JPS52143848A - Thin plate external appearance inspector - Google Patents
Thin plate external appearance inspectorInfo
- Publication number
- JPS52143848A JPS52143848A JP6002176A JP6002176A JPS52143848A JP S52143848 A JPS52143848 A JP S52143848A JP 6002176 A JP6002176 A JP 6002176A JP 6002176 A JP6002176 A JP 6002176A JP S52143848 A JPS52143848 A JP S52143848A
- Authority
- JP
- Japan
- Prior art keywords
- thin plate
- external appearance
- plate external
- appearance inspector
- inspector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Sampling And Sample Adjustment (AREA)
- Microscoopes, Condenser (AREA)
Abstract
PURPOSE: To examine the external appearance of a thin plate, such as semiconductor wafers or the like, at a high speed in the angular motion while the turntable is moved up and down.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6002176A JPS52143848A (en) | 1976-05-26 | 1976-05-26 | Thin plate external appearance inspector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6002176A JPS52143848A (en) | 1976-05-26 | 1976-05-26 | Thin plate external appearance inspector |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52143848A true JPS52143848A (en) | 1977-11-30 |
Family
ID=13129981
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6002176A Pending JPS52143848A (en) | 1976-05-26 | 1976-05-26 | Thin plate external appearance inspector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52143848A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014098908A (en) * | 2009-10-19 | 2014-05-29 | Ventana Medical Systems Inc | Imaging system and technique |
WO2014199696A1 (en) * | 2013-06-12 | 2014-12-18 | 浜松ホトニクス株式会社 | Sample retaining member insertion-removal mechanism and image acquisition device |
-
1976
- 1976-05-26 JP JP6002176A patent/JPS52143848A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014098908A (en) * | 2009-10-19 | 2014-05-29 | Ventana Medical Systems Inc | Imaging system and technique |
US9036255B2 (en) | 2009-10-19 | 2015-05-19 | Ventana Medical Systems, Inc. | Method and device for slide caching |
US9575301B2 (en) | 2009-10-19 | 2017-02-21 | Ventana Medical Systems, Inc. | Device for a microscope stage |
US10061107B2 (en) | 2009-10-19 | 2018-08-28 | Ventana Medical Systems, Inc. | Method and device for slide scanning |
WO2014199696A1 (en) * | 2013-06-12 | 2014-12-18 | 浜松ホトニクス株式会社 | Sample retaining member insertion-removal mechanism and image acquisition device |
JP2014240931A (en) * | 2013-06-12 | 2014-12-25 | 浜松ホトニクス株式会社 | Withdrawal mechanism for sample holding member and image acquisition device |
US10088659B2 (en) | 2013-06-12 | 2018-10-02 | Hamamatsu Photonics K.K. | Sample retaining member insertion-removal mechanism and image acquisition device |
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