JPS5319763A - Mark detector in electron beam exposure - Google Patents

Mark detector in electron beam exposure

Info

Publication number
JPS5319763A
JPS5319763A JP9404676A JP9404676A JPS5319763A JP S5319763 A JPS5319763 A JP S5319763A JP 9404676 A JP9404676 A JP 9404676A JP 9404676 A JP9404676 A JP 9404676A JP S5319763 A JPS5319763 A JP S5319763A
Authority
JP
Japan
Prior art keywords
electron beam
beam exposure
mark detector
mark
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9404676A
Other languages
Japanese (ja)
Other versions
JPS5324789B2 (en
Inventor
Korehito Matsuda
Atsushi Iwata
Original Assignee
Nippon Telegr & Teleph Corp <Ntt>
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegr & Teleph Corp <Ntt> filed Critical Nippon Telegr & Teleph Corp <Ntt>
Priority to JP9404676A priority Critical patent/JPS5324789B2/ja
Publication of JPS5319763A publication Critical patent/JPS5319763A/en
Publication of JPS5324789B2 publication Critical patent/JPS5324789B2/ja
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To permit positive detection of a mark by automatically setting a threshold value in response to the detected signal value.
COPYRIGHT: (C)1978,JPO&Japio
JP9404676A 1976-08-09 1976-08-09 Expired JPS5324789B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9404676A JPS5324789B2 (en) 1976-08-09 1976-08-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9404676A JPS5324789B2 (en) 1976-08-09 1976-08-09

Publications (2)

Publication Number Publication Date
JPS5319763A true JPS5319763A (en) 1978-02-23
JPS5324789B2 JPS5324789B2 (en) 1978-07-22

Family

ID=14099612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9404676A Expired JPS5324789B2 (en) 1976-08-09 1976-08-09

Country Status (1)

Country Link
JP (1) JPS5324789B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5585028A (en) * 1978-12-22 1980-06-26 Hitachi Ltd Mark detecting signal amplifier
JPS5793164U (en) * 1980-11-28 1982-06-08

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50105382A (en) * 1974-01-28 1975-08-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50105382A (en) * 1974-01-28 1975-08-20

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5585028A (en) * 1978-12-22 1980-06-26 Hitachi Ltd Mark detecting signal amplifier
JPS5653851B2 (en) * 1978-12-22 1981-12-22
JPS5793164U (en) * 1980-11-28 1982-06-08

Also Published As

Publication number Publication date
JPS5324789B2 (en) 1978-07-22

Similar Documents

Publication Publication Date Title
JPS52112311A (en) Demodulating circuit
JPS5351736A (en) Film sensitivity presetting system for exposure condition determining circuit
JPS5319763A (en) Mark detector in electron beam exposure
JPS524896A (en) Gas detector
JPS5227699A (en) Coin inspection circuit
JPS5289412A (en) Alarm signal generator for wire-television
JPS5361299A (en) Photoelectric smoke detector
JPS52110030A (en) Detector for distinctness of object image
JPS522461A (en) Zero point detector for digital balance
JPS5228790A (en) Boring device
JPS52106446A (en) Absent phase detector
JPS53108488A (en) Flaw detector for tubes
JPS51144152A (en) Power detector
JPS5315171A (en) Signal level detection circuit
JPS53141031A (en) Camera having focusing-state detecting element
JPS5217064A (en) Vehicle and speed detector unit
JPS51141600A (en) Fire detecting equipment
JPS522271A (en) Electromagnetic counter
JPS5220066A (en) Current detecting circuit
JPS5370733A (en) Initial set error detector
JPS52124814A (en) Detection unit of minute pattern
JPS5292707A (en) Recording sensitivity adjusting system
JPS51145352A (en) Tilt detector
JPS522477A (en) Method of detecting rapidly passing object
JPS53137634A (en) Detection system for character frame