JPS51124383A - Precision plane shift mechanism - Google Patents
Precision plane shift mechanismInfo
- Publication number
- JPS51124383A JPS51124383A JP50048671A JP4867175A JPS51124383A JP S51124383 A JPS51124383 A JP S51124383A JP 50048671 A JP50048671 A JP 50048671A JP 4867175 A JP4867175 A JP 4867175A JP S51124383 A JPS51124383 A JP S51124383A
- Authority
- JP
- Japan
- Prior art keywords
- shift mechanism
- plane shift
- precision plane
- precision
- tracing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Machine Tool Units (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Projection-Type Copiers In General (AREA)
Abstract
PURPOSE: To easily obtain a surface shift of a flatness which is less than the lightwave length by tracing an optically flat plate which has a simple shape for easy processing.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50048671A JPS51124383A (en) | 1975-04-23 | 1975-04-23 | Precision plane shift mechanism |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50048671A JPS51124383A (en) | 1975-04-23 | 1975-04-23 | Precision plane shift mechanism |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51124383A true JPS51124383A (en) | 1976-10-29 |
Family
ID=12809776
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50048671A Pending JPS51124383A (en) | 1975-04-23 | 1975-04-23 | Precision plane shift mechanism |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51124383A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58154846A (en) * | 1981-11-25 | 1983-09-14 | パ−キン−エルマ−・ツエンゾ−ル・アンシユタルト | Mask pattern production duplicator |
-
1975
- 1975-04-23 JP JP50048671A patent/JPS51124383A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58154846A (en) * | 1981-11-25 | 1983-09-14 | パ−キン−エルマ−・ツエンゾ−ル・アンシユタルト | Mask pattern production duplicator |
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