JPS52143848A - Thin plate external appearance inspector - Google Patents

Thin plate external appearance inspector

Info

Publication number
JPS52143848A
JPS52143848A JP6002176A JP6002176A JPS52143848A JP S52143848 A JPS52143848 A JP S52143848A JP 6002176 A JP6002176 A JP 6002176A JP 6002176 A JP6002176 A JP 6002176A JP S52143848 A JPS52143848 A JP S52143848A
Authority
JP
Japan
Prior art keywords
thin plate
external appearance
plate external
appearance inspector
inspector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6002176A
Other languages
Japanese (ja)
Inventor
Tamotsu Sasaki
Masuo Takahashi
Shinpei Suzuki
Toshihiko Takayanagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6002176A priority Critical patent/JPS52143848A/en
Publication of JPS52143848A publication Critical patent/JPS52143848A/en
Pending legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

PURPOSE: To examine the external appearance of a thin plate, such as semiconductor wafers or the like, at a high speed in the angular motion while the turntable is moved up and down.
COPYRIGHT: (C)1977,JPO&Japio
JP6002176A 1976-05-26 1976-05-26 Thin plate external appearance inspector Pending JPS52143848A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6002176A JPS52143848A (en) 1976-05-26 1976-05-26 Thin plate external appearance inspector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6002176A JPS52143848A (en) 1976-05-26 1976-05-26 Thin plate external appearance inspector

Publications (1)

Publication Number Publication Date
JPS52143848A true JPS52143848A (en) 1977-11-30

Family

ID=13129981

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6002176A Pending JPS52143848A (en) 1976-05-26 1976-05-26 Thin plate external appearance inspector

Country Status (1)

Country Link
JP (1) JPS52143848A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014098908A (en) * 2009-10-19 2014-05-29 Ventana Medical Systems Inc Imaging system and technique
WO2014199696A1 (en) * 2013-06-12 2014-12-18 浜松ホトニクス株式会社 Sample retaining member insertion-removal mechanism and image acquisition device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014098908A (en) * 2009-10-19 2014-05-29 Ventana Medical Systems Inc Imaging system and technique
US9036255B2 (en) 2009-10-19 2015-05-19 Ventana Medical Systems, Inc. Method and device for slide caching
US9575301B2 (en) 2009-10-19 2017-02-21 Ventana Medical Systems, Inc. Device for a microscope stage
US10061107B2 (en) 2009-10-19 2018-08-28 Ventana Medical Systems, Inc. Method and device for slide scanning
WO2014199696A1 (en) * 2013-06-12 2014-12-18 浜松ホトニクス株式会社 Sample retaining member insertion-removal mechanism and image acquisition device
JP2014240931A (en) * 2013-06-12 2014-12-25 浜松ホトニクス株式会社 Withdrawal mechanism for sample holding member and image acquisition device
US10088659B2 (en) 2013-06-12 2018-10-02 Hamamatsu Photonics K.K. Sample retaining member insertion-removal mechanism and image acquisition device

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