JPS55124008A - Defect inspecting apparatus - Google Patents
Defect inspecting apparatusInfo
- Publication number
- JPS55124008A JPS55124008A JP3102179A JP3102179A JPS55124008A JP S55124008 A JPS55124008 A JP S55124008A JP 3102179 A JP3102179 A JP 3102179A JP 3102179 A JP3102179 A JP 3102179A JP S55124008 A JPS55124008 A JP S55124008A
- Authority
- JP
- Japan
- Prior art keywords
- light
- pinhole
- defects
- passing
- information
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
PURPOSE: To obtain the apparatus which is capable of detecting defects at a high speed and high reliability by passing the information light from the subject to a filter which is concentrically formed with a region for allowing the passage of the information light by defects and a region for blocking the same.
CONSTITUTION: Light from a coherent light source 21 which outputs nearly a single wavelength is converted to parallel light 24 by collimator systems 22, 23. This parallel light transmits through the subject 25 and forms Fourier-transformation images on the focal plane of a lens 27. Here, if the size is obtained from the Fourier- transformation spectrum distribution and a filter 28 such as of Fig. A having a white portion for allowing the passage of information light by defects is disposed on the focal plane, the light passing through this becomes the light mainly by the defect. This light evenly distributes on a pinhole 29. If the diameter of the pinhole is suitably determined, the light passing through the pinhole 29 becomes the information light almost by the defect. This may be detected as an electric signal.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3102179A JPS55124008A (en) | 1979-03-19 | 1979-03-19 | Defect inspecting apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3102179A JPS55124008A (en) | 1979-03-19 | 1979-03-19 | Defect inspecting apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55124008A true JPS55124008A (en) | 1980-09-24 |
Family
ID=12319858
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3102179A Pending JPS55124008A (en) | 1979-03-19 | 1979-03-19 | Defect inspecting apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55124008A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5766853U (en) * | 1980-10-08 | 1982-04-21 | ||
JPH01297542A (en) * | 1988-05-25 | 1989-11-30 | Csk Corp | Defect inspecting device |
CN114720553A (en) * | 2022-06-09 | 2022-07-08 | 西北大学 | Pipeline magnetic flux leakage detection device based on optical fiber coupling diamond-nitrogen vacancy color center |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49135581A (en) * | 1973-04-28 | 1974-12-27 |
-
1979
- 1979-03-19 JP JP3102179A patent/JPS55124008A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49135581A (en) * | 1973-04-28 | 1974-12-27 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5766853U (en) * | 1980-10-08 | 1982-04-21 | ||
JPS5923347Y2 (en) * | 1980-10-08 | 1984-07-11 | 久次 沼田 | X-ray tube that obtains non-magnified X-ray images |
JPH01297542A (en) * | 1988-05-25 | 1989-11-30 | Csk Corp | Defect inspecting device |
CN114720553A (en) * | 2022-06-09 | 2022-07-08 | 西北大学 | Pipeline magnetic flux leakage detection device based on optical fiber coupling diamond-nitrogen vacancy color center |
CN114720553B (en) * | 2022-06-09 | 2022-09-02 | 西北大学 | Pipeline magnetic flux leakage detection device based on optical fiber coupling diamond-nitrogen vacancy color center |
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