | Stepper | |
JPS62201301A (en) | Laser interference length measuring machine | |
SU1382410A3 (en) | Optical sensor with objective lens automatic control system | |
JPS5693009A (en) | Digital displacement transducer | |
JPS6446243A (en) | Optical pickup device | |
JPS6435737A (en) | Optical head device | |
US5001334A (en) | Photodetector for hologram-type optical head including means for detecting return light spot deviation | |
EP0310231B1 (en) | Optical measuring apparatus | |
JPS5590984A (en) | Making method of multibranching hologram photo coupler | |
JPS5767815A (en) | Measuring method for position of reflector using light | |
JPS57118105A (en) | Detector | |
FR2422178A1 (en) | Detecting and focussing system for target reflected laser beam - has photodetector matrix connected to line-by-line sweep circuit | |
JPS5444552A (en) | Information reader | |
JP2573029Y2 (en) | Photo detector | |
JPS56147164A (en) | Copying apparatus capable of reading and writing image | |
JPS57113342A (en) | Eccentricity measurement | |
RU2065142C1 (en) | Wave front transducer | |
JPS5539022A (en) | Optical thickness meter | |
SU1198441A1 (en) | Method of automatic focusing of optical system | |
JPS56147116A (en) | Correction system for scanning light speed in laser recorder | |
KR880004297Y1 (en) | Optical sensor for focusing control | |
JPS56128407A (en) | Light interference device | |
SU1696854A1 (en) | Device for object displacement measurement | |
JPS54133395A (en) | Detecting method and apparatus for carck on substrate | |
SU396640A1 (en) | DEVICE FOR OPTICAL SIMULATION OF DIAGRAMS OF ORIENTATION OF MULTIPLICATIVE |