JPS5244657A - Method of measuring thin film charcteristics by fluorescent x-rays met hod - Google Patents

Method of measuring thin film charcteristics by fluorescent x-rays met hod

Info

Publication number
JPS5244657A
JPS5244657A JP11975975A JP11975975A JPS5244657A JP S5244657 A JPS5244657 A JP S5244657A JP 11975975 A JP11975975 A JP 11975975A JP 11975975 A JP11975975 A JP 11975975A JP S5244657 A JPS5244657 A JP S5244657A
Authority
JP
Japan
Prior art keywords
rays
thin film
fluorescent
charcteristics
measuring thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11975975A
Other languages
Japanese (ja)
Inventor
Hideaki Konishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11975975A priority Critical patent/JPS5244657A/en
Publication of JPS5244657A publication Critical patent/JPS5244657A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE: To radiate X-rays to a thin film composed of an oxide formed on a substrate and measure the intensity of the fluorescent X-rays, thereby measuring the thickness of the thin film.
COPYRIGHT: (C)1977,JPO&Japio
JP11975975A 1975-10-06 1975-10-06 Method of measuring thin film charcteristics by fluorescent x-rays met hod Pending JPS5244657A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11975975A JPS5244657A (en) 1975-10-06 1975-10-06 Method of measuring thin film charcteristics by fluorescent x-rays met hod

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11975975A JPS5244657A (en) 1975-10-06 1975-10-06 Method of measuring thin film charcteristics by fluorescent x-rays met hod

Publications (1)

Publication Number Publication Date
JPS5244657A true JPS5244657A (en) 1977-04-07

Family

ID=14769455

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11975975A Pending JPS5244657A (en) 1975-10-06 1975-10-06 Method of measuring thin film charcteristics by fluorescent x-rays met hod

Country Status (1)

Country Link
JP (1) JPS5244657A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1147407A1 (en) * 1998-12-21 2001-10-24 Corning Incorporated X-ray fluorescent emission analysis to determine material concentration

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1147407A1 (en) * 1998-12-21 2001-10-24 Corning Incorporated X-ray fluorescent emission analysis to determine material concentration
EP1147407A4 (en) * 1998-12-21 2003-01-29 Corning Inc X-ray fluorescent emission analysis to determine material concentration

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