JPS5391772A - Measurement apparatus - Google Patents

Measurement apparatus

Info

Publication number
JPS5391772A
JPS5391772A JP550677A JP550677A JPS5391772A JP S5391772 A JPS5391772 A JP S5391772A JP 550677 A JP550677 A JP 550677A JP 550677 A JP550677 A JP 550677A JP S5391772 A JPS5391772 A JP S5391772A
Authority
JP
Japan
Prior art keywords
linear
subject surface
photo
coordinates
reflected light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP550677A
Other languages
Japanese (ja)
Inventor
Minokichi Ban
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP550677A priority Critical patent/JPS5391772A/en
Publication of JPS5391772A publication Critical patent/JPS5391772A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To measure swells, undulations, etc. irrespective of the inclination of the subject surface by making the non-linear outputs for the coordinates of a photo detector by the reflected light from the subject surface linear with respect to the photo detectin position by a non-linear output for the coordinates of a photo detector by the reflected light from the subject surface linear with respect to the photo detecting position by a non-linear output amplifier.
COPYRIGHT: (C)1978,JPO&Japio
JP550677A 1977-01-21 1977-01-21 Measurement apparatus Pending JPS5391772A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP550677A JPS5391772A (en) 1977-01-21 1977-01-21 Measurement apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP550677A JPS5391772A (en) 1977-01-21 1977-01-21 Measurement apparatus

Publications (1)

Publication Number Publication Date
JPS5391772A true JPS5391772A (en) 1978-08-11

Family

ID=11613075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP550677A Pending JPS5391772A (en) 1977-01-21 1977-01-21 Measurement apparatus

Country Status (1)

Country Link
JP (1) JPS5391772A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03115803A (en) * 1989-09-29 1991-05-16 Nec Corp Light beam position detector
JPH09236407A (en) * 1997-03-14 1997-09-09 Kowa Co Solid geometry measuring device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03115803A (en) * 1989-09-29 1991-05-16 Nec Corp Light beam position detector
JPH09236407A (en) * 1997-03-14 1997-09-09 Kowa Co Solid geometry measuring device

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