JPS5726704A - Measuring instrument for three-dimensional shape - Google Patents

Measuring instrument for three-dimensional shape

Info

Publication number
JPS5726704A
JPS5726704A JP10128180A JP10128180A JPS5726704A JP S5726704 A JPS5726704 A JP S5726704A JP 10128180 A JP10128180 A JP 10128180A JP 10128180 A JP10128180 A JP 10128180A JP S5726704 A JPS5726704 A JP S5726704A
Authority
JP
Japan
Prior art keywords
opening part
light
optical system
dimensional shape
coincides
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10128180A
Other languages
Japanese (ja)
Other versions
JPS6246802B2 (en
Inventor
Yoshisada Oshida
Yoichi Kawada
Shinobu Watanabe
Noboru Umehara
Kenichi Isoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10128180A priority Critical patent/JPS5726704A/en
Priority to US06/286,512 priority patent/US4473750A/en
Publication of JPS5726704A publication Critical patent/JPS5726704A/en
Publication of JPS6246802B2 publication Critical patent/JPS6246802B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)

Abstract

PURPOSE:To measure a three-dimensional shape with high precision by putting it to use that the quantity of light passing through an opening part by way of an image pickup system is maximum when the minimum stop-down position of a irradiation system coincides with an object surface during the irradiation of the object surface with the condensing irradiation system. CONSTITUTION:A body is irradiated with light from a condensing irradiation system having a minimum stop-down diameter at one point A on the optical axis, and through an image pickup optical system placed in a different direction, its image is formed on the opening part on a detection light-shielding plate. When the position relation between the whole optical system and body is varied, the point in time when the point coincides with the body surface is detected clearly by putting it to use that the quantity of light passing through the opening part is maximum. For example, a body surface is irradiated with light from a laser light source 1 through a condenser lens system 20 and its image is formed at the position of an opening part 5 through an image pickup optical system 4. In this case, if the body is at a position 7, it coincides with the minimum stop-down diameter position of the condenser system and the signal intensity of a detector 6 is maximized. Therefore an optical system (A') and body are moved relatively and their positions are determined to measure a three-dimensional shape.
JP10128180A 1980-07-25 1980-07-25 Measuring instrument for three-dimensional shape Granted JPS5726704A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10128180A JPS5726704A (en) 1980-07-25 1980-07-25 Measuring instrument for three-dimensional shape
US06/286,512 US4473750A (en) 1980-07-25 1981-07-24 Three-dimensional shape measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10128180A JPS5726704A (en) 1980-07-25 1980-07-25 Measuring instrument for three-dimensional shape

Publications (2)

Publication Number Publication Date
JPS5726704A true JPS5726704A (en) 1982-02-12
JPS6246802B2 JPS6246802B2 (en) 1987-10-05

Family

ID=14296475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10128180A Granted JPS5726704A (en) 1980-07-25 1980-07-25 Measuring instrument for three-dimensional shape

Country Status (1)

Country Link
JP (1) JPS5726704A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58142210A (en) * 1982-02-18 1983-08-24 Hitachi Ltd Device for measuring configuration of solid having three dimensional curved surface
JPH02129942A (en) * 1988-10-11 1990-05-18 Kla Instr Corp Method and device for automatically analyzing three-dimensional body

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01156253U (en) * 1988-04-13 1989-10-26
JPH0384402U (en) * 1989-12-19 1991-08-27
JP4050644B2 (en) * 2003-03-27 2008-02-20 株式会社日本製鋼所 Inline screw plasticizing injection device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58142210A (en) * 1982-02-18 1983-08-24 Hitachi Ltd Device for measuring configuration of solid having three dimensional curved surface
JPH0156681B2 (en) * 1982-02-18 1989-12-01 Hitachi Ltd
JPH02129942A (en) * 1988-10-11 1990-05-18 Kla Instr Corp Method and device for automatically analyzing three-dimensional body

Also Published As

Publication number Publication date
JPS6246802B2 (en) 1987-10-05

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