JPS51124383A - Precision plane shift mechanism - Google Patents

Precision plane shift mechanism

Info

Publication number
JPS51124383A
JPS51124383A JP50048671A JP4867175A JPS51124383A JP S51124383 A JPS51124383 A JP S51124383A JP 50048671 A JP50048671 A JP 50048671A JP 4867175 A JP4867175 A JP 4867175A JP S51124383 A JPS51124383 A JP S51124383A
Authority
JP
Japan
Prior art keywords
shift mechanism
plane shift
precision plane
precision
tracing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50048671A
Other languages
Japanese (ja)
Inventor
Shigeo Kubota
Osamu Morita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50048671A priority Critical patent/JPS51124383A/en
Publication of JPS51124383A publication Critical patent/JPS51124383A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Machine Tool Units (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Projection-Type Copiers In General (AREA)

Abstract

PURPOSE: To easily obtain a surface shift of a flatness which is less than the lightwave length by tracing an optically flat plate which has a simple shape for easy processing.
COPYRIGHT: (C)1976,JPO&Japio
JP50048671A 1975-04-23 1975-04-23 Precision plane shift mechanism Pending JPS51124383A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50048671A JPS51124383A (en) 1975-04-23 1975-04-23 Precision plane shift mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50048671A JPS51124383A (en) 1975-04-23 1975-04-23 Precision plane shift mechanism

Publications (1)

Publication Number Publication Date
JPS51124383A true JPS51124383A (en) 1976-10-29

Family

ID=12809776

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50048671A Pending JPS51124383A (en) 1975-04-23 1975-04-23 Precision plane shift mechanism

Country Status (1)

Country Link
JP (1) JPS51124383A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58154846A (en) * 1981-11-25 1983-09-14 パ−キン−エルマ−・ツエンゾ−ル・アンシユタルト Mask pattern production duplicator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58154846A (en) * 1981-11-25 1983-09-14 パ−キン−エルマ−・ツエンゾ−ル・アンシユタルト Mask pattern production duplicator

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