JPS52101979A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS52101979A
JPS52101979A JP1791276A JP1791276A JPS52101979A JP S52101979 A JPS52101979 A JP S52101979A JP 1791276 A JP1791276 A JP 1791276A JP 1791276 A JP1791276 A JP 1791276A JP S52101979 A JPS52101979 A JP S52101979A
Authority
JP
Japan
Prior art keywords
semiconductor device
island shape
shape semiconductor
layer consisting
semiconductor layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1791276A
Other languages
Japanese (ja)
Other versions
JPS5520382B2 (en
Inventor
Eitaro Sugino
Hiroyuki Tango
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP1791276A priority Critical patent/JPS52101979A/en
Publication of JPS52101979A publication Critical patent/JPS52101979A/en
Publication of JPS5520382B2 publication Critical patent/JPS5520382B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Element Separation (AREA)

Abstract

PURPOSE: To check separation without influence given to element characteristic by providing island shape semiconductor for an inspection purpose besides island shape semiconductor layer consisting of element.
COPYRIGHT: (C)1977,JPO&Japio
JP1791276A 1976-02-23 1976-02-23 Semiconductor device Granted JPS52101979A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1791276A JPS52101979A (en) 1976-02-23 1976-02-23 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1791276A JPS52101979A (en) 1976-02-23 1976-02-23 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS52101979A true JPS52101979A (en) 1977-08-26
JPS5520382B2 JPS5520382B2 (en) 1980-06-02

Family

ID=11956952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1791276A Granted JPS52101979A (en) 1976-02-23 1976-02-23 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS52101979A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5658242A (en) * 1979-10-17 1981-05-21 Fujitsu Ltd Manufacture of semiconductor integrated circuit
JPH01140638A (en) * 1987-11-26 1989-06-01 Nec Corp Semiconductor device
JPH0430548A (en) * 1990-05-28 1992-02-03 Fujitsu Ltd Semiconductor device, and test method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5658242A (en) * 1979-10-17 1981-05-21 Fujitsu Ltd Manufacture of semiconductor integrated circuit
JPH01140638A (en) * 1987-11-26 1989-06-01 Nec Corp Semiconductor device
JPH0430548A (en) * 1990-05-28 1992-02-03 Fujitsu Ltd Semiconductor device, and test method

Also Published As

Publication number Publication date
JPS5520382B2 (en) 1980-06-02

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