JPS5437580A - Dry etching method and target film used for it - Google Patents
Dry etching method and target film used for itInfo
- Publication number
- JPS5437580A JPS5437580A JP10451477A JP10451477A JPS5437580A JP S5437580 A JPS5437580 A JP S5437580A JP 10451477 A JP10451477 A JP 10451477A JP 10451477 A JP10451477 A JP 10451477A JP S5437580 A JPS5437580 A JP S5437580A
- Authority
- JP
- Japan
- Prior art keywords
- dry etching
- etching method
- film used
- target film
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: On a target electrode, a coating material made into a film is pressureadhered by using an adhesive, an etched sample is placed on the film and etched, and the consumed film is replaced with a new one, thereby etching it.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10451477A JPS5437580A (en) | 1977-08-30 | 1977-08-30 | Dry etching method and target film used for it |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10451477A JPS5437580A (en) | 1977-08-30 | 1977-08-30 | Dry etching method and target film used for it |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5437580A true JPS5437580A (en) | 1979-03-20 |
JPS5544450B2 JPS5544450B2 (en) | 1980-11-12 |
Family
ID=14382592
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10451477A Granted JPS5437580A (en) | 1977-08-30 | 1977-08-30 | Dry etching method and target film used for it |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5437580A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56158873A (en) * | 1980-05-14 | 1981-12-07 | Hitachi Ltd | Dry etching method |
JPS587829A (en) * | 1981-07-08 | 1983-01-17 | Toshiba Corp | Dry etching method |
JPS6224627A (en) * | 1985-07-25 | 1987-02-02 | Sony Corp | Dry etching method |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20220095617A1 (en) | 2019-01-16 | 2022-03-31 | Idemitsu Kosan Co.,Ltd. | Plant growth regulating agent |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4991771A (en) * | 1972-12-31 | 1974-09-02 | ||
JPS5259580A (en) * | 1975-11-11 | 1977-05-17 | Matsushita Electric Ind Co Ltd | Photo etching method |
-
1977
- 1977-08-30 JP JP10451477A patent/JPS5437580A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4991771A (en) * | 1972-12-31 | 1974-09-02 | ||
JPS5259580A (en) * | 1975-11-11 | 1977-05-17 | Matsushita Electric Ind Co Ltd | Photo etching method |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56158873A (en) * | 1980-05-14 | 1981-12-07 | Hitachi Ltd | Dry etching method |
JPS6352118B2 (en) * | 1980-05-14 | 1988-10-18 | Hitachi Ltd | |
JPS587829A (en) * | 1981-07-08 | 1983-01-17 | Toshiba Corp | Dry etching method |
JPH031825B2 (en) * | 1981-07-08 | 1991-01-11 | Tokyo Shibaura Electric Co | |
JPS6224627A (en) * | 1985-07-25 | 1987-02-02 | Sony Corp | Dry etching method |
Also Published As
Publication number | Publication date |
---|---|
JPS5544450B2 (en) | 1980-11-12 |
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