JPS55119006A - Displacement measuring instrument - Google Patents

Displacement measuring instrument

Info

Publication number
JPS55119006A
JPS55119006A JP2679879A JP2679879A JPS55119006A JP S55119006 A JPS55119006 A JP S55119006A JP 2679879 A JP2679879 A JP 2679879A JP 2679879 A JP2679879 A JP 2679879A JP S55119006 A JPS55119006 A JP S55119006A
Authority
JP
Japan
Prior art keywords
light
spot image
measured
receiver
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2679879A
Other languages
Japanese (ja)
Other versions
JPS59762B2 (en
Inventor
Toshio Ichikawa
Shuji Naito
Akinobu Ogasawara
Hitoshi Takabayashi
Original Assignee
Anritsu Corp
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp, Nippon Steel Corp filed Critical Anritsu Corp
Priority to JP2679879A priority Critical patent/JPS59762B2/ja
Publication of JPS55119006A publication Critical patent/JPS55119006A/en
Publication of JPS59762B2 publication Critical patent/JPS59762B2/ja
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To make the displacement of a measured body proportional to the change in an output, by placing the light reception face of a position detector so that the face coincides with the loci of a light spot image on the measured body, which take place when the body is displaced.
CONSTITUTION: A light beam from a light source 1 is converged into a thin irradiated light beam 3 by an irradiation lens 2. The thin beam is projected to a measured body 4 in parallel with its displacement to be measured. Reflected light 3' from the body 4 is received by a condensing lens 5 in a direction different from that of proceeding of the beam 3 to form a light spot image on a light receiver 7 in a position detector 6. The receiver 7 is so placed that the loci of the light spot image coincide with the light reception face of the receiver. The ratio between both photoelectric (currents) i1, i2 of the light receiver changes depending on the position of the light spot image. The position y of the light spot image is determined by a calculator 8. The output of the calculator is applied to a compensation circuit 9 to perform compensation to make the displacement x of the body 4 and the output of the calculator 8 proportional to each other.
COPYRIGHT: (C)1980,JPO&Japio
JP2679879A 1979-03-09 1979-03-09 Expired JPS59762B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2679879A JPS59762B2 (en) 1979-03-09 1979-03-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2679879A JPS59762B2 (en) 1979-03-09 1979-03-09

Publications (2)

Publication Number Publication Date
JPS55119006A true JPS55119006A (en) 1980-09-12
JPS59762B2 JPS59762B2 (en) 1984-01-09

Family

ID=12203328

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2679879A Expired JPS59762B2 (en) 1979-03-09 1979-03-09

Country Status (1)

Country Link
JP (1) JPS59762B2 (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5827004A (en) * 1981-08-11 1983-02-17 Kyocera Corp Device for detecting light spot positions
JPS5877405U (en) * 1981-11-20 1983-05-25
JPS58168906A (en) * 1982-03-30 1983-10-05 Jeol Ltd Device for measuring surface height of object
JPS59139520A (en) * 1983-01-31 1984-08-10 Matsushita Electric Works Ltd Reflecting photoelectric switch
JPS59180475A (en) * 1983-03-31 1984-10-13 Konishiroku Photo Ind Co Ltd Reflection type photoelectric switch
DE3407210A1 (en) * 1984-02-28 1985-09-12 Matsushita Electric Works Ltd Photoelectric switch
JPS618808U (en) * 1984-06-22 1986-01-20
JPS6184580A (en) * 1984-10-02 1986-04-30 Yukio Muto Measuring instrument for quantity of displacement
JPH0293317A (en) * 1988-09-30 1990-04-04 Anritsu Corp Optical displacement measuring apparatus
JPH03165211A (en) * 1989-11-24 1991-07-17 Stanley Electric Co Ltd Optical measuring device
JPH03179211A (en) * 1990-08-03 1991-08-05 Konica Corp Reflection-type photoelectric switch

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5827004A (en) * 1981-08-11 1983-02-17 Kyocera Corp Device for detecting light spot positions
JPS5877405U (en) * 1981-11-20 1983-05-25
JPH0474644B2 (en) * 1982-03-30 1992-11-26
JPS58168906A (en) * 1982-03-30 1983-10-05 Jeol Ltd Device for measuring surface height of object
JPS59139520A (en) * 1983-01-31 1984-08-10 Matsushita Electric Works Ltd Reflecting photoelectric switch
JPS59180475A (en) * 1983-03-31 1984-10-13 Konishiroku Photo Ind Co Ltd Reflection type photoelectric switch
DE3407210A1 (en) * 1984-02-28 1985-09-12 Matsushita Electric Works Ltd Photoelectric switch
DE3407210C2 (en) * 1984-02-28 1987-03-05 Matsushita Electric Works, Ltd., Kadoma, Osaka, Jp
JPS618808U (en) * 1984-06-22 1986-01-20
JPS6184580A (en) * 1984-10-02 1986-04-30 Yukio Muto Measuring instrument for quantity of displacement
JPH0293317A (en) * 1988-09-30 1990-04-04 Anritsu Corp Optical displacement measuring apparatus
JPH03165211A (en) * 1989-11-24 1991-07-17 Stanley Electric Co Ltd Optical measuring device
JPH03179211A (en) * 1990-08-03 1991-08-05 Konica Corp Reflection-type photoelectric switch
JPH0536733B2 (en) * 1990-08-03 1993-05-31 Matsushita Denko Kk

Also Published As

Publication number Publication date
JPS59762B2 (en) 1984-01-09

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