JPS5321578A - Function inspection method of semiconductor elements - Google Patents

Function inspection method of semiconductor elements

Info

Publication number
JPS5321578A
JPS5321578A JP9635176A JP9635176A JPS5321578A JP S5321578 A JPS5321578 A JP S5321578A JP 9635176 A JP9635176 A JP 9635176A JP 9635176 A JP9635176 A JP 9635176A JP S5321578 A JPS5321578 A JP S5321578A
Authority
JP
Japan
Prior art keywords
inspection method
semiconductor elements
function inspection
elements
function
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9635176A
Other languages
Japanese (ja)
Inventor
Yasuo Furukawa
Yushi Inagaki
Yoshiaki Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9635176A priority Critical patent/JPS5321578A/en
Publication of JPS5321578A publication Critical patent/JPS5321578A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To inspect the functions of elements by contacting a thin dielectric film to the surface of the elements.
COPYRIGHT: (C)1978,JPO&Japio
JP9635176A 1976-08-11 1976-08-11 Function inspection method of semiconductor elements Pending JPS5321578A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9635176A JPS5321578A (en) 1976-08-11 1976-08-11 Function inspection method of semiconductor elements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9635176A JPS5321578A (en) 1976-08-11 1976-08-11 Function inspection method of semiconductor elements

Publications (1)

Publication Number Publication Date
JPS5321578A true JPS5321578A (en) 1978-02-28

Family

ID=14162569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9635176A Pending JPS5321578A (en) 1976-08-11 1976-08-11 Function inspection method of semiconductor elements

Country Status (1)

Country Link
JP (1) JPS5321578A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5631551A (en) * 1979-08-20 1981-03-30 Honda Motor Co Ltd Combination mechanism of rack and pinion

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5631551A (en) * 1979-08-20 1981-03-30 Honda Motor Co Ltd Combination mechanism of rack and pinion
JPS6238579B2 (en) * 1979-08-20 1987-08-18 Honda Motor Co Ltd

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