JPS5369655A - Thickness measuring method - Google Patents

Thickness measuring method

Info

Publication number
JPS5369655A
JPS5369655A JP14476876A JP14476876A JPS5369655A JP S5369655 A JPS5369655 A JP S5369655A JP 14476876 A JP14476876 A JP 14476876A JP 14476876 A JP14476876 A JP 14476876A JP S5369655 A JPS5369655 A JP S5369655A
Authority
JP
Japan
Prior art keywords
measuring method
thickness measuring
projected
measured
block
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14476876A
Other languages
Japanese (ja)
Inventor
Kengo Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14476876A priority Critical patent/JPS5369655A/en
Publication of JPS5369655A publication Critical patent/JPS5369655A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To provide a thickness measuring method, in which a parallel flux of light is projected at a known angle on a block to be measured that is placed on a reference plane, and shadow of a standard wire-like member placed at a prescribed position is projected on the block, where, by thickness of articles such as semiconductor chip can be measured with ease.
COPYRIGHT: (C)1978,JPO&Japio
JP14476876A 1976-12-03 1976-12-03 Thickness measuring method Pending JPS5369655A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14476876A JPS5369655A (en) 1976-12-03 1976-12-03 Thickness measuring method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14476876A JPS5369655A (en) 1976-12-03 1976-12-03 Thickness measuring method

Publications (1)

Publication Number Publication Date
JPS5369655A true JPS5369655A (en) 1978-06-21

Family

ID=15369953

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14476876A Pending JPS5369655A (en) 1976-12-03 1976-12-03 Thickness measuring method

Country Status (1)

Country Link
JP (1) JPS5369655A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH041507A (en) * 1990-01-23 1992-01-07 Datsuku Eng Kk Measuring method for thickness and surface strain of object and detecting method for mixed foreign matter
JP2007507707A (en) * 2003-10-01 2007-03-29 シック アイヴィピー エービー System and method for reflecting features of an object

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH041507A (en) * 1990-01-23 1992-01-07 Datsuku Eng Kk Measuring method for thickness and surface strain of object and detecting method for mixed foreign matter
JP2007507707A (en) * 2003-10-01 2007-03-29 シック アイヴィピー エービー System and method for reflecting features of an object

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