JPS5780546A - Detecting device for foreign substance - Google Patents

Detecting device for foreign substance

Info

Publication number
JPS5780546A
JPS5780546A JP15657680A JP15657680A JPS5780546A JP S5780546 A JPS5780546 A JP S5780546A JP 15657680 A JP15657680 A JP 15657680A JP 15657680 A JP15657680 A JP 15657680A JP S5780546 A JPS5780546 A JP S5780546A
Authority
JP
Japan
Prior art keywords
beltlike
approximately
irradiation parts
foreign substance
cost
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15657680A
Other languages
Japanese (ja)
Other versions
JPS6352696B2 (en
Inventor
Shoichi Tanimoto
Kazunori Imamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to JP15657680A priority Critical patent/JPS5780546A/en
Publication of JPS5780546A publication Critical patent/JPS5780546A/en
Publication of JPS6352696B2 publication Critical patent/JPS6352696B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N21/8903—Optical details; Scanning details using a multiple detector array

Abstract

PURPOSE:To simplify and compact a device and to reduce a cost, by a method wherein a device is constituted such that images of beltlike irradiation parts are formed on a primary photo array by irradiating with light beam, converged approximately parallelling a surface of an object to be measured, so that the light beam approximately parllels the surface. CONSTITUTION:A laser light 2 is led onto a surface 1 through a cylindrical lens 7 and a mirror 8. The laser light 2 enters approximately in parallel to the surface 1 to form beltlike irradiation parts 9-11. The image of the beltlike irradiation parts 9-11 are formed on a primary photo array 13 by an imge-forming lens 12 estimating at a low angle theta to the surface 1. An output of a photoelectric converting element 14, in which an irregular reflection light 4' from a foreign on the surface 1 is collected increases, and the position of the foreign substance 3 is detected. A total surface is inspected through te movement of the surface 1 in a direction of an arrow mark 15. This simplifies and compacts a device and reduces a cost.
JP15657680A 1980-11-07 1980-11-07 Detecting device for foreign substance Granted JPS5780546A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15657680A JPS5780546A (en) 1980-11-07 1980-11-07 Detecting device for foreign substance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15657680A JPS5780546A (en) 1980-11-07 1980-11-07 Detecting device for foreign substance

Publications (2)

Publication Number Publication Date
JPS5780546A true JPS5780546A (en) 1982-05-20
JPS6352696B2 JPS6352696B2 (en) 1988-10-19

Family

ID=15630775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15657680A Granted JPS5780546A (en) 1980-11-07 1980-11-07 Detecting device for foreign substance

Country Status (1)

Country Link
JP (1) JPS5780546A (en)

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57128834A (en) * 1981-02-04 1982-08-10 Nippon Kogaku Kk <Nikon> Inspecting apparatus of foreign substance
JPS5982727A (en) * 1982-11-04 1984-05-12 Hitachi Ltd Method and apparatus for detecting foreign matter
JPS59152626A (en) * 1983-02-21 1984-08-31 Hitachi Ltd Device for detecting foreign matter
JPS59152625A (en) * 1983-02-21 1984-08-31 Hitachi Ltd Device for detecting foreign matter
JPS6046558A (en) * 1983-08-25 1985-03-13 Hitachi Ltd Exposing device
JPS61104244A (en) * 1984-10-29 1986-05-22 Hitachi Ltd Apparatus for detecting foreign matter of semiconductive wafer
JPS61104242A (en) * 1984-10-29 1986-05-22 Hitachi Ltd Apparatus for inspecting foreign matter
JPS61117433A (en) * 1984-11-14 1986-06-04 Hitachi Ltd Method and device for detecting foreign matter
JPS62180758U (en) * 1986-05-08 1987-11-17
JPS63154948A (en) * 1986-12-18 1988-06-28 Fujitsu Ltd Dust detection
JPS63204140A (en) * 1986-10-23 1988-08-23 インスペックス・インコーポレーテッド Method and device for detecting particle
JPS63285449A (en) * 1987-05-18 1988-11-22 Nikon Corp Foreign matter inspecting device
JPH04143640A (en) * 1990-07-27 1992-05-18 Hitachi Ltd Apparatus for inspecting foreign matter
US5410400A (en) * 1991-06-26 1995-04-25 Hitachi, Ltd. Foreign particle inspection apparatus
JP2007040972A (en) * 2005-06-30 2007-02-15 Sunx Ltd Foreign material detector
JP2008032654A (en) * 2006-07-31 2008-02-14 Sunx Ltd Foreign material detector
JP2008032649A (en) * 2006-07-31 2008-02-14 Sunx Ltd Microcontamination detector
WO2019167129A1 (en) * 2018-02-27 2019-09-06 株式会社日立ハイテクノロジーズ Defect detection device, defect detection method, and defect observation device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS498292A (en) * 1972-05-10 1974-01-24
JPS54101390A (en) * 1978-01-27 1979-08-09 Hitachi Ltd Foreign matter inspector
JPS5594145A (en) * 1979-01-12 1980-07-17 Hitachi Ltd Method of and device for inspecting surface of article
JPS55107942A (en) * 1979-02-13 1980-08-19 Matsushita Electric Works Ltd Inspecting method of plate

