JPS5693009A - Digital displacement transducer - Google Patents

Digital displacement transducer

Info

Publication number
JPS5693009A
JPS5693009A JP17156279A JP17156279A JPS5693009A JP S5693009 A JPS5693009 A JP S5693009A JP 17156279 A JP17156279 A JP 17156279A JP 17156279 A JP17156279 A JP 17156279A JP S5693009 A JPS5693009 A JP S5693009A
Authority
JP
Japan
Prior art keywords
light
elements
simple structure
output signal
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17156279A
Other languages
Japanese (ja)
Inventor
Tsuyoshi Tsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Hokushin Electric Corp
Priority to JP17156279A priority Critical patent/JPS5693009A/en
Publication of JPS5693009A publication Critical patent/JPS5693009A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To enable the high precise measurement of a displacement amount and a displacement direction under a simple structure, by a method wherein, through irradiation of an optical scale, consisting of minute patterns, with a plurality of light spots, modulation of a strength of a reflection light from an optical scale is detected using light-receiving elements equivalent to the number of the spots.
CONSTITUTION: Staright-line, polarized laser beams are formed into an image on a scale pattern R after passing through a photon G for beam division, a lens L, a polarized beam splitter P, a mirror M, a 1/4 wavelength board W, and an objective V having a large aperture number. A reflecting light having a modulated strength flows reversely, and is reflected by a beam splitter P for image-formation on elements d0Wd4 of a photodetector d. The output signal is processed in a processing circuit OP, and a displacement amount and a displacement direction of an object, whereto a pattern P is adhered, are measured from a change in the phase of the output signal and a phase difference in output between the elements. This permits performing of a high precise measurement under a simple structure.
COPYRIGHT: (C)1981,JPO&Japio
JP17156279A 1979-12-27 1979-12-27 Digital displacement transducer Pending JPS5693009A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17156279A JPS5693009A (en) 1979-12-27 1979-12-27 Digital displacement transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17156279A JPS5693009A (en) 1979-12-27 1979-12-27 Digital displacement transducer

Publications (1)

Publication Number Publication Date
JPS5693009A true JPS5693009A (en) 1981-07-28

Family

ID=15925430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17156279A Pending JPS5693009A (en) 1979-12-27 1979-12-27 Digital displacement transducer

Country Status (1)

Country Link
JP (1) JPS5693009A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02145919A (en) * 1988-11-28 1990-06-05 Victor Co Of Japan Ltd Reflection type optical type encoder apparatus
JP2007187571A (en) * 2006-01-13 2007-07-26 Sendai Nikon:Kk Encoder

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02145919A (en) * 1988-11-28 1990-06-05 Victor Co Of Japan Ltd Reflection type optical type encoder apparatus
JP2007187571A (en) * 2006-01-13 2007-07-26 Sendai Nikon:Kk Encoder

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