JPS5321578A - Function inspection method of semiconductor elements - Google Patents
Function inspection method of semiconductor elementsInfo
- Publication number
- JPS5321578A JPS5321578A JP9635176A JP9635176A JPS5321578A JP S5321578 A JPS5321578 A JP S5321578A JP 9635176 A JP9635176 A JP 9635176A JP 9635176 A JP9635176 A JP 9635176A JP S5321578 A JPS5321578 A JP S5321578A
- Authority
- JP
- Japan
- Prior art keywords
- inspection method
- semiconductor elements
- function inspection
- elements
- function
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To inspect the functions of elements by contacting a thin dielectric film to the surface of the elements.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9635176A JPS5321578A (en) | 1976-08-11 | 1976-08-11 | Function inspection method of semiconductor elements |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9635176A JPS5321578A (en) | 1976-08-11 | 1976-08-11 | Function inspection method of semiconductor elements |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5321578A true JPS5321578A (en) | 1978-02-28 |
Family
ID=14162569
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9635176A Pending JPS5321578A (en) | 1976-08-11 | 1976-08-11 | Function inspection method of semiconductor elements |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5321578A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5631551A (en) * | 1979-08-20 | 1981-03-30 | Honda Motor Co Ltd | Combination mechanism of rack and pinion |
-
1976
- 1976-08-11 JP JP9635176A patent/JPS5321578A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5631551A (en) * | 1979-08-20 | 1981-03-30 | Honda Motor Co Ltd | Combination mechanism of rack and pinion |
JPS6238579B2 (en) * | 1979-08-20 | 1987-08-18 | Honda Motor Co Ltd |
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