GB1359926A - Induced electron emission spectrometer using plural radiation sources - Google Patents

Induced electron emission spectrometer using plural radiation sources

Info

Publication number
GB1359926A
GB1359926A GB2205872A GB2205872A GB1359926A GB 1359926 A GB1359926 A GB 1359926A GB 2205872 A GB2205872 A GB 2205872A GB 2205872 A GB2205872 A GB 2205872A GB 1359926 A GB1359926 A GB 1359926A
Authority
GB
United Kingdom
Prior art keywords
electrons
anode
annuli
cathode
electron emission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2205872A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of GB1359926A publication Critical patent/GB1359926A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/484—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

1359926 Particle spectrometers VARIAN ASSOCIATES 11 May 1972 [17 May 1971] 22058/72 Heading H1D An induced electron emission spectrometer comprises a cathode 13 and an annular anode 12 arranged to be bombarded by electrons from the cathode producing X-rays for irradiating a sample 16 from which photo-electrons are emitted and analysed in a conventional analyser 17, 18, 19, 21, 22. In order to distinguish Auger electrons from photo-electrons the anode 12 is made of two materials, e.g. magnesium and aluminium either as two semiannular segments (23, 24), Fig. 2 (not shown), or two concentric annuli (27, 28), Fig. 3 (not shown), only one of the materials being used at a time, the Auger lines being distinguishable since they will be unshifted by a change in the anode material being used. In the case of semi-annular anode segments the cathode 13 is correspondingly divided into semi-annuli which are independently energizable. When concentric anode annuli are used the electrons are directed to the appropriate material by changing the potential on a focussing electrode 14.
GB2205872A 1971-05-17 1972-05-11 Induced electron emission spectrometer using plural radiation sources Expired GB1359926A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14410671A 1971-05-17 1971-05-17

Publications (1)

Publication Number Publication Date
GB1359926A true GB1359926A (en) 1974-07-17

Family

ID=22507062

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2205872A Expired GB1359926A (en) 1971-05-17 1972-05-11 Induced electron emission spectrometer using plural radiation sources

Country Status (5)

Country Link
US (1) US3787692A (en)
CA (1) CA961175A (en)
DE (1) DE2223086A1 (en)
FR (1) FR2138013B1 (en)
GB (1) GB1359926A (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3870882A (en) * 1973-05-23 1975-03-11 Gca Corp Esca x-ray source
US4126782A (en) * 1976-02-09 1978-11-21 Hitachi, Ltd. Electrostatic charged-particle analyzer
DE2743034C2 (en) * 1977-09-24 1982-06-03 Leybold-Heraeus GmbH, 5000 Köln Device for determining the energy of electrons
US4224518A (en) * 1978-12-21 1980-09-23 Varian Associates, Inc. Multistage cylindrical mirror analyzer incorporating a coaxial electron gun
US5444242A (en) * 1992-09-29 1995-08-22 Physical Electronics Inc. Scanning and high resolution electron spectroscopy and imaging
DE10217513B4 (en) * 2002-04-19 2004-06-17 Gesellschaft zur Förderung der Spektrochemie und angewandten Spektroskopie e.V. Method and device for the analysis of hidden, near-surface layers by means of photoelectron spectrometry
US8774359B1 (en) * 2010-07-30 2014-07-08 Kla-Tencor Corporation Gate stack metrology

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3114832A (en) * 1960-07-28 1963-12-17 Radiation Counter Lab Inc X-ray spectroscopic system comprising plural sources, filters, fluorescent radiators, and comparative detectors
US3248543A (en) * 1963-04-18 1966-04-26 Arthur H Pitchford X-ray spectrographic apparatus having a pair of X-ray tubes with different emission properties
US3461306A (en) * 1967-04-27 1969-08-12 Gen Electric Electron probe microanalyzer for measuring the differential energy response of auger electrons
US3596091A (en) * 1969-05-19 1971-07-27 Varian Associates Induced electron emission spectrometer having a unipotential sample chamber

Also Published As

Publication number Publication date
DE2223086A1 (en) 1972-11-30
US3787692A (en) 1974-01-22
CA961175A (en) 1975-01-14
FR2138013A1 (en) 1972-12-29
FR2138013B1 (en) 1973-07-13

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees