JPS564004A - System for detecting minute defects of body - Google Patents

System for detecting minute defects of body

Info

Publication number
JPS564004A
JPS564004A JP8002879A JP8002879A JPS564004A JP S564004 A JPS564004 A JP S564004A JP 8002879 A JP8002879 A JP 8002879A JP 8002879 A JP8002879 A JP 8002879A JP S564004 A JPS564004 A JP S564004A
Authority
JP
Japan
Prior art keywords
detected
minute defects
spot light
circuit
electrical signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8002879A
Other languages
Japanese (ja)
Inventor
Hitoshi Kobayashi
Eiji Sawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP8002879A priority Critical patent/JPS564004A/en
Publication of JPS564004A publication Critical patent/JPS564004A/en
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To detect minute defects of a body with high accuracy by irradiating small spot light to a body to be detected.
CONSTITUTION: A light ray from a luminous source 2 is irradiated onto a body 1 to be detected (the case of using a glass tube as a body to be detected is shown) as small spot light through a spot plate 3 and an optical filter 4. A transmitted image or a reflected image of the body 1 to be detected, formed by spot light, and converted into electrical signal information through a photoelectrical converting element array 5. The minute defects of the body 1 to be detected are detected from the electrical signal by signal processing means such as a video circuit 6, a sample holding circuit 7, a comparison circuit 8, a control circuit 9 and the like.
COPYRIGHT: (C)1981,JPO&Japio
JP8002879A 1979-06-25 1979-06-25 System for detecting minute defects of body Pending JPS564004A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8002879A JPS564004A (en) 1979-06-25 1979-06-25 System for detecting minute defects of body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8002879A JPS564004A (en) 1979-06-25 1979-06-25 System for detecting minute defects of body

Publications (1)

Publication Number Publication Date
JPS564004A true JPS564004A (en) 1981-01-16

Family

ID=13706815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8002879A Pending JPS564004A (en) 1979-06-25 1979-06-25 System for detecting minute defects of body

Country Status (1)

Country Link
JP (1) JPS564004A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57132042A (en) * 1981-02-09 1982-08-16 Fuji Electric Co Ltd Inspecting method of defect on surface of article
JPS60253856A (en) * 1984-05-30 1985-12-14 Fujitsu Ltd Method for monitoring contamination of furnance core tube
JPH02150554U (en) * 1989-05-23 1990-12-26
CN102175690A (en) * 2011-01-24 2011-09-07 宁波大学 Detection device for detecting macro-defects in infrared glass
CN102323275A (en) * 2011-08-10 2012-01-18 宁波大学 Imaging detection device of infrared chalcogenide glass internal macroscopic defect

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57132042A (en) * 1981-02-09 1982-08-16 Fuji Electric Co Ltd Inspecting method of defect on surface of article
JPS60253856A (en) * 1984-05-30 1985-12-14 Fujitsu Ltd Method for monitoring contamination of furnance core tube
JPH02150554U (en) * 1989-05-23 1990-12-26
CN102175690A (en) * 2011-01-24 2011-09-07 宁波大学 Detection device for detecting macro-defects in infrared glass
CN102323275A (en) * 2011-08-10 2012-01-18 宁波大学 Imaging detection device of infrared chalcogenide glass internal macroscopic defect

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