JPS5648545A - Crack detector - Google Patents

Crack detector

Info

Publication number
JPS5648545A
JPS5648545A JP12663079A JP12663079A JPS5648545A JP S5648545 A JPS5648545 A JP S5648545A JP 12663079 A JP12663079 A JP 12663079A JP 12663079 A JP12663079 A JP 12663079A JP S5648545 A JPS5648545 A JP S5648545A
Authority
JP
Japan
Prior art keywords
chip
transducer
angle
crack
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12663079A
Other languages
Japanese (ja)
Inventor
Yoshinobu Kashiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP12663079A priority Critical patent/JPS5648545A/en
Publication of JPS5648545A publication Critical patent/JPS5648545A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To ensure an assured detection of the crack, by irradiating the light to the throwaway chip with an angle of the best S/N at all times. CONSTITUTION:The throwaway chip 1 is shifted while keeping the angle formed by the projected light 2 and the chip side, and thus the entire end parts of the chip 1 are image-formed to the photoelectric transducer 4. And if some crack is caused at the end parts of the chip 1, the output of the transducer 4 has some change. The angle between the chip 1 and the projected light is set preferably to about 50-80 deg.; and the transducer 4 is provided preferably with an angle orthogonal to the side of the chip 1 since the transducer 4 receives the diffused reflection of the reflected light.
JP12663079A 1979-09-28 1979-09-28 Crack detector Pending JPS5648545A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12663079A JPS5648545A (en) 1979-09-28 1979-09-28 Crack detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12663079A JPS5648545A (en) 1979-09-28 1979-09-28 Crack detector

Publications (1)

Publication Number Publication Date
JPS5648545A true JPS5648545A (en) 1981-05-01

Family

ID=14939941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12663079A Pending JPS5648545A (en) 1979-09-28 1979-09-28 Crack detector

Country Status (1)

Country Link
JP (1) JPS5648545A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0100446A1 (en) * 1982-07-15 1984-02-15 CARBOLOY S.p.A. High resolution electronic automatic imaging and inspecting system
JPS61271405A (en) * 1985-05-27 1986-12-01 Mitsubishi Metal Corp Flatness of corner part inspecting apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0100446A1 (en) * 1982-07-15 1984-02-15 CARBOLOY S.p.A. High resolution electronic automatic imaging and inspecting system
JPS61271405A (en) * 1985-05-27 1986-12-01 Mitsubishi Metal Corp Flatness of corner part inspecting apparatus

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