JPS55124008A - Defect inspecting apparatus - Google Patents

Defect inspecting apparatus

Info

Publication number
JPS55124008A
JPS55124008A JP3102179A JP3102179A JPS55124008A JP S55124008 A JPS55124008 A JP S55124008A JP 3102179 A JP3102179 A JP 3102179A JP 3102179 A JP3102179 A JP 3102179A JP S55124008 A JPS55124008 A JP S55124008A
Authority
JP
Japan
Prior art keywords
light
pinhole
defects
passing
information
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3102179A
Other languages
Japanese (ja)
Inventor
Akito Iwamoto
Hidekazu Sekizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3102179A priority Critical patent/JPS55124008A/en
Publication of JPS55124008A publication Critical patent/JPS55124008A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE: To obtain the apparatus which is capable of detecting defects at a high speed and high reliability by passing the information light from the subject to a filter which is concentrically formed with a region for allowing the passage of the information light by defects and a region for blocking the same.
CONSTITUTION: Light from a coherent light source 21 which outputs nearly a single wavelength is converted to parallel light 24 by collimator systems 22, 23. This parallel light transmits through the subject 25 and forms Fourier-transformation images on the focal plane of a lens 27. Here, if the size is obtained from the Fourier- transformation spectrum distribution and a filter 28 such as of Fig. A having a white portion for allowing the passage of information light by defects is disposed on the focal plane, the light passing through this becomes the light mainly by the defect. This light evenly distributes on a pinhole 29. If the diameter of the pinhole is suitably determined, the light passing through the pinhole 29 becomes the information light almost by the defect. This may be detected as an electric signal.
COPYRIGHT: (C)1980,JPO&Japio
JP3102179A 1979-03-19 1979-03-19 Defect inspecting apparatus Pending JPS55124008A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3102179A JPS55124008A (en) 1979-03-19 1979-03-19 Defect inspecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3102179A JPS55124008A (en) 1979-03-19 1979-03-19 Defect inspecting apparatus

Publications (1)

Publication Number Publication Date
JPS55124008A true JPS55124008A (en) 1980-09-24

Family

ID=12319858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3102179A Pending JPS55124008A (en) 1979-03-19 1979-03-19 Defect inspecting apparatus

Country Status (1)

Country Link
JP (1) JPS55124008A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5766853U (en) * 1980-10-08 1982-04-21
JPH01297542A (en) * 1988-05-25 1989-11-30 Csk Corp Defect inspecting device
CN114720553A (en) * 2022-06-09 2022-07-08 西北大学 Pipeline magnetic flux leakage detection device based on optical fiber coupling diamond-nitrogen vacancy color center

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49135581A (en) * 1973-04-28 1974-12-27

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49135581A (en) * 1973-04-28 1974-12-27

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5766853U (en) * 1980-10-08 1982-04-21
JPS5923347Y2 (en) * 1980-10-08 1984-07-11 久次 沼田 X-ray tube that obtains non-magnified X-ray images
JPH01297542A (en) * 1988-05-25 1989-11-30 Csk Corp Defect inspecting device
CN114720553A (en) * 2022-06-09 2022-07-08 西北大学 Pipeline magnetic flux leakage detection device based on optical fiber coupling diamond-nitrogen vacancy color center
CN114720553B (en) * 2022-06-09 2022-09-02 西北大学 Pipeline magnetic flux leakage detection device based on optical fiber coupling diamond-nitrogen vacancy color center

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