JPS57161642A - Inspecting device for defect of surface - Google Patents

Inspecting device for defect of surface

Info

Publication number
JPS57161642A
JPS57161642A JP4800881A JP4800881A JPS57161642A JP S57161642 A JPS57161642 A JP S57161642A JP 4800881 A JP4800881 A JP 4800881A JP 4800881 A JP4800881 A JP 4800881A JP S57161642 A JPS57161642 A JP S57161642A
Authority
JP
Japan
Prior art keywords
signal
inspected
detecting means
observation
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4800881A
Other languages
Japanese (ja)
Inventor
Hiroshige Kodama
Kiichi Kato
Ken Oshima
Masaharu Sakamoto
Seiji Yoshikawa
Kunio Yamamiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp, Olympus Optical Co Ltd filed Critical Olympus Corp
Priority to JP4800881A priority Critical patent/JPS57161642A/en
Publication of JPS57161642A publication Critical patent/JPS57161642A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To detect a surface defect highly reliably and efficiently by positioning a turntable and a body for observation based on a position signal from a rotation detecting means and thereby enabling the observation of the detected surface defect. CONSTITUTION:A turntable 3 whereon a body E to be inspected is mounted removably is driven by a motor 6 and the rotation of the table is controlled by a rotation control unit and detected by a rotation detecting means 10. Laser beams from a laser beam generator 18 are applied as parallel beams of a minute spot on the body E to be focused thereon and are moved at a fixed speed in the radius direction of the body E. A reflected light from the body E to be inspected is transduced photoelectrically by an optical head 19 and a signal thus obtained is transformed into a pulse by a signal processing unit 43. This signal, as an information on defect, is addressed in a data processing unit 44 according to a position signal from the detecting means 10. Then, the surface of the body E to be inspected is enlarged on an image monitor 49 and displayed in a body 45 for observation in an enlarged manner. This sequence of inspection is controlled by a sequence control circuit 50.
JP4800881A 1981-03-31 1981-03-31 Inspecting device for defect of surface Pending JPS57161642A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4800881A JPS57161642A (en) 1981-03-31 1981-03-31 Inspecting device for defect of surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4800881A JPS57161642A (en) 1981-03-31 1981-03-31 Inspecting device for defect of surface

Publications (1)

Publication Number Publication Date
JPS57161642A true JPS57161642A (en) 1982-10-05

Family

ID=12791263

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4800881A Pending JPS57161642A (en) 1981-03-31 1981-03-31 Inspecting device for defect of surface

Country Status (1)

Country Link
JP (1) JPS57161642A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59180313A (en) * 1983-03-30 1984-10-13 Toshiba Corp Surface inspecting device
JPS6056208A (en) * 1983-09-08 1985-04-01 Toshiba Corp Surface inspecting device
JPS6128846A (en) * 1984-07-19 1986-02-08 Toshiba Corp Surface inspection apparatus
JPS6165146A (en) * 1984-09-06 1986-04-03 Toshiba Corp Surface inspection device
JPS642149U (en) * 1987-06-24 1989-01-09
JPH02141846U (en) * 1989-04-28 1990-11-29
WO2004070370A1 (en) * 2003-02-07 2004-08-19 Nikon Corporation Wafer tester

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5365777A (en) * 1976-11-24 1978-06-12 Nippon Telegr & Teleph Corp <Ntt> Surface defect detector
JPS5328772B2 (en) * 1975-05-14 1978-08-16
JPS53143205A (en) * 1977-05-19 1978-12-13 Fujitsu Ltd Deffect inspecting method of magnetic disc media
JPS5555206A (en) * 1978-10-20 1980-04-23 Hitachi Electronics Eng Co Ltd Inspection data processing system for defect on face plate
JPS5618708A (en) * 1979-07-23 1981-02-21 Siemens Ag Optoelectronic inspector

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5328772B2 (en) * 1975-05-14 1978-08-16
JPS5365777A (en) * 1976-11-24 1978-06-12 Nippon Telegr & Teleph Corp <Ntt> Surface defect detector
JPS53143205A (en) * 1977-05-19 1978-12-13 Fujitsu Ltd Deffect inspecting method of magnetic disc media
JPS5555206A (en) * 1978-10-20 1980-04-23 Hitachi Electronics Eng Co Ltd Inspection data processing system for defect on face plate
JPS5618708A (en) * 1979-07-23 1981-02-21 Siemens Ag Optoelectronic inspector

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59180313A (en) * 1983-03-30 1984-10-13 Toshiba Corp Surface inspecting device
JPH0358042B2 (en) * 1983-03-30 1991-09-04 Tokyo Shibaura Electric Co
JPS6056208A (en) * 1983-09-08 1985-04-01 Toshiba Corp Surface inspecting device
JPH0517482B2 (en) * 1983-09-08 1993-03-09 Tokyo Shibaura Electric Co
JPS6128846A (en) * 1984-07-19 1986-02-08 Toshiba Corp Surface inspection apparatus
JPH0431056B2 (en) * 1984-07-19 1992-05-25
JPS6165146A (en) * 1984-09-06 1986-04-03 Toshiba Corp Surface inspection device
JPS642149U (en) * 1987-06-24 1989-01-09
JPH02141846U (en) * 1989-04-28 1990-11-29
WO2004070370A1 (en) * 2003-02-07 2004-08-19 Nikon Corporation Wafer tester

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