JPS57132042A - Inspecting method of defect on surface of article - Google Patents

Inspecting method of defect on surface of article

Info

Publication number
JPS57132042A
JPS57132042A JP1694681A JP1694681A JPS57132042A JP S57132042 A JPS57132042 A JP S57132042A JP 1694681 A JP1694681 A JP 1694681A JP 1694681 A JP1694681 A JP 1694681A JP S57132042 A JPS57132042 A JP S57132042A
Authority
JP
Japan
Prior art keywords
defect
inspected
light source
box
unevenness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1694681A
Other languages
Japanese (ja)
Inventor
Hirohisa Takusagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Fuji Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd, Fuji Electric Manufacturing Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP1694681A priority Critical patent/JPS57132042A/en
Publication of JPS57132042A publication Critical patent/JPS57132042A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To ensure the correct detection for a defect to be inspected, by irradiating the scattered beams on a surface to be inspected from an even light source and adjusting the solid angle looking at the light source from the surface to be inspected in accordance with the type of the defect to be detected on the surface to be inspected. CONSTITUTION:A proper light source such as an incandescent electric lamp or a fluorescent lamp is arranged in an illumination box 1, and a wall surface having the light scattering function is provided to the inner surface of the box 1. Then plural light shielding plates 2 having different aperture areas are provided in order to vary the aperture area of the plate 2 in the box 1. A solid angle alpha can be easily adjusted by exchanging the plates 2, and accordingly the critical level can be independently set to recognize the unevenness as a defect. As a result, a special defect can be detected in accordance with its degree in case both the normal and defective areas have some unevenness or soil.
JP1694681A 1981-02-09 1981-02-09 Inspecting method of defect on surface of article Pending JPS57132042A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1694681A JPS57132042A (en) 1981-02-09 1981-02-09 Inspecting method of defect on surface of article

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1694681A JPS57132042A (en) 1981-02-09 1981-02-09 Inspecting method of defect on surface of article

Publications (1)

Publication Number Publication Date
JPS57132042A true JPS57132042A (en) 1982-08-16

Family

ID=11930292

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1694681A Pending JPS57132042A (en) 1981-02-09 1981-02-09 Inspecting method of defect on surface of article

Country Status (1)

Country Link
JP (1) JPS57132042A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05232044A (en) * 1991-11-22 1993-09-07 Elkem Technol As Method for detecting pinhole of continuously cast metal billet
JP2012168171A (en) * 2011-01-27 2012-09-06 V Technology Co Ltd Pattern inspection device and illumination optical system used for the same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS431839Y1 (en) * 1964-01-24 1968-01-26
JPS5285876A (en) * 1976-01-05 1977-07-16 Atlantic Res Corp Method and device for detecting defects of smooth surface
JPS564004A (en) * 1979-06-25 1981-01-16 Toshiba Corp System for detecting minute defects of body

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS431839Y1 (en) * 1964-01-24 1968-01-26
JPS5285876A (en) * 1976-01-05 1977-07-16 Atlantic Res Corp Method and device for detecting defects of smooth surface
JPS564004A (en) * 1979-06-25 1981-01-16 Toshiba Corp System for detecting minute defects of body

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05232044A (en) * 1991-11-22 1993-09-07 Elkem Technol As Method for detecting pinhole of continuously cast metal billet
JP2012168171A (en) * 2011-01-27 2012-09-06 V Technology Co Ltd Pattern inspection device and illumination optical system used for the same

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