JPS57113311A - Measuring device for surface coarseness of object - Google Patents

Measuring device for surface coarseness of object

Info

Publication number
JPS57113311A
JPS57113311A JP18857380A JP18857380A JPS57113311A JP S57113311 A JPS57113311 A JP S57113311A JP 18857380 A JP18857380 A JP 18857380A JP 18857380 A JP18857380 A JP 18857380A JP S57113311 A JPS57113311 A JP S57113311A
Authority
JP
Japan
Prior art keywords
light
irradiated
photographer
convexity
concavity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18857380A
Other languages
Japanese (ja)
Other versions
JPS6248163B2 (en
Inventor
Masayuki Nakagawa
Shinji Okamoto
Satoshi Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP18857380A priority Critical patent/JPS57113311A/en
Publication of JPS57113311A publication Critical patent/JPS57113311A/en
Publication of JPS6248163B2 publication Critical patent/JPS6248163B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To reliably measure height and position of concavity and convexity on a surface of an object, by a method wherein light from a cylindrical convex lens is reflected by a half-mirror to irradiated the object surface with the reflection light, and a light picture is detected by a scanning photographer. CONSTITUTION:Parallel light irradiated from an approximately rectangular surface light source 1 is converted into a focusing light by means of a cylindrical convex lens 2, and a surface 5 of an object 4 is irradiated with the focusing light through a half-mirror 3. An approximately rectangular light picture focused on the surface 5 of the object 4 is photographed by a scanning system photographer 7. The degree of fuzz of the light picture formed on the surface 5 of the object 4 is measured, and this permits the automatic measurement and evaluation of the concavity and convexity on the object surface 5.
JP18857380A 1980-12-29 1980-12-29 Measuring device for surface coarseness of object Granted JPS57113311A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18857380A JPS57113311A (en) 1980-12-29 1980-12-29 Measuring device for surface coarseness of object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18857380A JPS57113311A (en) 1980-12-29 1980-12-29 Measuring device for surface coarseness of object

Publications (2)

Publication Number Publication Date
JPS57113311A true JPS57113311A (en) 1982-07-14
JPS6248163B2 JPS6248163B2 (en) 1987-10-13

Family

ID=16226042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18857380A Granted JPS57113311A (en) 1980-12-29 1980-12-29 Measuring device for surface coarseness of object

Country Status (1)

Country Link
JP (1) JPS57113311A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4694688A (en) * 1985-02-08 1987-09-22 Hitachi, Ltd. Crank angle sensor
JPH01502849A (en) * 1987-03-24 1989-09-28 コモンウェルス・サイエンティフィック・アンド・インダストリアル・リサーチ・オーガニゼイション distance measuring device
JP2008282689A (en) * 2007-05-11 2008-11-20 Iwasaki Electric Co Ltd Luminaire

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56133602A (en) * 1980-03-24 1981-10-19 Ritsuo Hasumi Noncontacting optical roughness gauge

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56133602A (en) * 1980-03-24 1981-10-19 Ritsuo Hasumi Noncontacting optical roughness gauge

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4694688A (en) * 1985-02-08 1987-09-22 Hitachi, Ltd. Crank angle sensor
JPH01502849A (en) * 1987-03-24 1989-09-28 コモンウェルス・サイエンティフィック・アンド・インダストリアル・リサーチ・オーガニゼイション distance measuring device
JP2008282689A (en) * 2007-05-11 2008-11-20 Iwasaki Electric Co Ltd Luminaire

Also Published As

Publication number Publication date
JPS6248163B2 (en) 1987-10-13

Similar Documents

Publication Publication Date Title
JPS54126023A (en) Optical device
DE69312403T2 (en) Measurement of the wall thickness of a transparent container
DE3879224D1 (en) DEVICE FOR OPTICALLY SCANNING THE SURFACE OF AN OBJECT.
KR930010527A (en) Surface condition inspection method using irradiation and its device
JPS5780546A (en) Detecting device for foreign substance
DE3270640D1 (en) Off-axis light beam defect detector
JPS54128682A (en) Automatic detector for foreign matters
UST102104I4 (en) Scanning optical system adapted for linewidth measurement in semiconductor devices
JPS57113311A (en) Measuring device for surface coarseness of object
JPS56142404A (en) System for measuring plate width
JPS57212406A (en) Method and device for focusing
JPS5760243A (en) Measuring apparatus for fresnel lens
JPS5616806A (en) Surface roughness measuring unit
JPS57179704A (en) Method and device for measuring length
JPS5726704A (en) Measuring instrument for three-dimensional shape
JPS5720603A (en) Detector for plate width using laser
JPS54136888A (en) Surface defect detecting device
JPS57148233A (en) Testing method and device for hardness
JPS5752807A (en) Device for measuring film thickness
JPS57182604A (en) Interference measuring device
JPS57187605A (en) Measuring device for optical movement distance
JPS57190246A (en) Detector for lens defect
JPS5530627A (en) Wire diameter meter
JPS56125605A (en) Method and apparatus for detection of shape of striplike body
Clarke The use of self scanned arrays in the glass industry