JPS5437580A - Dry etching method and target film used for it - Google Patents

Dry etching method and target film used for it

Info

Publication number
JPS5437580A
JPS5437580A JP10451477A JP10451477A JPS5437580A JP S5437580 A JPS5437580 A JP S5437580A JP 10451477 A JP10451477 A JP 10451477A JP 10451477 A JP10451477 A JP 10451477A JP S5437580 A JPS5437580 A JP S5437580A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
dry etching
etching method
film used
target film
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10451477A
Other versions
JPS5544450B2 (en )
Inventor
Makoto Asakawa
Yukinori Kuroki
Koji Mizusawa
Masao Tajima
Original Assignee
Nec Corp
Nippon Telegr & Teleph Corp <Ntt>
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Abstract

PURPOSE: On a target electrode, a coating material made into a film is pressureadhered by using an adhesive, an etched sample is placed on the film and etched, and the consumed film is replaced with a new one, thereby etching it.
COPYRIGHT: (C)1979,JPO&Japio
JP10451477A 1977-08-30 1977-08-30 Expired JPS5544450B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10451477A JPS5544450B2 (en) 1977-08-30 1977-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10451477A JPS5544450B2 (en) 1977-08-30 1977-08-30

Publications (2)

Publication Number Publication Date
JPS5437580A true true JPS5437580A (en) 1979-03-20
JPS5544450B2 JPS5544450B2 (en) 1980-11-12

Family

ID=14382592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10451477A Expired JPS5544450B2 (en) 1977-08-30 1977-08-30

Country Status (1)

Country Link
JP (1) JPS5544450B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56158873A (en) * 1980-05-14 1981-12-07 Hitachi Ltd Dry etching method
JPS587829A (en) * 1981-07-08 1983-01-17 Toshiba Corp Dry etching method
JPS6224627A (en) * 1985-07-25 1987-02-02 Sony Corp Dry etching method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4991771A (en) * 1972-12-31 1974-09-02
JPS5259580A (en) * 1975-11-11 1977-05-17 Matsushita Electric Ind Co Ltd Photo etching method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4991771A (en) * 1972-12-31 1974-09-02
JPS5259580A (en) * 1975-11-11 1977-05-17 Matsushita Electric Ind Co Ltd Photo etching method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56158873A (en) * 1980-05-14 1981-12-07 Hitachi Ltd Dry etching method
JPS6352118B2 (en) * 1980-05-14 1988-10-18 Hitachi Ltd
JPS587829A (en) * 1981-07-08 1983-01-17 Toshiba Corp Dry etching method
JPH031825B2 (en) * 1981-07-08 1991-01-11 Tokyo Shibaura Electric Co
JPS6224627A (en) * 1985-07-25 1987-02-02 Sony Corp Dry etching method

Also Published As

Publication number Publication date Type
JPS5544450B2 (en) 1980-11-12 grant

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