JPS5342759A - Interference measuring method - Google Patents

Interference measuring method

Info

Publication number
JPS5342759A
JPS5342759A JP11688176A JP11688176A JPS5342759A JP S5342759 A JPS5342759 A JP S5342759A JP 11688176 A JP11688176 A JP 11688176A JP 11688176 A JP11688176 A JP 11688176A JP S5342759 A JPS5342759 A JP S5342759A
Authority
JP
Japan
Prior art keywords
measuring method
luminous flux
interference measuring
specimen
polarized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11688176A
Other languages
Japanese (ja)
Other versions
JPS564842B2 (en
Inventor
Nobuyoshi Tanaka
Tetsuo Kuwayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP11688176A priority Critical patent/JPS5342759A/en
Publication of JPS5342759A publication Critical patent/JPS5342759A/en
Publication of JPS564842B2 publication Critical patent/JPS564842B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE: To make possible measuring of a thin film thickness by using a polarized luminous flux for the luminous flux radiating the specimen and setting the incident angle of the polarized luminous flux to the specimen at a Brewster angle or close thereto.
COPYRIGHT: (C)1978,JPO&Japio
JP11688176A 1976-09-29 1976-09-29 Interference measuring method Granted JPS5342759A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11688176A JPS5342759A (en) 1976-09-29 1976-09-29 Interference measuring method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11688176A JPS5342759A (en) 1976-09-29 1976-09-29 Interference measuring method

Publications (2)

Publication Number Publication Date
JPS5342759A true JPS5342759A (en) 1978-04-18
JPS564842B2 JPS564842B2 (en) 1981-02-02

Family

ID=14697939

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11688176A Granted JPS5342759A (en) 1976-09-29 1976-09-29 Interference measuring method

Country Status (1)

Country Link
JP (1) JPS5342759A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01132935A (en) * 1987-11-18 1989-05-25 Kawasaki Steel Corp Method and apparatus for analyzing film
JPH01132936A (en) * 1987-11-18 1989-05-25 Kawasaki Steel Corp Method and apparatus for analyzing film
JP2013228330A (en) * 2012-04-26 2013-11-07 Jfe Steel Corp Film thickness measuring apparatus and film thickness measuring method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01132935A (en) * 1987-11-18 1989-05-25 Kawasaki Steel Corp Method and apparatus for analyzing film
JPH01132936A (en) * 1987-11-18 1989-05-25 Kawasaki Steel Corp Method and apparatus for analyzing film
JP2013228330A (en) * 2012-04-26 2013-11-07 Jfe Steel Corp Film thickness measuring apparatus and film thickness measuring method

Also Published As

Publication number Publication date
JPS564842B2 (en) 1981-02-02

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