JPS5536730A - Displaced position detector - Google Patents

Displaced position detector

Info

Publication number
JPS5536730A
JPS5536730A JP10931078A JP10931078A JPS5536730A JP S5536730 A JPS5536730 A JP S5536730A JP 10931078 A JP10931078 A JP 10931078A JP 10931078 A JP10931078 A JP 10931078A JP S5536730 A JPS5536730 A JP S5536730A
Authority
JP
Japan
Prior art keywords
light
area
pellet
displaced
detected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10931078A
Other languages
Japanese (ja)
Inventor
Nobushi Suzuki
Katsuhiko Aoyanagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP10931078A priority Critical patent/JPS5536730A/en
Publication of JPS5536730A publication Critical patent/JPS5536730A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To execute an accurate wire bonding process by utilizing pattern information obtained by the light illuminating surface due to light cutting effect to thereby compensate the displacement of the position of an infinitesimal member such as semiconductor pellet or the like in high accuracy.
CONSTITUTION: The light from a light source 14 is flattened by a slit 14b and a lens 14c, and irradiated obliquely with respect to a pellet 17. The irradiated area is displaced due to light cutting effect as shown by an oblique line B with the light reflected at a point P on the upper surface of the pellet and the light displaced from the pellet, i.e. the light reflected on the surface Q of a frame 18. The area B(P) and an image in the area including the area B(P) are scanned and detected by a photodetector 15 to thereby detect the displacement from the normal position of the semiconductor pellet 17. In this case, there occurs detected light amount difference due to the difference of the reflectivity between the predetermined pattern 17a on the pellet 17 and the area 17b excluding the pattern area to thereby obtain the detected displaced amount.
COPYRIGHT: (C)1980,JPO&Japio
JP10931078A 1978-09-06 1978-09-06 Displaced position detector Pending JPS5536730A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10931078A JPS5536730A (en) 1978-09-06 1978-09-06 Displaced position detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10931078A JPS5536730A (en) 1978-09-06 1978-09-06 Displaced position detector

Publications (1)

Publication Number Publication Date
JPS5536730A true JPS5536730A (en) 1980-03-14

Family

ID=14506952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10931078A Pending JPS5536730A (en) 1978-09-06 1978-09-06 Displaced position detector

Country Status (1)

Country Link
JP (1) JPS5536730A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6142924A (en) * 1984-08-06 1986-03-01 Toshiba Corp Positioning device
JPS6157869A (en) * 1984-08-29 1986-03-24 Keisoku Gijutsu Kenkyusho:Kk Inspecting device for printed wiring circuit
JPS62299701A (en) * 1986-06-20 1987-12-26 Matsushita Electric Works Ltd Inspecting method for outward appearance of package parts

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6142924A (en) * 1984-08-06 1986-03-01 Toshiba Corp Positioning device
JPS6157869A (en) * 1984-08-29 1986-03-24 Keisoku Gijutsu Kenkyusho:Kk Inspecting device for printed wiring circuit
JPS62299701A (en) * 1986-06-20 1987-12-26 Matsushita Electric Works Ltd Inspecting method for outward appearance of package parts

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