GB1441386A - Scanning apparatus - Google Patents

Scanning apparatus

Info

Publication number
GB1441386A
GB1441386A GB4080572A GB4080572A GB1441386A GB 1441386 A GB1441386 A GB 1441386A GB 4080572 A GB4080572 A GB 4080572A GB 4080572 A GB4080572 A GB 4080572A GB 1441386 A GB1441386 A GB 1441386A
Authority
GB
United Kingdom
Prior art keywords
scanning
optical component
cylindrical lens
movable optical
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4080572A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SIRA INSTITUTE
Original Assignee
SIRA INSTITUTE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SIRA INSTITUTE filed Critical SIRA INSTITUTE
Priority to GB4080572A priority Critical patent/GB1441386A/en
Priority to DE19732344743 priority patent/DE2344743A1/en
Publication of GB1441386A publication Critical patent/GB1441386A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

1441386 Optical scanning SIRA INSTITUTE 20 Aug 1973 [2 Sept 1972] 40805/72 Heading G2J Scanning apparatus for scanning a surface 9 e.g. to detect flaws comprises a movable optical component 6 arranged to deflect the radiation to a varying extent so as to cause it to scan across the surface 9 and an astigmatic focusing device 8 incorporated between the surface 9 and the movable optical component so that the movable optical component and the surface are at conjugate foci with respect to the focusing device 8 in one plane only. In one embodiment Fig. 1 a beam 2 from laser 1 passes through a cylindrical lens 3 and a spherical lens 4 before reflection at a plane mirror 5 and a polygonal mirror 6 rotated by a motor 7. The scanning beam passes through a further cylindrical lens 8 before reaching the surface 9 to be inspected and light passing through or reflected from the surface is detected e.g. by photo-cells. The cylindrical lens 8 may be replaced by a concave cylindrical mirror Fig. 5 (not shown).
GB4080572A 1972-09-02 1972-09-02 Scanning apparatus Expired GB1441386A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB4080572A GB1441386A (en) 1972-09-02 1972-09-02 Scanning apparatus
DE19732344743 DE2344743A1 (en) 1972-09-02 1973-08-31 SCANNING APPARATUS

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4080572A GB1441386A (en) 1972-09-02 1972-09-02 Scanning apparatus

Publications (1)

Publication Number Publication Date
GB1441386A true GB1441386A (en) 1976-06-30

Family

ID=10416706

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4080572A Expired GB1441386A (en) 1972-09-02 1972-09-02 Scanning apparatus

Country Status (2)

Country Link
DE (1) DE2344743A1 (en)
GB (1) GB1441386A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5216485A (en) * 1991-09-04 1993-06-01 International Business Machines Corporation Advanced via inspection tool (avit)
US5220617A (en) * 1991-09-04 1993-06-15 International Business Machines Corporation Method and apparatus for object inspection

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4323311A (en) * 1979-05-11 1982-04-06 Sira Institute Limited Apparatus and method for detecting holes in sheet material

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5216485A (en) * 1991-09-04 1993-06-01 International Business Machines Corporation Advanced via inspection tool (avit)
US5220617A (en) * 1991-09-04 1993-06-15 International Business Machines Corporation Method and apparatus for object inspection

Also Published As

Publication number Publication date
DE2344743A1 (en) 1974-04-04

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee