JPS57176017A - Spectral microscope device using optical fiber - Google Patents

Spectral microscope device using optical fiber

Info

Publication number
JPS57176017A
JPS57176017A JP6101881A JP6101881A JPS57176017A JP S57176017 A JPS57176017 A JP S57176017A JP 6101881 A JP6101881 A JP 6101881A JP 6101881 A JP6101881 A JP 6101881A JP S57176017 A JPS57176017 A JP S57176017A
Authority
JP
Japan
Prior art keywords
optical
fiber
axis
scanned
projection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6101881A
Other languages
Japanese (ja)
Other versions
JPH049284B2 (en
Inventor
Mutsuro Ogura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP6101881A priority Critical patent/JPS57176017A/en
Priority to US06/364,911 priority patent/US4500204A/en
Publication of JPS57176017A publication Critical patent/JPS57176017A/en
Publication of JPH049284B2 publication Critical patent/JPH049284B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/262—Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/06—Scanning arrangements arrangements for order-selection
    • G01J2003/064—Use of other elements for scan, e.g. mirror, fixed grating
    • G01J2003/065—Use of fibre scan for spectral scan

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Mechanical Optical Scanning Systems (AREA)

Abstract

PURPOSE:To simplify a mechanical scanning mechanism by irradiating a sample surface with a laser beam by using optical fibers for projection and condensation, and then scanning the beam. CONSTITUTION:A laser beam emitted from an optical fiber 1 for projection through the emission end 1a of the fiber tip passes through a polarizing lens 4 and is contracted and projected upon the surface of a sample 6 through an objective lens 5. Its reflected beam from the sample surface travels the same optical path in the opposite direction to enter a condensing fiber 2 from its incidence end 2a, and is guided to an unshown spectrometer. To obtain two- dimensional information, the fiber tip is scanned mannually or by a motor in an X-axis and an Y-axis direction around the optical neutral neutral line N of the objective lens 5 as an axis, thus focusing the beam. When this optical system is built in a spectral microscope 11, a stage 12 is scanned in an X-Y direction.
JP6101881A 1981-04-21 1981-04-22 Spectral microscope device using optical fiber Granted JPS57176017A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP6101881A JPS57176017A (en) 1981-04-22 1981-04-22 Spectral microscope device using optical fiber
US06/364,911 US4500204A (en) 1981-04-21 1982-04-02 Scanning-type lithographic and image-pickup device using optical fiber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6101881A JPS57176017A (en) 1981-04-22 1981-04-22 Spectral microscope device using optical fiber

Publications (2)

Publication Number Publication Date
JPS57176017A true JPS57176017A (en) 1982-10-29
JPH049284B2 JPH049284B2 (en) 1992-02-19

Family

ID=13159155

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6101881A Granted JPS57176017A (en) 1981-04-21 1981-04-22 Spectral microscope device using optical fiber

Country Status (1)

Country Link
JP (1) JPS57176017A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63115112U (en) * 1987-01-21 1988-07-25
JPH02171712A (en) * 1988-12-26 1990-07-03 Hamamatsu Photonics Kk Lighting equipment for scanning type optical microscope
JPH02188711A (en) * 1989-01-18 1990-07-24 Olympus Optical Co Ltd Laser optical device
JP2001091850A (en) * 1999-09-20 2001-04-06 Olympus Optical Co Ltd Scanning type laser microscope
JP2001117007A (en) * 1999-10-21 2001-04-27 Nikon Corp Laser microscope and confocal type laser scanning microscope

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63115112U (en) * 1987-01-21 1988-07-25
JPH02171712A (en) * 1988-12-26 1990-07-03 Hamamatsu Photonics Kk Lighting equipment for scanning type optical microscope
JPH02188711A (en) * 1989-01-18 1990-07-24 Olympus Optical Co Ltd Laser optical device
JP2001091850A (en) * 1999-09-20 2001-04-06 Olympus Optical Co Ltd Scanning type laser microscope
JP2001117007A (en) * 1999-10-21 2001-04-27 Nikon Corp Laser microscope and confocal type laser scanning microscope

Also Published As

Publication number Publication date
JPH049284B2 (en) 1992-02-19

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