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS498292A (en) * 1972-05-10 1974-01-24
JPS54101390A (en) * 1978-01-27 1979-08-09 Hitachi Ltd Foreign matter inspector
JPS5594145A (en) * 1979-01-12 1980-07-17 Hitachi Ltd Method of and device for inspecting surface of article
JPS55107942A (en) * 1979-02-13 1980-08-19 Matsushita Electric Works Ltd Inspecting method of plate

Cited By (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6364738B2 (en) * 1981-02-04 1988-12-13
JPS57128834A (en) * 1981-02-04 1982-08-10 Nippon Kogaku Kk <Nikon> Inspecting apparatus of foreign substance
JPS5982727A (en) * 1982-11-04 1984-05-12 Hitachi Ltd Method and apparatus for detecting foreign matter
JPS6365904B2 (en) * 1982-11-04 1988-12-19 Hitachi Ltd
JPS59152626A (en) * 1983-02-21 1984-08-31 Hitachi Ltd Device for detecting foreign matter
JPS59152625A (en) * 1983-02-21 1984-08-31 Hitachi Ltd Device for detecting foreign matter
JPH0334577B2 (en) * 1983-02-21 1991-05-23 Hitachi Ltd
JPH0334576B2 (en) * 1983-02-21 1991-05-23 Hitachi Ltd
JPS6046558A (en) * 1983-08-25 1985-03-13 Hitachi Ltd Exposing device
JPH0563931B2 (en) * 1983-08-25 1993-09-13 Hitachi Ltd
JPS61104244A (en) * 1984-10-29 1986-05-22 Hitachi Ltd Apparatus for detecting foreign matter of semiconductive wafer
JPS61104242A (en) * 1984-10-29 1986-05-22 Hitachi Ltd Apparatus for inspecting foreign matter
JPS61117433A (en) * 1984-11-14 1986-06-04 Hitachi Ltd Method and device for detecting foreign matter
JPS62180758U (en) * 1986-05-08 1987-11-17
JPS63204140A (en) * 1986-10-23 1988-08-23 インスペックス・インコーポレーテッド Method and device for detecting particle
JPS63154948A (en) * 1986-12-18 1988-06-28 Fujitsu Ltd Dust detection
JPS63285449A (en) * 1987-05-18 1988-11-22 Nikon Corp Foreign matter inspecting device
JPH04143640A (en) * 1990-07-27 1992-05-18 Hitachi Ltd Apparatus for inspecting foreign matter
US5410400A (en) * 1991-06-26 1995-04-25 Hitachi, Ltd. Foreign particle inspection apparatus
JP2007040972A (en) * 2005-06-30 2007-02-15 Sunx Ltd Foreign material detector
JP4700554B2 (en) * 2005-06-30 2011-06-15 パナソニック電工Ｓｕｎｘ株式会社 Foreign object detection device
JP2008032654A (en) * 2006-07-31 2008-02-14 Sunx Ltd Foreign material detector
JP2008032649A (en) * 2006-07-31 2008-02-14 Sunx Ltd Microcontamination detector
JP4648880B2 (en) * 2006-07-31 2011-03-09 パナソニック電工Ｓｕｎｘ株式会社 Foreign object detection device
JP4700574B2 (en) * 2006-07-31 2011-06-15 パナソニック電工Ｓｕｎｘ株式会社 Foreign object detection device
WO2019167129A1 (en) * 2018-02-27 2019-09-06 株式会社日立ハイテクノロジーズ Defect detection device, defect detection method, and defect observation device
JPWO2019167129A1 (en) * 2018-02-27 2020-12-17 株式会社日立ハイテク Defect detection device, defect detection method and defect observation device
US11802841B2 (en) 2018-02-27 2023-10-31 Hitachi High-Tech Corporation Defect detection device, defect detection method, and defect observation device

Also Published As

Publication number Publication date
JPS6352696B2 (en) 1988-10-19

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