KR910010179A - Hairline fine defect detection device - Google Patents

Hairline fine defect detection device Download PDF

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Publication number
KR910010179A
KR910010179A KR1019900018174A KR900018174A KR910010179A KR 910010179 A KR910010179 A KR 910010179A KR 1019900018174 A KR1019900018174 A KR 1019900018174A KR 900018174 A KR900018174 A KR 900018174A KR 910010179 A KR910010179 A KR 910010179A
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KR
South Korea
Prior art keywords
measured
detecting
image
hairline
scattered light
Prior art date
Application number
KR1019900018174A
Other languages
Korean (ko)
Other versions
KR940002504B1 (en
Inventor
코오헤이 카도
마사히로 나카죠
Original Assignee
다니이 아끼오
마쯔시다덴기산교 가부시기가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of KR910010179A publication Critical patent/KR910010179A/en
Application granted granted Critical
Publication of KR940002504B1 publication Critical patent/KR940002504B1/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light

Abstract

내용 없음.No content.

Description

가는선의 미세결함 검출장치Hairline fine defect detection device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제1도는 본 발명의 제1의 실시예에 있어서의 가는선의 미세결함 검출장치의 모식도,1 is a schematic diagram of a device for detecting fine defects of fine lines in a first embodiment of the present invention,

제2도는 본 발명의 제2의 실시예에 있어서의 가는선의 미세결함 검출장치의 모식도,2 is a schematic diagram of a device for detecting fine defects of fine lines in a second embodiment of the present invention;

Claims (2)

피측정물에 단파장의 레이저광을 조사하므로서 형성되는 화상의 푸우리에 변화된 패턴을 텔레비젼카메라로 관측하는 장치에 있어서, 피측정물은 가는선이고, 상기 피측정물에 대하여 피측정물의 긴쪽방향으로 평면형상으로 퍼지고 두께가 피측정물의 두께보다 큰광속을 형성하는 원기둥렌즈군과, 상기 피측정물을 통과한 산란광 이외의 레이저광을 차광하는 차광판과, 산란광에 의한 화상의 푸우리에 변화된 패턴의 흐트러짐을 축소검출하는 광학계 및 화상인식장치를 구비한 것을 특징으로하는 가는선의 미세결함 검출장치.In the apparatus for observing a pattern changed in the purge of an image formed by irradiating a laser beam of short wavelength to the object under measurement, the object to be measured is a thin line, and in the longitudinal direction of the object to the object to be measured. A cylindrical lens group that spreads in a planar shape and forms a luminous flux having a thickness greater than that of the object to be measured, a light shielding plate that shields laser light other than scattered light that has passed through the object, and a pattern changed in the pui of the image by the scattered light. An apparatus for detecting fine defects in thin lines, comprising: an optical system and an image recognition device for reducing and detecting disturbances. 제1항에 있어서, 피측정물에 대하여 2방향으로부터 피측정물의 긴쪽방향으로 평면형상으로 퍼지고 두께가 피측정레이저광을 조사하는 수단과, 각각의 산란광에 의한 화상의 푸우리에 변화된 패턴을 검출하는 수단을 가진 것을 특징으로하는 가는선의 미세결함 검출장치.2. The apparatus of claim 1, further comprising: means for irradiating a laser beam to be measured and spreading in a planar shape from two directions to an object to be measured in a longitudinal direction, and detecting a pattern changed in the pui of the image by each scattered light; Apparatus for detecting fine defects of hairline, characterized in that it has a means to. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019900018174A 1989-11-10 1990-11-10 Detecting device for extremely small defect of thin wire KR940002504B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1293556A JPH0781963B2 (en) 1989-11-10 1989-11-10 Fine wire fine defect detection device
JP1-293556 1989-11-10

Publications (2)

Publication Number Publication Date
KR910010179A true KR910010179A (en) 1991-06-29
KR940002504B1 KR940002504B1 (en) 1994-03-25

Family

ID=17796277

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900018174A KR940002504B1 (en) 1989-11-10 1990-11-10 Detecting device for extremely small defect of thin wire

Country Status (2)

Country Link
JP (1) JPH0781963B2 (en)
KR (1) KR940002504B1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2084819A1 (en) * 1992-01-27 1993-07-28 Ralph Edourd Frazee Jr. In-pattern on-line coating defect detection system
CA2088081A1 (en) * 1992-02-13 1993-08-14 Ralph Edward Frazee Jr. Out-of-pattern coating defect detection system
KR101288528B1 (en) * 2011-07-25 2013-07-26 디케이아즈텍 주식회사 Inspect Analyzer for detecting defect in cylinder shape crystal

Also Published As

Publication number Publication date
JPH0781963B2 (en) 1995-09-06
KR940002504B1 (en) 1994-03-25
JPH03154854A (en) 1991-07-02

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