JPS5341976A - Measuring method of thickness of semiconducjtor wafer - Google Patents
Measuring method of thickness of semiconducjtor waferInfo
- Publication number
- JPS5341976A JPS5341976A JP11681476A JP11681476A JPS5341976A JP S5341976 A JPS5341976 A JP S5341976A JP 11681476 A JP11681476 A JP 11681476A JP 11681476 A JP11681476 A JP 11681476A JP S5341976 A JPS5341976 A JP S5341976A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- thickness
- semiconducjtor
- measuring method
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: The light of a fixed wavelength is projected on a wafer thin plate, so that the thickness of the wafer can be measured accruately without touching the wafer by the attenuation of light due to transmission.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11681476A JPS5341976A (en) | 1976-09-29 | 1976-09-29 | Measuring method of thickness of semiconducjtor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11681476A JPS5341976A (en) | 1976-09-29 | 1976-09-29 | Measuring method of thickness of semiconducjtor wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5341976A true JPS5341976A (en) | 1978-04-15 |
Family
ID=14696293
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11681476A Pending JPS5341976A (en) | 1976-09-29 | 1976-09-29 | Measuring method of thickness of semiconducjtor wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5341976A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57207269A (en) * | 1981-06-15 | 1982-12-18 | Asahi Optical Co Ltd | Copying machine having two drums |
JPS5857856U (en) * | 1981-10-14 | 1983-04-19 | キヤノン株式会社 | lighting equipment |
JPS6165227A (en) * | 1984-09-07 | 1986-04-03 | Ushio Inc | Optical instrument |
US5255116A (en) * | 1991-02-18 | 1993-10-19 | Canon Kabushiki Kaisha | Original scanning apparatus |
KR100845778B1 (en) * | 2008-03-21 | 2008-07-11 | (주)엘립소테크놀러지 | An apparatus for measuring thinkness of silicon wafer using light transmittance at light transmission edge range and a method therof |
-
1976
- 1976-09-29 JP JP11681476A patent/JPS5341976A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57207269A (en) * | 1981-06-15 | 1982-12-18 | Asahi Optical Co Ltd | Copying machine having two drums |
JPH0332064B2 (en) * | 1981-06-15 | 1991-05-09 | Asahi Optical Co Ltd | |
JPS5857856U (en) * | 1981-10-14 | 1983-04-19 | キヤノン株式会社 | lighting equipment |
JPS6165227A (en) * | 1984-09-07 | 1986-04-03 | Ushio Inc | Optical instrument |
US5255116A (en) * | 1991-02-18 | 1993-10-19 | Canon Kabushiki Kaisha | Original scanning apparatus |
KR100845778B1 (en) * | 2008-03-21 | 2008-07-11 | (주)엘립소테크놀러지 | An apparatus for measuring thinkness of silicon wafer using light transmittance at light transmission edge range and a method therof |
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