JPS5726705A - Measuring instrument for three-dimensional shape - Google Patents

Measuring instrument for three-dimensional shape

Info

Publication number
JPS5726705A
JPS5726705A JP10128280A JP10128280A JPS5726705A JP S5726705 A JPS5726705 A JP S5726705A JP 10128280 A JP10128280 A JP 10128280A JP 10128280 A JP10128280 A JP 10128280A JP S5726705 A JPS5726705 A JP S5726705A
Authority
JP
Japan
Prior art keywords
point
mirrors
detection surface
laser beam
detected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10128280A
Other languages
Japanese (ja)
Other versions
JPH0136041B2 (en
Inventor
Yoshisada Oshida
Kenichi Isoda
Yoichi Kawada
Shinobu Watanabe
Noboru Umehara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10128280A priority Critical patent/JPS5726705A/en
Priority to US06/286,512 priority patent/US4473750A/en
Publication of JPS5726705A publication Critical patent/JPS5726705A/en
Publication of JPH0136041B2 publication Critical patent/JPH0136041B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To realize a contactless three-dimensional shape measuring instrument having less driving parts, by equipping both a laser beam irradiation system and an image pickup optical system with movable mirrors, respectively. CONSTITUTION:To form an image which is at one point A on the axis of an irradiation optical system emitting a laser beam to a body to be measured, at a constant point B on a position detection surface by using an image pickup optical system, both the optical systems are each equipped with a movable mirror. The moment when the surface of the body coincides with the point A is detected on the position detection surface by adjusting the movable mirrors and the space position of the body is also detected from the positions of the movable mirrors at this time. For example, a laser beam from a light source 1 has a minimum stop-down diameter at the point A through a projection lens 20, and mirrors 81, 31 and 82, and an image pickup system consisting of mirrors 32 and 83, a lens 4, etc., forms the image at the point A on the position detection surface 5. The coincidence state between the position A adjusted by a mirror table 301 and the body surface is discriminated on the detection surface 5, and from the position of the mirror table, the space position of the body is detected.
JP10128280A 1980-07-25 1980-07-25 Measuring instrument for three-dimensional shape Granted JPS5726705A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10128280A JPS5726705A (en) 1980-07-25 1980-07-25 Measuring instrument for three-dimensional shape
US06/286,512 US4473750A (en) 1980-07-25 1981-07-24 Three-dimensional shape measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10128280A JPS5726705A (en) 1980-07-25 1980-07-25 Measuring instrument for three-dimensional shape

Publications (2)

Publication Number Publication Date
JPS5726705A true JPS5726705A (en) 1982-02-12
JPH0136041B2 JPH0136041B2 (en) 1989-07-28

Family

ID=14296498

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10128280A Granted JPS5726705A (en) 1980-07-25 1980-07-25 Measuring instrument for three-dimensional shape

Country Status (1)

Country Link
JP (1) JPS5726705A (en)

Also Published As

Publication number Publication date
JPH0136041B2 (en) 1989-07-28

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